JPS6114648Y2 - - Google Patents

Info

Publication number
JPS6114648Y2
JPS6114648Y2 JP1980111291U JP11129180U JPS6114648Y2 JP S6114648 Y2 JPS6114648 Y2 JP S6114648Y2 JP 1980111291 U JP1980111291 U JP 1980111291U JP 11129180 U JP11129180 U JP 11129180U JP S6114648 Y2 JPS6114648 Y2 JP S6114648Y2
Authority
JP
Japan
Prior art keywords
liquid
spool valve
flexible membrane
force motor
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980111291U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5733304U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980111291U priority Critical patent/JPS6114648Y2/ja
Publication of JPS5733304U publication Critical patent/JPS5733304U/ja
Application granted granted Critical
Publication of JPS6114648Y2 publication Critical patent/JPS6114648Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Magnetically Actuated Valves (AREA)
  • Servomotors (AREA)
  • Multiple-Way Valves (AREA)
JP1980111291U 1980-08-06 1980-08-06 Expired JPS6114648Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980111291U JPS6114648Y2 (cs) 1980-08-06 1980-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980111291U JPS6114648Y2 (cs) 1980-08-06 1980-08-06

Publications (2)

Publication Number Publication Date
JPS5733304U JPS5733304U (cs) 1982-02-22
JPS6114648Y2 true JPS6114648Y2 (cs) 1986-05-08

Family

ID=29472402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980111291U Expired JPS6114648Y2 (cs) 1980-08-06 1980-08-06

Country Status (1)

Country Link
JP (1) JPS6114648Y2 (cs)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5989807A (ja) * 1982-11-12 1984-05-24 Hitachi Ltd フオ−スモ−タ型サ−ボ弁
DE10331216B3 (de) * 2003-07-10 2004-09-09 Hydac System Gmbh Fluidkühlvorrichtung
CN111936295A (zh) 2018-03-28 2020-11-13 汉高知识产权控股有限责任公司 可光固化组合物和使用可光固化组合物在膜表面上形成形貌特征的方法

Also Published As

Publication number Publication date
JPS5733304U (cs) 1982-02-22

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