JPS61145014A - 基板搬送装置 - Google Patents

基板搬送装置

Info

Publication number
JPS61145014A
JPS61145014A JP59268870A JP26887084A JPS61145014A JP S61145014 A JPS61145014 A JP S61145014A JP 59268870 A JP59268870 A JP 59268870A JP 26887084 A JP26887084 A JP 26887084A JP S61145014 A JPS61145014 A JP S61145014A
Authority
JP
Japan
Prior art keywords
guide member
moving
substrate
guide
movement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59268870A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0543610B2 (https=
Inventor
Toru Takahashi
透 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Tokico Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokico Ltd filed Critical Tokico Ltd
Priority to JP59268870A priority Critical patent/JPS61145014A/ja
Publication of JPS61145014A publication Critical patent/JPS61145014A/ja
Publication of JPH0543610B2 publication Critical patent/JPH0543610B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G21/00—Supporting or protective framework or housings for endless load-carriers or traction elements of belt or chain conveyors
    • B65G21/20—Means incorporated in, or attached to, framework or housings for guiding load-carriers, traction elements or loads supported on moving surfaces
    • B65G21/2045—Mechanical means for guiding or retaining the load on the load-carrying surface
    • B65G21/2063—Mechanical means for guiding or retaining the load on the load-carrying surface comprising elements not movable in the direction of load-transport
    • B65G21/2072—Laterial guidance means

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Framework For Endless Conveyors (AREA)
  • Control Of Conveyors (AREA)
JP59268870A 1984-12-20 1984-12-20 基板搬送装置 Granted JPS61145014A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59268870A JPS61145014A (ja) 1984-12-20 1984-12-20 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59268870A JPS61145014A (ja) 1984-12-20 1984-12-20 基板搬送装置

Publications (2)

Publication Number Publication Date
JPS61145014A true JPS61145014A (ja) 1986-07-02
JPH0543610B2 JPH0543610B2 (https=) 1993-07-02

Family

ID=17464402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59268870A Granted JPS61145014A (ja) 1984-12-20 1984-12-20 基板搬送装置

Country Status (1)

Country Link
JP (1) JPS61145014A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0667428U (ja) * 1993-03-09 1994-09-22 山形カシオ株式会社 基板位置決装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0667428U (ja) * 1993-03-09 1994-09-22 山形カシオ株式会社 基板位置決装置

Also Published As

Publication number Publication date
JPH0543610B2 (https=) 1993-07-02

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