JPS61143513A - 真空加熱装置 - Google Patents
真空加熱装置Info
- Publication number
- JPS61143513A JPS61143513A JP26289184A JP26289184A JPS61143513A JP S61143513 A JPS61143513 A JP S61143513A JP 26289184 A JP26289184 A JP 26289184A JP 26289184 A JP26289184 A JP 26289184A JP S61143513 A JPS61143513 A JP S61143513A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum heating
- heated
- cooling
- gas
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26289184A JPS61143513A (ja) | 1984-12-14 | 1984-12-14 | 真空加熱装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP26289184A JPS61143513A (ja) | 1984-12-14 | 1984-12-14 | 真空加熱装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61143513A true JPS61143513A (ja) | 1986-07-01 |
JPH0121844B2 JPH0121844B2 (enrdf_load_stackoverflow) | 1989-04-24 |
Family
ID=17382050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP26289184A Granted JPS61143513A (ja) | 1984-12-14 | 1984-12-14 | 真空加熱装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61143513A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61279618A (ja) * | 1985-06-03 | 1986-12-10 | Toray Eng Co Ltd | 真空金属熱処理装置 |
JPS63100124A (ja) * | 1986-10-16 | 1988-05-02 | Shimizu Densetsu Kogyo Kk | 熱処理装置 |
JPH06172962A (ja) * | 1992-12-09 | 1994-06-21 | Riken Corp | 浸炭窒化炉 |
KR100291531B1 (ko) * | 1993-01-19 | 2001-06-01 | 로날드 디. 맥크레이 | 미용 팃슈 포켓 팩 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5217305A (en) * | 1975-05-30 | 1977-02-09 | Degussa | Furnace construction for tempering and quenching of blank |
JPS61517A (ja) * | 1984-06-13 | 1986-01-06 | Hitachi Metals Ltd | 流動層冷却装置を用いた真空熱処理装置 |
-
1984
- 1984-12-14 JP JP26289184A patent/JPS61143513A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5217305A (en) * | 1975-05-30 | 1977-02-09 | Degussa | Furnace construction for tempering and quenching of blank |
JPS61517A (ja) * | 1984-06-13 | 1986-01-06 | Hitachi Metals Ltd | 流動層冷却装置を用いた真空熱処理装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61279618A (ja) * | 1985-06-03 | 1986-12-10 | Toray Eng Co Ltd | 真空金属熱処理装置 |
JPS63100124A (ja) * | 1986-10-16 | 1988-05-02 | Shimizu Densetsu Kogyo Kk | 熱処理装置 |
JPH06172962A (ja) * | 1992-12-09 | 1994-06-21 | Riken Corp | 浸炭窒化炉 |
KR100291531B1 (ko) * | 1993-01-19 | 2001-06-01 | 로날드 디. 맥크레이 | 미용 팃슈 포켓 팩 |
Also Published As
Publication number | Publication date |
---|---|
JPH0121844B2 (enrdf_load_stackoverflow) | 1989-04-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6139239A (en) | System for transferring wafers from cassettes to furnaces and method | |
KR100848767B1 (ko) | 기판의 열처리 방법 및 기판의 열처리 장치 | |
KR20010034036A (ko) | 2-웨이퍼 로드록 웨이퍼 처리장치 및 그 로딩 및 언로딩방법 | |
JP2001524267A (ja) | 複数のシングル・ウェーハ・ロードロック・ウェーハ加工装置ならびにそのローディングおよびアンローディングの方法 | |
WO2012002532A1 (ja) | 多室型熱処理装置 | |
KR100935870B1 (ko) | 자동창고 | |
JP2010219228A (ja) | 基板処理装置 | |
JPS61143513A (ja) | 真空加熱装置 | |
US4717339A (en) | Curing oven | |
US6852601B2 (en) | Heat treatment method that includes a low negative pressure | |
US3998441A (en) | Furnace for tempering and hardening workpieces | |
EP0252256B1 (en) | Apparatus for rapidly removing binder from a green body | |
JPH05201506A (ja) | クリーンルーム用保管庫 | |
JPS62290126A (ja) | 縦型半導体熱処理装置への半導体基板の搬入出方法および外気混入防止装置 | |
JP3853487B2 (ja) | 連続式熱処理炉 | |
JP3526980B2 (ja) | 真空・ガス雰囲気熱処理炉 | |
JP5634127B2 (ja) | 熱処理炉 | |
EP0871786B1 (en) | A method and an apparatus for the treatment of components by a gas mixture | |
CA1248346A (en) | Curing oven | |
KR100636714B1 (ko) | 열처리 장치 및 열처리 방법 | |
JPH0538036Y2 (enrdf_load_stackoverflow) | ||
KR20220094014A (ko) | 기판 처리 장치 및 기판 처리 방법 | |
KR102389879B1 (ko) | 질소 누출 방지 기능을 구비한 이에프이엠 시스템 | |
JPH02639Y2 (enrdf_load_stackoverflow) | ||
KR102303595B1 (ko) | 지지유닛 및 기판 처리 장치 |