JPS57159537A - Method and apparatus for ion nitriding treatment - Google Patents
Method and apparatus for ion nitriding treatmentInfo
- Publication number
- JPS57159537A JPS57159537A JP4573881A JP4573881A JPS57159537A JP S57159537 A JPS57159537 A JP S57159537A JP 4573881 A JP4573881 A JP 4573881A JP 4573881 A JP4573881 A JP 4573881A JP S57159537 A JPS57159537 A JP S57159537A
- Authority
- JP
- Japan
- Prior art keywords
- discharge
- longlasting
- nitriding treatment
- voltage
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To carry out perfectly good nitriding treatment in good efficiency, in generating longlasting are discharge, by detecting the generation of said longlasting arc discharge by voltage variation of discharge voltage lowered per a unit time.
CONSTITUTION: In an ion nitriding treatment method applying D.C. current by using the furnace wall of a vacuum reaction furnace 1 as an anode and an object to be treated as a cathode, when longlasting arc discharge is generated in the vacuum reaction furnace 1, voltage variation of lowered discharge voltage is detected by a current voltage detector 19 and, when the detected value is larger than a set value, a gate blocking circuit 18 is instantaneously operated as well as said detected value is applied to a longlasting arc discharge detecting circuit 21 and the output thereof is applied to a soft start circuit 20 through an alarm circuit 22. As described above, while are discharge is prevented from being generated during treatment, ion nitriding treatment is carried out.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4573881A JPS57159537A (en) | 1981-03-27 | 1981-03-27 | Method and apparatus for ion nitriding treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4573881A JPS57159537A (en) | 1981-03-27 | 1981-03-27 | Method and apparatus for ion nitriding treatment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57159537A true JPS57159537A (en) | 1982-10-01 |
JPS6112990B2 JPS6112990B2 (en) | 1986-04-11 |
Family
ID=12727653
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4573881A Granted JPS57159537A (en) | 1981-03-27 | 1981-03-27 | Method and apparatus for ion nitriding treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57159537A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005015964A1 (en) * | 2003-08-07 | 2005-02-17 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and substrate processing method |
WO2006109540A1 (en) * | 2005-03-30 | 2006-10-19 | Honda Motor Co., Ltd. | Surface modifying jig of engine valve and surface modifying method employing it |
-
1981
- 1981-03-27 JP JP4573881A patent/JPS57159537A/en active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005015964A1 (en) * | 2003-08-07 | 2005-02-17 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and substrate processing method |
JPWO2005015964A1 (en) * | 2003-08-07 | 2006-10-12 | 株式会社日立国際電気 | Substrate processing apparatus and substrate processing method |
US7767053B2 (en) | 2003-08-07 | 2010-08-03 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and substrate processing method |
WO2006109540A1 (en) * | 2005-03-30 | 2006-10-19 | Honda Motor Co., Ltd. | Surface modifying jig of engine valve and surface modifying method employing it |
US7892364B2 (en) | 2005-03-30 | 2011-02-22 | Honda Motor Co., Ltd. | Surface modifying jig of engine valve and surface modifying method employing it |
Also Published As
Publication number | Publication date |
---|---|
JPS6112990B2 (en) | 1986-04-11 |
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