JPH0461331B2 - - Google Patents

Info

Publication number
JPH0461331B2
JPH0461331B2 JP14582685A JP14582685A JPH0461331B2 JP H0461331 B2 JPH0461331 B2 JP H0461331B2 JP 14582685 A JP14582685 A JP 14582685A JP 14582685 A JP14582685 A JP 14582685A JP H0461331 B2 JPH0461331 B2 JP H0461331B2
Authority
JP
Japan
Prior art keywords
diffraction grating
region
photoresist film
substrate
beam interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14582685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS627002A (ja
Inventor
Shigeyuki Akiba
Katsuyuki Uko
Juichi Matsushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KDDI Corp
Original Assignee
Kokusai Denshin Denwa KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Denshin Denwa KK filed Critical Kokusai Denshin Denwa KK
Priority to JP14582685A priority Critical patent/JPS627002A/ja
Publication of JPS627002A publication Critical patent/JPS627002A/ja
Publication of JPH0461331B2 publication Critical patent/JPH0461331B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Lasers (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP14582685A 1985-07-04 1985-07-04 位相シフト回折格子の製造方法 Granted JPS627002A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14582685A JPS627002A (ja) 1985-07-04 1985-07-04 位相シフト回折格子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14582685A JPS627002A (ja) 1985-07-04 1985-07-04 位相シフト回折格子の製造方法

Publications (2)

Publication Number Publication Date
JPS627002A JPS627002A (ja) 1987-01-14
JPH0461331B2 true JPH0461331B2 (enrdf_load_stackoverflow) 1992-09-30

Family

ID=15394013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14582685A Granted JPS627002A (ja) 1985-07-04 1985-07-04 位相シフト回折格子の製造方法

Country Status (1)

Country Link
JP (1) JPS627002A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5792528A (en) * 1994-06-17 1998-08-11 Atomic Energy Corporation Of South Africa Limited Process for the production of plastic components for containing and/or transporting fluids
CN115663442A (zh) * 2017-11-21 2023-01-31 应用材料公司 制造波导组合器的方法
JP7179063B6 (ja) 2017-11-29 2022-12-16 アプライド マテリアルズ インコーポレイテッド 導波結合器のダイレクトエッチング製造の方法

Also Published As

Publication number Publication date
JPS627002A (ja) 1987-01-14

Similar Documents

Publication Publication Date Title
EP0188919B1 (en) A method for the formation of a diffraction grating
US5340637A (en) Optical device diffraction gratings and a photomask for use in the same
US6200711B1 (en) Phase mask for manufacturing diffraction grating, and method of manufacture
CA2023510C (en) Single wavelength oscillating semiconductor laser device and method for manufacturing diffraction grating
JPH06201909A (ja) 回折格子の製造方法
JPS61190368A (ja) 微細パタ−ンの形成方法
US4826291A (en) Method for manufacturing diffraction grating
EP0566886B1 (en) Method of producing diffraction grating
JPH0461331B2 (enrdf_load_stackoverflow)
US5221429A (en) Method of manufacturing phase-shifted diffraction grating
EP0490320B1 (en) A method for producing a diffraction grating
JPH03238454A (ja) 干渉露光用マスクの製造方法
JP2527833B2 (ja) 回折格子の製造方法
JPH0323884B2 (enrdf_load_stackoverflow)
JPH0374804B2 (enrdf_load_stackoverflow)
JPS61138202A (ja) 回折格子の製造方法
JPH05343806A (ja) 位相シフト型回折格子の製造方法
WO2005048338A1 (en) A method and a semiconductor substrate for transferring a pattern from a phase mask to a substrate
JPS6398608A (ja) 回折格子の製造方法
JPH052201B2 (enrdf_load_stackoverflow)
JPH02213182A (ja) 回折格子の製造方法
JPH07101302B2 (ja) 回折格子の作製方法及びそれに用いるオートマスク
JPH01225189A (ja) 回折格子の製造方法
JPH04239791A (ja) 回折格子の製造方法
JPH052142B2 (enrdf_load_stackoverflow)