JPS6112990B2 - - Google Patents
Info
- Publication number
- JPS6112990B2 JPS6112990B2 JP4573881A JP4573881A JPS6112990B2 JP S6112990 B2 JPS6112990 B2 JP S6112990B2 JP 4573881 A JP4573881 A JP 4573881A JP 4573881 A JP4573881 A JP 4573881A JP S6112990 B2 JPS6112990 B2 JP S6112990B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- discharge
- arc discharge
- glow discharge
- vacuum reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010891 electric arc Methods 0.000 claims description 53
- 238000001514 detection method Methods 0.000 claims description 30
- 238000005121 nitriding Methods 0.000 claims description 23
- 230000002459 sustained effect Effects 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 8
- 238000005520 cutting process Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 9
- 239000003990 capacitor Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 230000008569 process Effects 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4573881A JPS57159537A (en) | 1981-03-27 | 1981-03-27 | Method and apparatus for ion nitriding treatment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4573881A JPS57159537A (en) | 1981-03-27 | 1981-03-27 | Method and apparatus for ion nitriding treatment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57159537A JPS57159537A (en) | 1982-10-01 |
| JPS6112990B2 true JPS6112990B2 (de) | 1986-04-11 |
Family
ID=12727653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4573881A Granted JPS57159537A (en) | 1981-03-27 | 1981-03-27 | Method and apparatus for ion nitriding treatment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57159537A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4367953B2 (ja) | 2003-08-07 | 2009-11-18 | 株式会社日立国際電気 | 基板処理装置及び基板処理方法 |
| JP4939403B2 (ja) | 2005-03-30 | 2012-05-23 | 本田技研工業株式会社 | エンジンバルブの表面改質処理用治具及びそれを用いた表面改質処理方法 |
-
1981
- 1981-03-27 JP JP4573881A patent/JPS57159537A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57159537A (en) | 1982-10-01 |
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