JPS6114631B2 - - Google Patents

Info

Publication number
JPS6114631B2
JPS6114631B2 JP55081134A JP8113480A JPS6114631B2 JP S6114631 B2 JPS6114631 B2 JP S6114631B2 JP 55081134 A JP55081134 A JP 55081134A JP 8113480 A JP8113480 A JP 8113480A JP S6114631 B2 JPS6114631 B2 JP S6114631B2
Authority
JP
Japan
Prior art keywords
signal
image
scanning
circuit
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55081134A
Other languages
English (en)
Japanese (ja)
Other versions
JPS577058A (en
Inventor
Takeshi Sato
Shunichi Suzaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NICHIDENSHI TECHNICS KK
Original Assignee
NICHIDENSHI TECHNICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NICHIDENSHI TECHNICS KK filed Critical NICHIDENSHI TECHNICS KK
Priority to JP8113480A priority Critical patent/JPS577058A/ja
Publication of JPS577058A publication Critical patent/JPS577058A/ja
Publication of JPS6114631B2 publication Critical patent/JPS6114631B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP8113480A 1980-06-16 1980-06-16 Focus monitoring method for scan electron microscope Granted JPS577058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8113480A JPS577058A (en) 1980-06-16 1980-06-16 Focus monitoring method for scan electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8113480A JPS577058A (en) 1980-06-16 1980-06-16 Focus monitoring method for scan electron microscope

Publications (2)

Publication Number Publication Date
JPS577058A JPS577058A (en) 1982-01-14
JPS6114631B2 true JPS6114631B2 (cs) 1986-04-19

Family

ID=13737923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8113480A Granted JPS577058A (en) 1980-06-16 1980-06-16 Focus monitoring method for scan electron microscope

Country Status (1)

Country Link
JP (1) JPS577058A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3751841B2 (ja) * 2001-02-26 2006-03-01 株式会社日立製作所 電子線を用いた検査装置及び電子線を用いた検査方法

Also Published As

Publication number Publication date
JPS577058A (en) 1982-01-14

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