JPS61130487A - プラズマ・インジエクシヨン・ｃｖｄ装置 - Google Patents

プラズマ・インジエクシヨン・ｃｖｄ装置

Info

Publication number
JPS61130487A
JPS61130487A JP59252205A JP25220584A JPS61130487A JP S61130487 A JPS61130487 A JP S61130487A JP 59252205 A JP59252205 A JP 59252205A JP 25220584 A JP25220584 A JP 25220584A JP S61130487 A JPS61130487 A JP S61130487A
Authority
JP
Japan
Prior art keywords
plasma
accelerating
vacuum chamber
film
cvd apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59252205A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326195B2 (enrdf_load_stackoverflow
Inventor
Hideo Kurokawa
英雄 黒川
Tsutomu Mitani
力 三谷
Taketoshi Yonezawa
米澤　武敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59252205A priority Critical patent/JPS61130487A/ja
Priority to DE3587881T priority patent/DE3587881T2/de
Priority to EP85115085A priority patent/EP0183254B1/en
Priority to US06/803,001 priority patent/US4645977A/en
Publication of JPS61130487A publication Critical patent/JPS61130487A/ja
Publication of JPS6326195B2 publication Critical patent/JPS6326195B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP59252205A 1984-08-31 1984-11-29 プラズマ・インジエクシヨン・ｃｖｄ装置 Granted JPS61130487A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP59252205A JPS61130487A (ja) 1984-11-29 1984-11-29 プラズマ・インジエクシヨン・ｃｖｄ装置
DE3587881T DE3587881T2 (de) 1984-11-29 1985-11-28 Verfahren zur plasma-chemischen Abscheidung aus der Dampfphase und Verfahren zur Herstellung eines Films von diamantähnlichem Kohlenstoff.
EP85115085A EP0183254B1 (en) 1984-11-29 1985-11-28 Plasma CVD apparatus and method for forming a diamond-like carbon film
US06/803,001 US4645977A (en) 1984-08-31 1985-11-29 Plasma CVD apparatus and method for forming a diamond like carbon film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59252205A JPS61130487A (ja) 1984-11-29 1984-11-29 プラズマ・インジエクシヨン・ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS61130487A true JPS61130487A (ja) 1986-06-18
JPS6326195B2 JPS6326195B2 (enrdf_load_stackoverflow) 1988-05-28

Family

ID=17233960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59252205A Granted JPS61130487A (ja) 1984-08-31 1984-11-29 プラズマ・インジエクシヨン・ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS61130487A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61238962A (ja) * 1985-04-16 1986-10-24 Matsushita Electric Ind Co Ltd 膜形成装置
US9835124B2 (en) 2013-08-30 2017-12-05 Robert Bosch Gmbh Fuel injector
JP2023504812A (ja) * 2019-12-04 2023-02-07 チャンスー フェイヴァード ナノテクノロジー カンパニー リミテッド Ｄｌｃ製造装置及び製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5483376A (en) * 1977-12-16 1979-07-03 Fujitsu Ltd Plasma treatment equipment
JPS59200753A (ja) * 1983-04-30 1984-11-14 Mitsubishi Electric Corp 薄膜形成装置
JPS59205471A (ja) * 1983-05-02 1984-11-21 Kowa Eng Kk 被処理物品の表面に黒色被膜を形成する方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5483376A (en) * 1977-12-16 1979-07-03 Fujitsu Ltd Plasma treatment equipment
JPS59200753A (ja) * 1983-04-30 1984-11-14 Mitsubishi Electric Corp 薄膜形成装置
JPS59205471A (ja) * 1983-05-02 1984-11-21 Kowa Eng Kk 被処理物品の表面に黒色被膜を形成する方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61238962A (ja) * 1985-04-16 1986-10-24 Matsushita Electric Ind Co Ltd 膜形成装置
US9835124B2 (en) 2013-08-30 2017-12-05 Robert Bosch Gmbh Fuel injector
JP2023504812A (ja) * 2019-12-04 2023-02-07 チャンスー フェイヴァード ナノテクノロジー カンパニー リミテッド Ｄｌｃ製造装置及び製造方法

Also Published As

Publication number Publication date
JPS6326195B2 (enrdf_load_stackoverflow) 1988-05-28

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