JPS6113372B2 - - Google Patents
Info
- Publication number
- JPS6113372B2 JPS6113372B2 JP1300676A JP1300676A JPS6113372B2 JP S6113372 B2 JPS6113372 B2 JP S6113372B2 JP 1300676 A JP1300676 A JP 1300676A JP 1300676 A JP1300676 A JP 1300676A JP S6113372 B2 JPS6113372 B2 JP S6113372B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- substrate
- substrate crystal
- melt
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 69
- 239000000758 substrate Substances 0.000 claims description 51
- 238000000034 method Methods 0.000 claims description 24
- 239000007791 liquid phase Substances 0.000 claims description 17
- 239000000155 melt Substances 0.000 claims description 13
- 239000000126 substance Substances 0.000 claims description 5
- 229920006395 saturated elastomer Polymers 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 24
- 239000010410 layer Substances 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000003575 carbonaceous material Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000005979 thermal decomposition reaction Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000012047 saturated solution Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1300676A JPS5295970A (en) | 1976-02-09 | 1976-02-09 | Liquid growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1300676A JPS5295970A (en) | 1976-02-09 | 1976-02-09 | Liquid growth |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5295970A JPS5295970A (en) | 1977-08-12 |
| JPS6113372B2 true JPS6113372B2 (enrdf_load_stackoverflow) | 1986-04-12 |
Family
ID=11821080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1300676A Granted JPS5295970A (en) | 1976-02-09 | 1976-02-09 | Liquid growth |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5295970A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5558519A (en) * | 1978-10-24 | 1980-05-01 | Nec Corp | Vapor phase growth of 3-v group compound semiconductor |
| JPS5559716A (en) * | 1978-10-30 | 1980-05-06 | Nec Corp | Liquid phase growing method of 3-5 group compound semiconductor |
-
1976
- 1976-02-09 JP JP1300676A patent/JPS5295970A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5295970A (en) | 1977-08-12 |
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