JPS61138202A - 回折格子の製造方法 - Google Patents

回折格子の製造方法

Info

Publication number
JPS61138202A
JPS61138202A JP25998084A JP25998084A JPS61138202A JP S61138202 A JPS61138202 A JP S61138202A JP 25998084 A JP25998084 A JP 25998084A JP 25998084 A JP25998084 A JP 25998084A JP S61138202 A JPS61138202 A JP S61138202A
Authority
JP
Japan
Prior art keywords
diffraction grating
region
film
substrate
interference exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25998084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0374805B2 (enrdf_load_stackoverflow
Inventor
Shigeyuki Akiba
重幸 秋葉
Katsuyuki Uko
宇高　勝之
Kazuo Sakai
堺　和夫
Yuichi Matsushima
松島　裕一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KDDI Corp
Original Assignee
Kokusai Denshin Denwa KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Denshin Denwa KK filed Critical Kokusai Denshin Denwa KK
Priority to JP25998084A priority Critical patent/JPS61138202A/ja
Priority to US06/710,984 priority patent/US4660934A/en
Priority to GB08507413A priority patent/GB2157849B/en
Publication of JPS61138202A publication Critical patent/JPS61138202A/ja
Publication of JPH0374805B2 publication Critical patent/JPH0374805B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Integrated Circuits (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP25998084A 1984-03-21 1984-12-11 回折格子の製造方法 Granted JPS61138202A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP25998084A JPS61138202A (ja) 1984-12-11 1984-12-11 回折格子の製造方法
US06/710,984 US4660934A (en) 1984-03-21 1985-03-12 Method for manufacturing diffraction grating
GB08507413A GB2157849B (en) 1984-03-21 1985-03-21 Method for manufacturing a diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25998084A JPS61138202A (ja) 1984-12-11 1984-12-11 回折格子の製造方法

Publications (2)

Publication Number Publication Date
JPS61138202A true JPS61138202A (ja) 1986-06-25
JPH0374805B2 JPH0374805B2 (enrdf_load_stackoverflow) 1991-11-28

Family

ID=17341603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25998084A Granted JPS61138202A (ja) 1984-03-21 1984-12-11 回折格子の製造方法

Country Status (1)

Country Link
JP (1) JPS61138202A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004513504A (ja) * 2000-04-18 2004-04-30 オブドゥカト　アクティエボラーグ 構造体に関連する基板及びその製造方法
US7282455B2 (en) * 2004-12-10 2007-10-16 Sumitomo Electric Industries, Ltd. Method of producing a diffraction grating

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004513504A (ja) * 2000-04-18 2004-04-30 オブドゥカト　アクティエボラーグ 構造体に関連する基板及びその製造方法
US7282455B2 (en) * 2004-12-10 2007-10-16 Sumitomo Electric Industries, Ltd. Method of producing a diffraction grating

Also Published As

Publication number Publication date
JPH0374805B2 (enrdf_load_stackoverflow) 1991-11-28

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees