JPS61135457U - - Google Patents

Info

Publication number
JPS61135457U
JPS61135457U JP1923085U JP1923085U JPS61135457U JP S61135457 U JPS61135457 U JP S61135457U JP 1923085 U JP1923085 U JP 1923085U JP 1923085 U JP1923085 U JP 1923085U JP S61135457 U JPS61135457 U JP S61135457U
Authority
JP
Japan
Prior art keywords
electron beam
scanning
signal
objective lens
rotation means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1923085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1923085U priority Critical patent/JPS61135457U/ja
Publication of JPS61135457U publication Critical patent/JPS61135457U/ja
Pending legal-status Critical Current

Links

JP1923085U 1985-02-14 1985-02-14 Pending JPS61135457U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1923085U JPS61135457U (enExample) 1985-02-14 1985-02-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1923085U JPS61135457U (enExample) 1985-02-14 1985-02-14

Publications (1)

Publication Number Publication Date
JPS61135457U true JPS61135457U (enExample) 1986-08-23

Family

ID=30508611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1923085U Pending JPS61135457U (enExample) 1985-02-14 1985-02-14

Country Status (1)

Country Link
JP (1) JPS61135457U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031770A (enExample) * 1973-04-19 1975-03-28
JPS5721830A (en) * 1980-07-14 1982-02-04 Tanaka Kikinzoku Kogyo Kk Bonding wire for semiconductor element

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5031770A (enExample) * 1973-04-19 1975-03-28
JPS5721830A (en) * 1980-07-14 1982-02-04 Tanaka Kikinzoku Kogyo Kk Bonding wire for semiconductor element

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