JPS61140115A - High-frequency circuit device - Google Patents

Abstract

PURPOSE:To avoid particular expansion of the substrate area by covering the belt-like metal film forming inductance with the powder of a ferrimagnetic material, thereby obtaining an increase in inductance. CONSTITUTION:An inductance conductor 2 formed on a ceramic substrate 1 by detouring a belt-like metal film in a shape of wave is covered with a coated material 4 formed of a volatile solvent into which the powder of a ferrimagnetic material was mixed. A curve 11 shows the characteristic of a prior art example, and a curve 12 shows that of the present invention. In the curve 12, reactance Zi is large due to the increase in inductance, and it is positioned above the curve 11. However, the curve 12 approaches the curve 11 as the frequency becomes higher, and it becomes saturated. This is caused by the frequency characteristic of the permeability mu of the ferrimagnetic material, but the reaction in the frequency band to be used can increased by the powder of the ferrimagnetic material applied on and in the proximity of the inductance conductor.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a hybrid integrated circuit in which passive components such as resistors, capacitors, and inductances, and active elements such as transistors and diodes are formed or mounted on a ceramic substrate. The present invention relates to a high frequency circuit device configured by.

[Conventional technology]

Conventionally, a thin film or thick film resistor is formed on a ceramic substrate, a metal is vapor deposited in a band shape to form an inductance, and semiconductor active elements such as transistors and diodes, chip capacitors, etc. are mounted on the substrate. Many high-frequency circuit devices using hybrid integrated circuits are being put into practical use.

FIG. 3 is a plan view showing the inductance part in these high-frequency circuit devices. FIG. The figure shows the inductance of the band-shaped metal film 3 formed in a rectangular overwound shape, and if the inductance is to be increased, the occupied area must be increased. Note that 6 is a chip capacitor.

[Problem that the invention seeks to solve]

As mentioned above, in order to form inductance within a limited substrate area, there are limits to the width and length of the strip metal film formed on the substrate, and in order to obtain sufficient inductance, the area of the ceramic substrate An increase in the substrate area not only causes problems in terms of characteristics but also leads to an increase in price, so it is of a nature that should naturally be avoided.

[Failure to solve the problem]

In order to solve the above-mentioned problem, in the present invention, the inductance is increased by covering the strip-shaped metal film forming the inductance with ferrimagnetic powder, thereby avoiding the need to further increase the substrate area. There is.

〔Example〕

Next, the present invention will be explained by examples.

FIG. 1(a) is a plan view of an inductance portion according to an embodiment of the present invention, and FIG. 1(b) is a sectional view taken along line AA in FIG. 1(a). In FIGS. 1(a) and 1(b), in order to obtain a desired inductance value, the inductance conductor 2 is formed by waving a band-shaped metal film around the ceramic substrate 1, and is made of ferrimagnetic powder. It is covered with a covering material 4 formed by coating an evaporative solvent mixed with.

FIG. 2(a) is a plan view of an embodiment of the present invention in a spiral inductance, and FIG. 2(b) is a sectional view taken along the line AA in FIG. 2(a). In FIGS. 2(a) and 2(b), an inductance conductor 3 made of a band-shaped metal film is formed in a rectangular spiral shape on a ceramic substrate l, and the conductor 3
Workpiece 4 made of ferrimagnetic powder, similar to the example shown in the figure.
covered by.

〔Effect of the invention〕

FIG. 4 shows the inductance Zi according to an embodiment of the present invention.
It is a graph showing an example of -f characteristics. Curve 11 is the characteristic of the conventional example, and curve 12 is the characteristic of the present invention. In curve 12, the reactance Zi is also large due to the increase in inductance, and is above the curve 11.

However, as the frequency increases, the curve 12 approaches the curve 11 and becomes saturated. This is due to the frequency characteristics of the magnetic permeability μ of the ferrimagnetic material. However, according to the present invention, the reactance in the used frequency band can be increased by applying ferrimagnetic powder on and near the inductance conductor. As a result, the area occupied by the inductance on the toilet ceramic substrate can be reduced, and the high frequency circuit device can be made smaller and more highly integrated due to the hybrid integrated circuit configuration. Furthermore, compared to using a three-dimensional ferrite core, the number of manufacturing steps is small and the height can be reduced because only powder is applied.

[Brief explanation of the drawing]

FIG. 1(a) is a plan view of an inductance portion according to an embodiment of the present invention, FIG. FIG. 3(b) is a plan view of the inductance portion of the conventional high-frequency circuit device, and FIG. 4 is a graph showing the Zi-f characteristics of inductance according to the present invention and the conventional example. 1... Ceramic substrate, 2, 3... Inductance conductor, 4 ......ferrimagnetic coating,
6... Chip capacitor. Figure 1 Figure Z (Figure 3± Figure 4)

Claims (1)

[Claims] In a high-frequency circuit device consisting of a hybrid integrated circuit device in which circuit components such as thin film resistors, thick film resistors, semiconductor components, and chip capacitors are formed or mounted on a ceramic flat substrate, the circuit components are formed by vapor-depositing metal on the ceramic substrate. A high frequency circuit device characterized in that an inductance is partially or entirely covered with ferrimagnetic powder.