JPS61129726A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPS61129726A
JPS61129726A JP25018984A JP25018984A JPS61129726A JP S61129726 A JPS61129726 A JP S61129726A JP 25018984 A JP25018984 A JP 25018984A JP 25018984 A JP25018984 A JP 25018984A JP S61129726 A JPS61129726 A JP S61129726A
Authority
JP
Japan
Prior art keywords
magnetic
film layer
content
magnetic recording
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25018984A
Other languages
Japanese (ja)
Inventor
Kazumasa Fukuda
一正 福田
Kiyosumi Kanazawa
金沢 潔澄
Kiichirou Ezaki
江崎 城一朗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP25018984A priority Critical patent/JPS61129726A/en
Publication of JPS61129726A publication Critical patent/JPS61129726A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide an isotropic magnetic characteristic to a magnetic recording medium without providing magnetic anisotropy within the magnetic recording medium and to reduce reproduced output modulation by constituting a horizontally magnetizable film layer of a high-speed magnetic permeability material composed of the compsn. contg. nickel and other metallic components and making the content of nickel larger than the content thereof when magnetorestriction is zero. CONSTITUTION:The horizontally magnetizable film layer consists of the compsn. contg. nickel and other metallic components and the content of nickel is made more than the content thereof when the magnetorestriction is zero. The magnetic anisotropy in the direction of a width w1 and longitudinal direction (a) is eliminated in the anisotropic magnetic field dHk=0 (Oe) and the isotropic magnetic characteristic is obtd. The content of Ni is therefore so selected that the isotropic magnetic characteristic of the anisotropic magnetic field Hk=0 (Oe) is obtd. Such content of Ni is 80-82wt% when the horizontally magnetizable film layer is formed of 'Ni-FeMo Supermalloy(R)' and is 81-83wt% when said layer is formed on 'Ni-Fe Permally(R)'.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、垂直磁気記録用の磁気記録媒体に関する。[Detailed description of the invention] Industrial applications The present invention relates to a magnetic recording medium for perpendicular magnetic recording.

従来技術 垂直磁気記録方式は、従来の面内磁気記録方式に比べて
、記録密度をlO〜100倍程度も高くとることができ
、高密度磁気記録方式として注目を集めている。垂直磁
気記録用の磁気記録媒体としては、例えば第1図に示す
ように、非磁性基体1の上に、高透磁率層となる水平磁
化膜層2を形成すると共に、この水平磁化膜層2の上に
磁気記Q層となる垂直磁化膜層3を積層した2層膜構造
のものが知られている。前記水平磁化膜層2はNi−F
e−Mo系スーパマロイまたはNi−Fe系パーマロイ
等で構成され、垂直磁化膜層3はCo−Crの組成で構
成される。
The conventional perpendicular magnetic recording method can achieve a recording density of about 10 to 100 times higher than the conventional longitudinal magnetic recording method, and is attracting attention as a high-density magnetic recording method. As a magnetic recording medium for perpendicular magnetic recording, for example, as shown in FIG. A two-layer film structure in which a perpendicular magnetization film layer 3 serving as a magnetic recording Q layer is laminated thereon is known. The horizontal magnetic film layer 2 is made of Ni-F.
The perpendicular magnetic film layer 3 is made of e-Mo supermalloy or Ni-Fe permalloy, and the perpendicular magnetic film layer 3 has a composition of Co-Cr.

上記の2層膜構造の磁気記録媒体において、磁気記録を
行なうに当り、例えば第2図に示すように、磁気記録媒
体の垂直磁化膜層2に対向して主磁極4を配置し、背面
側に補助磁極5を配置した場合、補助磁極5からの磁束
は、高透磁率層である水平磁化膜層2を水平方向に流れ
て主磁極4に集中し、主磁極4の部分で垂直磁化膜層3
を垂直磁化する。このため、2層膜構造の磁気記録媒体
では、補助磁極5を垂直磁化膜層3に極めて接近させた
等価の状態で高密度磁気記録を行なうことができる。ま
た、水平磁化膜層2の存在によって、垂直磁化膜層3の
垂直磁化に対して馬蹄形磁化モードが形成され、減磁作
用が小さくなること、記録密度特性を損なうことなく、
垂直へ一2ドにおける記録再生の感度を10倍以上に向
上させることができること、更に、記録の保存性を高め
ることができること等の利点も得られる。
When performing magnetic recording in the magnetic recording medium with the above-mentioned two-layer film structure, for example, as shown in FIG. When the auxiliary magnetic pole 5 is arranged at layer 3
is perpendicularly magnetized. Therefore, in a magnetic recording medium having a two-layer film structure, high-density magnetic recording can be performed in an equivalent state in which the auxiliary magnetic pole 5 is brought very close to the perpendicularly magnetized film layer 3. Furthermore, due to the presence of the horizontal magnetization film layer 2, a horseshoe-shaped magnetization mode is formed with respect to the perpendicular magnetization of the perpendicular magnetization film layer 3, and the demagnetization effect is reduced, without impairing recording density characteristics.
Advantages such as the ability to improve the sensitivity of recording and reproduction in the vertical direction by more than 10 times and the ability to improve the storage stability of recording are also obtained.

上述の垂直磁気記養用磁気記鎌媒体の工業的製造方法と
しては、スパッタ法が採用される。第3図はマグネトコ
ンスバッタ方式の製造装置を概略的に示す図である。図
において、7はA「ガス等を導入して10Tarr程度
に圧力設定した真空槽、8はターゲット、9はこのター
ゲット8の背面側に配置されたマグネ・ントである。1
0は矢印a方向に走行する非磁性基体、11は非磁性基
体10を供給する供給ロール、12は巻取ロール、13
は冷却ドラムである。
A sputtering method is employed as an industrial method for manufacturing the above-mentioned magnetic recording medium for perpendicular magnetic recording. FIG. 3 is a diagram schematically showing a magnetoconsbater type manufacturing apparatus. In the figure, 7 is a vacuum chamber into which A gas, etc. is introduced and the pressure is set to about 10 Tarr, 8 is a target, and 9 is a magnet placed on the back side of this target 8.1
0 is a non-magnetic substrate running in the direction of arrow a, 11 is a supply roll that supplies the non-magnetic substrate 10, 12 is a take-up roll, 13
is a cooling drum.

前記ターゲット8は、水平磁化膜層2を形成する場合に
は、Ni−Fe−に0系スーパマロイまたはNi−Fe
系パーマロイ等で構成され、垂直磁化膜層3を形成する
場合にはGo−Cr系材料によって構成される。また、
ターゲット8は、第4図に示すように、非磁性基体10
の幅W1をカバーできる幅W2を有する矩形状に形成し
、その背面側に、外形に沿う矩形リング状の外側コア9
1及びコア92を有するマグネット9を配置した構造と
なっている。
When forming the horizontal magnetization film layer 2, the target 8 is made of Ni-Fe-0-based supermalloy or Ni-Fe.
The perpendicular magnetization film layer 3 is made of a Go-Cr based material. Also,
As shown in FIG. 4, the target 8 is a non-magnetic substrate 10.
It is formed into a rectangular shape having a width W2 that can cover the width W1 of
1 and a magnet 9 having a core 92.

上記の装置において、冷却ドラム13とターゲット8と
の間に、ターゲット8側を負とする400〜500vの
高電圧を印加すると、真空槽7内でプラズマ放電が発生
し、Arがターゲット8の負電位に引かれてその表面に
衝突し、ターゲット表面の金属原子が叩き出される。叩
き出された金属原子は、ターゲット8に対向させた非磁
性基体10の表面に析出する。ターゲット8の表面にお
ける金属原子の放出跡(イ)は、第4図に示すように、
ターゲット8の背面に配置されたマグネット9の形状に
応じて、矩形リング状となる。
In the above device, when a high voltage of 400 to 500 V is applied between the cooling drum 13 and the target 8 with the target 8 side being negative, plasma discharge is generated in the vacuum chamber 7 and Ar is applied to the negative side of the target 8. It collides with the target surface due to the electric potential, and metal atoms on the target surface are knocked out. The ejected metal atoms are deposited on the surface of the nonmagnetic substrate 10 facing the target 8. As shown in FIG.
Depending on the shape of the magnet 9 placed on the back surface of the target 8, it has a rectangular ring shape.

従来技術の欠点 ところで、磁気記録特性を向上させるため、従来は、水
平磁化H’J層2は磁歪零となるような組成で形成して
いた。例えば、水平磁化膜層2をNi −Fe−Ma系
スーパマロイで形成した場合には、旧組成が79wt%
となるようにし、Ni−Fe系パーマロイで形成した場
合には80wt%となるようにするのである。
Disadvantages of the Prior Art Conventionally, in order to improve magnetic recording characteristics, the horizontally magnetized H'J layer 2 has been formed with a composition such that the magnetostriction is zero. For example, when the horizontal magnetization film layer 2 is formed of Ni-Fe-Ma supermalloy, the old composition is 79 wt%.
In the case of Ni-Fe-based permalloy, the content is set to 80 wt%.

ところが、スパッタ法によって磁歪零の組成の水平磁化
膜層を形成すると、非磁性基体IOの長さ方向(走行方
向a)で磁化困難、幅W1の方向で磁化容易となる磁気
異方性を生じ(第4図参照)、再生出力のモジュレーシ
ョンが大きくなってしまうと言う問題を生じることが解
った。第7スパツタ法によって得られた磁気記録媒体を
、円形状に打抜いて得られた円形状磁気ディスク(フロ
ッピディスク)を、円周380°に亘ってトレースして
得られた再生出力特性図である。この第7図に示すよう
に、磁歪零の組成では、明確な再生出力モジュレーショ
ンが見られる。再生出力モジュレーションは磁化困難方
向aで大きく、磁化容易方向W1で小さくなるように現
われる。
However, when a horizontally magnetized film layer with a composition of zero magnetostriction is formed by sputtering, magnetic anisotropy occurs in which magnetization is difficult in the length direction (running direction a) of the nonmagnetic substrate IO and magnetization is easy in the width direction W1. (See FIG. 4), it has been found that a problem arises in that the modulation of the playback output becomes large. This is a reproduction output characteristic diagram obtained by tracing a circular magnetic disk (floppy disk) obtained by punching a magnetic recording medium obtained by the seventh sputtering method into a circular shape over a 380° circumference. be. As shown in FIG. 7, clear reproduction output modulation can be seen in the composition of zero magnetostriction. The reproduction output modulation appears to be large in the direction of difficult magnetization a and small in the direction of easy magnetization W1.

このような磁気異方性は、スパッタ方式によって磁化膜
層を形成する場合、第4図に示したように、金属原子が
マグネット9の形状に応じて矩形リング状に叩き出され
、金属原子が非磁性基体10に対してその幅W1の方向
に沿って析出することに起因するものである0例えば、
円形状磁気記録媒体の場合を例にとって更に具体的に説
明すると、第5図に示すように、スパッタ方式によって
得られた磁気記録媒体14から円形状に打抜いて磁気デ
ィスク15を製造した場合、この磁気ディスク15は、
磁気記録媒体14の走行方向aLザ − 、(シ(i 
−〕−−ス 古 g−+イ r#  11 辺ノν 日
a 斡 、ルー −一 番1    重重 ℃1 噛 
 n)方向と一致する直径方向で磁化容易となる。この
ため、第7図に示すような再生出力モジュレーションを
発生してしまうのである。
Such magnetic anisotropy is caused by the fact that when a magnetized film layer is formed by sputtering, metal atoms are ejected in a rectangular ring shape according to the shape of the magnet 9, as shown in FIG. 0, which is caused by precipitation along the width W1 of the non-magnetic substrate 10, for example,
To explain more specifically using a circular magnetic recording medium as an example, as shown in FIG. 5, when a magnetic disk 15 is manufactured by punching a circular magnetic recording medium 14 obtained by a sputtering method, This magnetic disk 15 is
The traveling direction aL of the magnetic recording medium 14 -, (shi(i)
-]--su old g-+i r# 11 side ν day a 斡, roux -1st 1 heavy weight ℃1 bite
Magnetization is facilitated in the diametrical direction that coincides with the n) direction. Therefore, reproduction output modulation as shown in FIG. 7 occurs.

本発明の目的 本発明は上述する従来からの問題点を解決し、磁気記録
面内で磁気異方性を持たず、磁気特性が等方的で、再生
出力モジュレーションの小さい垂直磁気記録用の磁気記
録媒体を提供することを目的とする。
Purpose of the Invention The present invention solves the above-mentioned conventional problems, and provides a magnetic recording medium for perpendicular magnetic recording that has no magnetic anisotropy within the magnetic recording plane, has isotropic magnetic properties, and has small reproduction output modulation. The purpose is to provide recording media.

本発明の構成 上記目的を達成するため、本発明は、非磁性基体の表面
に水平磁化膜層と垂直磁化膜層を順次積層して設けた磁
気記録媒体において、前記水平磁化膜層はニッケルと他
の金属成分とを含む組成で成り、前記ニッケルの含有量
を磁歪零のときの含有量より多くしたことを特徴とする
Structure of the Invention In order to achieve the above object, the present invention provides a magnetic recording medium in which a horizontal magnetization film layer and a perpendicular magnetization film layer are sequentially laminated on the surface of a non-magnetic substrate, in which the horizontal magnetization film layer is made of nickel. It has a composition containing other metal components, and is characterized in that the content of nickel is greater than the content when magnetostriction is zero.

第6図はNiの含有量と磁界との関係を示す特性図であ
る。図において、横軸にNiの含有量(wt%)をとり
、縦軸に異方性磁界Hk (Oe)をとっである。Aは
スーパマロイ系水平磁化膜層の特性、Bはパーマロイ系
水平磁化膜層の特性である。異方性磁界Hk = O(
Oe)よりプラスの方向は、スパッタ法によって水平磁
化膜層を形成する場合に、非磁性基体10の幅wiの方
向に磁化容易となる方向、マイナスの方向は長さ方向、
つまり走行方向aで磁化容易となる方向である。異方性
磁界Hk = 0 (Oe)では幅w1の方向及び長さ
方向&での磁気異方性がなくなり、等方的な磁気特性が
得られる6本発明においては、この特性に着目し、Ni
の含有量を、異方性磁界Hk = 0 (Oe)の等方
的磁気特性が得られるように選定するものである。この
ような等方的磁気特性の得られるXiの含有量は、水平
磁化膜層をXl−FI!−Mo系スーバマロイで形成し
た場合には80〜82wt%であり、Ni−Fe−系パ
ーマロイで形成した場合には81〜83wt%である。
FIG. 6 is a characteristic diagram showing the relationship between Ni content and magnetic field. In the figure, the horizontal axis represents the Ni content (wt%), and the vertical axis represents the anisotropic magnetic field Hk (Oe). A is the characteristic of the supermalloy horizontally magnetized film layer, and B is the characteristic of the permalloy horizontally magnetized film layer. Anisotropic magnetic field Hk = O(
Oe) A positive direction is a direction in which magnetization is easy in the width direction of the nonmagnetic substrate 10 when forming a horizontally magnetized film layer by sputtering, a negative direction is a length direction,
In other words, the traveling direction a is a direction in which magnetization is easy. In the anisotropic magnetic field Hk = 0 (Oe), the magnetic anisotropy in the width w1 direction and the length direction & is eliminated, and isotropic magnetic properties are obtained.6 In the present invention, we focus on this property, Ni
The content of is selected so as to obtain isotropic magnetic properties with an anisotropic magnetic field Hk = 0 (Oe). The Xi content that provides such isotropic magnetic properties is equivalent to Xl-FI! for the horizontally magnetized film layer. When it is formed from -Mo-based supermalloy, it is 80 to 82 wt%, and when it is formed from Ni-Fe-based permalloy, it is 81 to 83 wt%.

第8図は本発明に係る円形状磁気ディスクの再生出力特
性図であり、モジュレーションが殆ど見られない。
FIG. 8 is a reproduction output characteristic diagram of the circular magnetic disk according to the present invention, in which almost no modulation is seen.

本発明の効果 以上述へたように、本発明は、非磁性基体の表面に水平
磁化膜層と垂直磁化膜層を順次積層して設けた磁気記録
媒体において、前記水平磁化膜層はニッケルと他の金属
成分とを含む組成で成り、前記ニッケルの含有量を磁歪
零のときの含有量より多くしたことを特徴とするから、
磁気記録面内で磁気異方性を持たず、磁気特性が等方的
で、モジュレーションの非常に小さい垂直磁気記録用の
磁気記録媒体を提供することができる。
Effects of the Invention As described above, the present invention provides a magnetic recording medium in which a horizontal magnetization film layer and a perpendicular magnetization film layer are sequentially laminated on the surface of a non-magnetic substrate, in which the horizontal magnetization film layer is made of nickel. It has a composition containing other metal components, and is characterized in that the content of nickel is greater than the content when magnetostriction is zero,
It is possible to provide a magnetic recording medium for perpendicular magnetic recording that has no magnetic anisotropy within the magnetic recording plane, has isotropic magnetic properties, and has extremely small modulation.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は垂直磁気記録用の磁気記録媒体の構造を示す図
、第2図は同じくその磁気記録方式を示す図、第3図は
第1図及び第2図に示した磁気記録媒体を構造するスパ
ッタ装置の構成を概略的に示す図、7fJ4図はスパッ
タ装置におけるターゲット、非磁性基体及びマグネット
との関係を示す図、第5図は円形状磁気ディスクにおけ
る磁化容易及び磁化困難の方向を説明する図、第6図は
1含有量と磁化との関係を示す特性図、第7図は従来の
磁気記録媒体の再生出力特性図、第8図は本発明に係る
la%記録媒体の再生出力特性図である。 1・・・非磁性基体  2・・・水平磁化膜層3・・φ
垂直磁化膜層 第1図 第4■ Cイ) 2慕 但 局 第5図 第7図 第8図
Figure 1 is a diagram showing the structure of a magnetic recording medium for perpendicular magnetic recording, Figure 2 is a diagram also showing the magnetic recording method, and Figure 3 is a diagram showing the structure of the magnetic recording medium shown in Figures 1 and 2. Figure 7fJ4 is a diagram schematically showing the configuration of a sputtering apparatus, and Figure 7FJ4 is a diagram showing the relationship between the target, nonmagnetic substrate, and magnet in the sputtering apparatus. Figure 5 explains the directions of easy and difficult magnetization in a circular magnetic disk. Figure 6 is a characteristic diagram showing the relationship between 1 content and magnetization, Figure 7 is a reproduction output characteristic diagram of a conventional magnetic recording medium, and Figure 8 is a reproduction output of a la% recording medium according to the present invention. It is a characteristic diagram. 1...Nonmagnetic substrate 2...Horizontal magnetic film layer 3...φ
Perpendicular magnetization film layer Fig. 1 Fig. 4 ■ C a) 2 Mudan station Fig. 5 Fig. 7 Fig. 8

Claims (3)

【特許請求の範囲】[Claims] (1)非磁性基体の表面に水平磁化膜層と垂直磁化膜層
を順次積層して設けた磁気記録媒体において、前記水平
磁化膜層はニッケルと他の金属成分とを含む組成の高透
磁率材料で成り、前記ニッケルの含有量を磁歪零のとき
の含有量より多くしたことを特徴とする磁気記録媒体。
(1) In a magnetic recording medium in which a horizontal magnetic film layer and a perpendicular magnetic film layer are sequentially laminated on the surface of a nonmagnetic substrate, the horizontal magnetic film layer has a high magnetic permeability composition containing nickel and other metal components. 1. A magnetic recording medium, characterized in that the nickel content is greater than the content when magnetostriction is zero.
(2)前記水平磁化膜層は、ニッケル、鉄及びモリブデ
ンの組成で成り、ニッケルの含有量を80〜82wt%
としたことを特徴とする特許請求の範囲第1項に記載の
磁気記録媒体。
(2) The horizontal magnetization film layer has a composition of nickel, iron, and molybdenum, and the nickel content is 80 to 82 wt%.
A magnetic recording medium according to claim 1, characterized in that:
(3)前記水平磁化膜層は、ニッケル及び鉄の組成で成
り、前記ニッケルの含有量を81〜83wt%としたこ
とを特徴とする特許請求の範囲第1項に記載の磁気記録
媒体。
(3) The magnetic recording medium according to claim 1, wherein the horizontal magnetic film layer has a composition of nickel and iron, and the nickel content is 81 to 83 wt%.
JP25018984A 1984-11-26 1984-11-26 Magnetic recording medium Pending JPS61129726A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25018984A JPS61129726A (en) 1984-11-26 1984-11-26 Magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25018984A JPS61129726A (en) 1984-11-26 1984-11-26 Magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS61129726A true JPS61129726A (en) 1986-06-17

Family

ID=17204134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25018984A Pending JPS61129726A (en) 1984-11-26 1984-11-26 Magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS61129726A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868226A (en) * 1981-10-16 1983-04-23 Hitachi Ltd Magnetic recording medium
JPS6134722A (en) * 1984-07-26 1986-02-19 Matsushita Electric Ind Co Ltd Vertical magnetic recording medium

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868226A (en) * 1981-10-16 1983-04-23 Hitachi Ltd Magnetic recording medium
JPS6134722A (en) * 1984-07-26 1986-02-19 Matsushita Electric Ind Co Ltd Vertical magnetic recording medium

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