JPS61138010A - Suction burning device of inflammable powder - Google Patents

Abstract

PURPOSE:To treat with safely an inflammable powder generated by a method wherein an inflammable powder mixed with air are discharged near by combustion flame, whose fuel is propane gas or the like, and they are burnt under the above mentioned flame, in producing semi-conductor products. CONSTITUTION:An inflammable powder in a reaction furnace 14 is sucked by a suction nozzle 9, on the other hand, the secondary air is sucked from the air suction-port at the tip-end of the suction pipe 10, where both the powder and air are mixed together. And the mixture are discharged into underneath or near by a burner 7 and or water puddle at lower portion of the combustion cylinder 4. Simaltaneously, a combustion gas is burnt by the igniting the burner 7, and the mixture of the inflammable powder and air are burnt around the burner unit 7. After that the generated powder is treated with the powder removing device 1 and discharged out by a suction force of a blower 2. By the use of this procedure, it is possible to treat with safely the inflammable powder or the like.

Description

DETAILED DESCRIPTION OF THE INVENTION When manufacturing semiconductors, exhaust gas containing flammable powder and silane gas is emitted from the furnace, but since this exhaust gas is harmful, it is necessary to treat and exhaust each gas.

However, combustible powders are self-combustible under certain conditions;
In addition, it is very light and does not dissolve in water, so even if you try to remove it by discharging it into water and letting it settle, it will float on the water surface and cannot be treated, making treatment extremely difficult.

The present application was invented in view of the above-mentioned drawbacks, and is a method for safely disposing of flammable powder by burning a fuel such as propane, discharging a mixture of flammable powder and air near the flame, and burning it with a gas flame. This invention relates to a suction combustion device for combustible powder.

Now, to explain the example, a combustible gas pipe (6) is connected to a blower (27) through a powder removal equipment (11) in a combustion cylinder (4) having an exhaust pipe (3) at the top. A combustor (8) is formed by inserting a gas burner (7) connected via a the combustion tube (4
) and suction tube ul.

Open the rear end near the gas burner (7) to discharge combustible powder gas into the combustion atmosphere of the gas burner (7).
A secondary air intake hole (111) is bored in the connection part of the

The front part of the suction tube (11 m) is a flexible tube (10a), and the direction of the small diameter suction nozzle (9) can be changed freely to clean the inside of the furnace.

A negative pressure regulating valve (L) is installed in a part of the combustion tube (4).
8) A check valve 0 was installed in the suction pipe α1 at a location close to the combustion cylinder (4) to prevent the combustion flame from flowing back.

Furthermore, the suction pipe is branched into a plurality of pipes in the middle, each having a small-diameter suction nozzle (9), and the suction pipe aω and the suction nozzle (9).
By forming a secondary air suction hole (11) in the connecting part of the furnace, one suction nozzle (9) is used for cleaning inside the furnace
Another suction nozzle (9) can be connected to the dust reservoir (to) of the reactor I, which is very convenient.

The above is a description of the basic principles of the present application based on FIG.

In the case of Fig. 2, a lower water outlet is installed in the combustion tube (4) with a tube pump having a negative pressure regulating valve 0, and separately, the rear end of the suction tube α is closed and the suction tube (11 A number of injection holes (10b) are drilled in the rear of the tank, a nuclear suction tube (11) is inserted into the water, air containing flammable powder is injected into the water, and the flammable powder that floats to the water surface is heated with a gas burner (7). It is treated by combustion.

The case in Figure '3 is the same as Figure 1, but when burning combustible powder, the exhaust gas containing silane gas is also burned at the same time, and the outer periphery of the combustion tube (4) is filled with nitrogen gas. The exhaust gas injection 'fa・ containing 7-run gas surrounded by the injection pipe αη is inserted and opened, and the gas injection pipe (181It
The injection pipe (17) is made slightly shorter than the nitrogen gas injection pipe (L?) and burns the exhaust gas at the top of the nitrogen gas atmosphere.
Prevent combustion gas from adhering to the tip of the ts.

The nitrogen gas injection pipe is closed on the outside of the combustion cylinder (4), and the gas pipe connected to the nitrogen gas cylinder is connected in an open manner. The gas injection pipe 11 is connected to the reactor via a vacuum pump.

Since the present application is constructed as described above, the combustible powder in the reaction Fu4) is sucked by the suction nozzle (9), and the secondary air is sucked from the air suction hole I at the tip of the suction pipe a1. Mix it with combustible powder and inject the mixture into the water below or near the gas bar f-(7) in the combustion tube (4) or into the water in the water pool at the bottom of the combustion tube (4)5, and at the same time Gas burner (7
) is ignited to burn the combustible gas, and the mixture of the combustible powder and air is burned in the gas burner (7) section. Prower (
It is a 27K suction exhaust system.

In the case of FIG. 3, 51C1 is used so that the combustible powder can be burned and the exhaust gas containing silane gas can also be burned in the upper part of the nitrogen gas atmosphere.

In the present application, a combustor is constructed by inserting a gas burner connected via a combustible gas pipe into a combustion cylinder having an exhaust pipe at the top, which is connected to a blower through powder removal equipment. Separately from this, form a suction pipe with a small-diameter suction nozzle at its tip, insert the suction pipe into the combustion cylinder, and open the rear end of the suction pipe near the gas burner, Since a secondary air suction hole is provided at the connection between the suction nozzle and the suction pipe, it has features such as being able to completely incinerate and exhaust combustible powder.

[Brief explanation of the drawing]

1 to 3 are cross-sectional views showing embodiments of the present application.

Claims (3)

[Claims] (1) A combustor is formed by inserting a gas burner connected via a combustible gas pipe into a combustion cylinder that has an exhaust pipe at the top that is connected to a blower through powder removal equipment. A suction tube is formed with a small-diameter suction nozzle at its tip, the suction tube is inserted into the combustion cylinder, and the rear end of the suction tube is opened near the gas burner. A combustible powder suction combustion device characterized by having an air suction hole. (2) For the opening of the suction pipe described in claim 1, a water pool is formed at the bottom of the combustion cylinder, the suction pipe is inserted into the water, and a number of gas injection holes are bored in the suction pipe. A combustible powder suction combustion device characterized by comprising: (3) A combustor is formed by inserting a gas burner connected via a combustible gas pipe into a combustion cylinder that has an exhaust pipe at the top that is connected to a blower through powder removal equipment, and separately from this. A suction tube is formed with a small-diameter suction nozzle at its tip, the suction tube is inserted into the combustion cylinder, and the rear end of the suction tube is opened near the gas burner. A suction combustion device for combustible powder, characterized in that a secondary air suction hole is bored, and an exhaust gas injection pipe containing silane gas whose outer periphery is surrounded by a nitrogen gas injection pipe is inserted and opened in a combustion cylinder.