JPS6257111A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPS6257111A
JPS6257111A JP19625485A JP19625485A JPS6257111A JP S6257111 A JPS6257111 A JP S6257111A JP 19625485 A JP19625485 A JP 19625485A JP 19625485 A JP19625485 A JP 19625485A JP S6257111 A JPS6257111 A JP S6257111A
Authority
JP
Japan
Prior art keywords
magnetic
film
high permeability
recording
magnetic film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19625485A
Other languages
Japanese (ja)
Inventor
Hideki Tamai
秀樹 玉井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP19625485A priority Critical patent/JPS6257111A/en
Publication of JPS6257111A publication Critical patent/JPS6257111A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/1278Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier

Landscapes

  • Magnetic Heads (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

PURPOSE:To improve recording and reproducing efficiency by forming a thin magnetic film of a main magnetic pole contributing to recording and reproduction to a shape in which the width thereof changes from the width larger than the track width to the length of the track width toward the end face in contact with a medium. CONSTITUTION:A thin high permeability magnetic film 1 is formed to a reducing shape of which the width changes to the track width TW at a drawing angle phi. An auxiliary magnetic pole excitation type head shown in the figure is formed by producing the 1st thin high permeability magnetic film 1 consisting of an amorphous CoZrNe alloy as a main magnetic pole magnetic film to 0.3mum thickness on a neoseram glass substrate having 1mm thickness as a nonmagnetic substrate 5 and forming the film 1 into the reducing shape by using the known micro fabrication techniques for semiconductor integration. The 2nd high permeability magnetic film 2 consisting of the amorphous CoZrNb alloy is produced as a thickness increase layer to 3mum thickness on the film 1 by an RF magnetron sputtering method to increase the magnetic flux of the magnetic film.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、磁気記録媒体を媒体面の垂直方向に磁化する
垂直磁気記録において、記録再生効率の優れた垂直磁気
記録ヘッドに関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a perpendicular magnetic recording head with excellent recording and reproducing efficiency in perpendicular magnetic recording in which a magnetic recording medium is magnetized in a direction perpendicular to the surface of the medium.

(従来の技術) 従来、垂直磁気記録において、基本的な記録再生ヘッド
として知られているヘッドを第4図に示す(アイイーイ
ーイー・トランザックジョン・オン・マグネテックス(
IBEB T’rans Mjgn、t MAG −1
4゜436* 1978 ) )りこれは、高透磁率磁
性薄膜lから成る主磁極ヘッドと、高透磁率磁性材料4
から成る補助磁極ヘッドとから構成され、前記補助磁極
に記録再生用のコイ/I/7を巻いた補助磁極励磁型単
磁極ヘッドであり、この間に記録媒体8が配置される。
(Prior Art) Figure 4 shows a head known as a basic recording/reproducing head in perpendicular magnetic recording (IEE Transac John on Magnetex).
IBEB T'rans Mjgn,t MAG -1
4゜436*1978) This consists of a main pole head made of a high permeability magnetic thin film l and a high permeability magnetic material 4.
This is an auxiliary magnetic pole excitation type single magnetic pole head consisting of an auxiliary magnetic pole head consisting of an auxiliary magnetic pole head, and a coil/I/7 for recording/reproduction is wound around the auxiliary magnetic pole, and a recording medium 8 is disposed between the auxiliary magnetic pole head.

(発明が解決しようとする問題点) この従来ヘッドは、垂直磁気記録に訃いて、高記録密度
を達成しているが、主磁極ヘッドは、短冊状になってお
ル狭トラック化すると主磁極磁性膜は磁気回路的な見方
によると磁気抵抗が大きくなり記録再生効率が十分でな
かった◎ 本発明の目的は、この問題点を解決し、記録再生効率を
向上させた垂直磁気記録ヘッドを提供するものである。
(Problems to be Solved by the Invention) This conventional head uses perpendicular magnetic recording to achieve high recording density. From the perspective of a magnetic circuit, magnetic films have large magnetic resistance and insufficient recording and reproducing efficiency. The purpose of the present invention is to solve this problem and provide a perpendicular magnetic recording head with improved recording and reproducing efficiency. It is something to do.

(問題点を解決するための手段) 本発明は、高透磁率磁性薄膜を含む複数の高透磁率磁性
体からなる主磁極磁性膜と、1つ又は複数のコイルとを
含んで構成される磁気ヘッドにおいて、記録再生に関与
する該主磁極磁性薄膜の幅が媒体と接する端面へ向かり
てトラック幅より大きな幅から、トラック幅の長さにま
で変化している形状を有することを特徴とする磁気ヘッ
ドであるO (作用) 記録再生に関与する主磁極ヘッドO高透磁率磁性体(以
降、主磁極磁性膜と略する)を、トラック鴨方向におい
て、トラック幅より大きな幅から、媒体と接する端面へ
向かつて、トラック幅の長さに絞シ込む形状にすること
によシ、トラック幅と同じである従来技術の短冊状の主
磁極磁性膜に比べ磁気回路的に見た場合、磁気抵抗を小
さくすることができる。そして、記録再生電圧に係わる
磁束か増加し、記録再生効率の向上が計られる口(実施
例) 次に1本発明の実施例を第2図に示す口ただし、以下の
5j!施例では主磁極磁性膜は、第1図に示すような威
り込みの形状に形成した。すなわち高透磁率磁性薄膜l
は絞p込み角度φでトラック幅TWまで変化している。
(Means for Solving the Problems) The present invention provides a magnetic field comprising a main pole magnetic film made of a plurality of high permeability magnetic materials including a high permeability magnetic thin film, and one or more coils. The head is characterized in that the width of the main pole magnetic thin film involved in recording and reproduction changes from a width larger than the track width to the length of the track width toward the end surface in contact with the medium. (Operation) The main pole head O, which is a magnetic head, is brought into contact with the medium from a width larger than the track width in the direction of the track. By forming a shape that narrows down to the length of the track width toward the end face, the magnetic resistance is reduced from a magnetic circuit perspective compared to the strip-shaped main pole magnetic film of the prior art, which is the same as the track width. can be made smaller. Then, the magnetic flux related to the recording and reproducing voltage is increased, and the recording and reproducing efficiency is improved (Example) Next, an example of the present invention is shown in FIG. 2, but the following 5j! In the example, the main pole magnetic film was formed in a convex shape as shown in FIG. That is, a high permeability magnetic thin film l
varies up to the track width TW with the narrowing angle φ.

第2図(、)は、主磁極ヘッドと補助磁極ヘッドを組み
合せたヘッドで、補助磁極励磁盤ヘッドの実施例である
FIG. 2 (,) shows a head that combines a main magnetic pole head and an auxiliary magnetic pole head, and is an example of an auxiliary magnetic pole excitation disk head.

非磁性基板5として厚さ1rXIlnのネオセラムガラ
ス基板上に、主磁極磁性膜として厚さ0.3μmのCo
ZrNe非晶質合金からなる第1の高透磁率磁性薄膜l
を、RFマグネトロンスパッタ法によ)作製した。そし
て、この主磁極磁性膜を第1図に示すような絞り込みの
形状に1周知の半導体集積化微細加工技術を用いて形成
した。次に、前記主磁極ヘッドに更に磁11.−を増加
させるための厚づけI傍として、厚さ3μmの同じ(C
oZrNb非晶質合金からなる第2の高透磁率磁性膜2
をRFマグネトロンスパッタ法によシ作製した。なお、
以下の実施例において、厚づけj−として第2の高透磁
率磁性膜2を形成した◎これは、記録再生の効率から考
えると具備した方が望ましいが、なくてもよい。
The non-magnetic substrate 5 is a Neoceram glass substrate with a thickness of 1rXIln, and the main pole magnetic film is a Co with a thickness of 0.3 μm.
First high permeability magnetic thin film made of ZrNe amorphous alloy
was produced by RF magnetron sputtering method). Then, this main pole magnetic film was formed into a narrow shape as shown in FIG. 1 using a well-known semiconductor integration microfabrication technique. Next, a magnet 11. is added to the main pole head. - As a thickening I side to increase the same (C
Second high permeability magnetic film 2 made of oZrNb amorphous alloy
was produced by RF magnetron sputtering. In addition,
In the following examples, the second high permeability magnetic film 2 was formed as the thickening film 2. Although it is desirable to have this in terms of recording and reproducing efficiency, it is not necessary.

このようにして、主磁極ヘッドを作製する一方補助磁極
ヘッドは、高透磁率磁性材料4′から成るMn −Zn
フェライトにコイル7を巻き作製した。
In this way, the main pole head is manufactured, while the auxiliary pole head is made of Mn-Zn made of high permeability magnetic material 4'.
A coil 7 was produced by winding it around ferrite.

記録再生の方法は、次の通りである。記録媒体8を移動
させ、記録時にはコイル7に電圧を印加することにより
コイルに発生した磁界によシ。
The recording/reproducing method is as follows. By moving the recording medium 8 and applying a voltage to the coil 7 during recording, the magnetic field generated in the coil is used.

情報を記録し、再生時には、記録媒体6からの漏洩磁界
によりコイル7に誘起される電圧を検出したO 第2図(b)は、図(、)と同様に主磁極ヘッドと補助
磁極ヘッドを組み合わせた主磁極ヘッドヘッドの実施例
である〇 主磁極ヘッド及び補助磁極ヘッドの作製方法は。
When information is recorded and reproduced, the voltage induced in the coil 7 by the leakage magnetic field from the recording medium 6 is detected. This is an example of a combined main pole head. The method for manufacturing the main pole head and the auxiliary pole head is as follows.

wJ2図(、)と同様であるので詳細は略するが、コイ
ル7を主磁極側に巻き、上部に、磁束を更に増加させる
ために、高透磁率磁性材料4″から成るMn−Znフェ
ライトを設けたものである。しかし、高透磁率磁性材料
4″は、必要に応じて設ければよく、なくてもよい。記
録再生の方法は、前記実施例と同様である。
The details are omitted as it is the same as in Figure wJ2 (,), but the coil 7 is wound on the main pole side, and Mn-Zn ferrite made of high permeability magnetic material 4'' is placed on the top to further increase the magnetic flux. However, the high permeability magnetic material 4'' may be provided as needed or may be omitted. The recording and reproducing method is the same as in the previous embodiment.

第2図(c)は、片側励磁型ヘッドの実施例を示したも
ので、前記実施例と同様の方法、材料で、非磁性基板5
上に、主磁極磁性膜としての第1の高透磁率磁性博膜l
と厚づけ層としての第2の高透磁率磁性膜2を形成した
。次に、L牢屋の高透磁率磁性材料4から成る側面部材
として、Mn−Znフェライトを用い、同図(C)のよ
うに接着した。さらに、保a!4膜の役目の非磁性絶縁
膜6としてエポキシw脂硬質耐熱性接着剤を用いた。記
録再生の方法は、前記実施例と同様である。
FIG. 2(c) shows an embodiment of a single-sided excitation type head, in which a non-magnetic substrate 5 is
On top, a first high permeability magnetic film l as a main pole magnetic film.
A second high permeability magnetic film 2 as a thickening layer was then formed. Next, Mn--Zn ferrite was used as a side member of the high permeability magnetic material 4 of the L prison, and it was bonded as shown in FIG. 4(C). In addition, Hoa! As the non-magnetic insulating film 6 serving as the fourth film, an epoxy double-stick hard heat-resistant adhesive was used. The recording and reproducing method is the same as in the previous embodiment.

M2図(−1)は、薄膜ヘッドの実施例を示したもので
%罰記芙施例と同様の方法、材料で非磁性基板5上に、
主磁極磁性膜としての第1の高透磁率磁性(4膜lと厚
づけ層としての第2の高透磁率磁性膜2、及び磁束のリ
ターンパスとして高透磁率磁性膜2′8形成した。また
、コイル7′として銅をメッキ法によプ形成し、保d膜
の役目の非磁性結縁膜6としてエポキシ樹脂系硬質耐熱
性接着剤を用いた0記録再生の方法は、前記実施例と同
様である。
Figure M2 (-1) shows an example of a thin film head.
A first high permeability magnetic film (4 films 1) as a main pole magnetic film, a second high permeability magnetic film 2 as a thickening layer, and a high permeability magnetic film 2'8 as a return path for magnetic flux were formed. Further, a zero recording and reproducing method in which copper is formed by plating as the coil 7' and an epoxy resin-based hard heat-resistant adhesive is used as the non-magnetic binding film 6 serving as a retention film is similar to the above embodiment. The same is true.

なお、上記実施例において、高透磁率磁性!i&l。In addition, in the above example, high magnetic permeability! i&l.

2.2′として、スパッタ法によるCoZrNb非晶質
合金膜を用いたが、別の成膜法、例えばメッキ法、蒸着
法でもよく%また。膜もs CoZrM合金膜(MはH
f等第3の添加金属を意味する)、パーマロイ膜、セン
ダスト膜等でもよい0さらに、高透磁率磁性材料4. 
4’、  4“として%Mn −Zn系フェライトの他
、Ni−Zn7エライト、N菟−re金合金センダスト
等でもよい口また、主磁極磁性膜としての高透磁率磁性
薄膜lの絞シ込み形状は、本実施例において第1図に示
したように形成したが、第3図(at〜(d)に示すよ
うな他の形状でもよい。ここで、図(、)は片側から絞
夛込んだものであり、図(b)及び(C)は絞プ込み形
状を曲線状にしたものであるロー(d)は、絞り込み形
状の先端の部分に、絞り込みの効果が失われないような
長さで、短備状に残したものである。
As 2.2', a CoZrNb amorphous alloy film was used by sputtering, but other film forming methods such as plating or vapor deposition may also be used. The film is also CoZrM alloy film (M is H
f), a permalloy film, a sendust film, etc.Furthermore, a high permeability magnetic material4.
4', 4'' may be made of %Mn-Zn ferrite, Ni-Zn7 elite, N-re gold alloy sendust, etc. Also, the narrowed shape of the high magnetic permeability magnetic thin film l as the main pole magnetic film is formed as shown in FIG. 1 in this example, but other shapes as shown in FIG. 3 (at to (d)) may also be used. Figures (b) and (C) are curved aperture shapes.Low (d) is a curved aperture shape. So, this is what I left in the short notice.

次に、本発明によるヘッドと従来のヘッドについて記録
再生評価による比較を行なった0ここで本発明及び従来
ヘッドは、第2図(a)に示したものを用いた。ここで
1本発明ヘッドの主磁極磁性膜は、第1図に示すような
絞シ込み形状を有しておシ、従来ヘッドの主磁極磁性膜
は絞シ込みがなく短冊状でトラック幅300μm8して
いる。なお、本発明ヘッドにおいて幅1mmからトラッ
ク幅300μmへの絞り込み角φは、30”、 4s6
°、600と3種類のものを作製した0そして1本発明
及び従来ヘッドの主磁極ヘッドとして主磁極磁性膜が0
.3μm厚のCoZrNbスパッタ膜、厚づけ層が3μ
mのCoZrNbスパッタ膜で形成されているものを用
い、記録媒体8としてCo −Cr/Nt −Pa二層
垂直媒体を用い、3.570ツピ一デイスク評価装置に
て、記録再生評価した。その結果を、@5図に示す。
Next, the head according to the present invention and the conventional head were compared by recording/reproducing evaluation.Here, the head according to the present invention and the conventional head shown in FIG. 2(a) were used. Here, 1. The main pole magnetic film of the head of the present invention has a constriction-scarred shape as shown in FIG. are doing. In addition, in the head of the present invention, the narrowing angle φ from a width of 1 mm to a track width of 300 μm is 30”, 4s6
The main pole magnetic film of the main pole head of the present invention and the conventional head is 0 and 1.
.. 3μm thick CoZrNb sputtered film, thickening layer 3μm
Recording and reproduction were evaluated using a Co--Cr/Nt--Pa two-layer vertical medium as the recording medium 8 using a 3.570-pi disk evaluation device. The results are shown in Figure @5.

−第5図は、孤立波に−おける、絞シ込み角度φと再生
電圧Eとの関係を示したものである。なお、ここで、φ
=90°は、従来ヘッドの値である。これから、絞り込
み角度φが小さくなるほど、再生電圧Eが増加すること
がわかった0したがりて1本発明により主磁極磁性膜が
、絞り込み形状を有することにより、従来の短冊状に比
べ、記録再生効率の向上がなされた。
FIG. 5 shows the relationship between the narrowing angle φ and the reproduction voltage E in a solitary wave. Note that here, φ
=90° is the value of the conventional head. From this, it was found that the reproduction voltage E increases as the convergence angle φ becomes smaller. Therefore, the main pole magnetic film according to the present invention has a constriction shape, which improves the recording and reproduction efficiency compared to the conventional strip shape. improvements have been made.

(発明の効果) 本発明は、主磁極磁性膜を絞り込み形状にすることによ
り、以下に示す効果がありた〇(11記録再生効率が向
上し、再生電圧が増加した0 (2)配録時に、より少ない記録電流で、媒体を容易に
磁化することができ、消費電力が少なくなった0 (3)  再生分解能が向上し、記録密度が伸びた。
(Effects of the Invention) The present invention has the following effects by forming the main pole magnetic film into a constricted shape. , the medium can be easily magnetized with less recording current, reducing power consumption. (3) Reproduction resolution has improved and recording density has increased.

(4)磁区構造に安定化が見られ所望のヘッド特性が得
られるようになシ、歩留ルが改善された。
(4) The magnetic domain structure was stabilized, the desired head characteristics were obtained, and the yield was improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は5本発明の磁気ヘッドの主磁極磁性薄膜の形状
の一例を示す図%第2図は本発明の実施例を示す図、第
3図は主磁極磁性薄膜の他の形状を示す図、第4図は、
従来の磁気ヘッドの例を示す図%第5図は、絞り込み角
度φと再生電圧Eとの関係について示した図ロ ト・・高透磁率磁性薄膜 2、 2’、  2#・・高透磁率磁性膜4、 4/、
  4II、・・高透磁率磁性材料5・・・非磁性基板 6・・・非磁性絶縁膜 7.7′・・・コイル 8・・・記録媒体 ど−\ 兜 j 図 了り (α)(b) (C)             (d)第3図 7w (α)(b) (C)               (d)第4図
Figure 1 is a diagram showing an example of the shape of the main pole magnetic thin film of the magnetic head of the present invention. Figure 2 is a diagram showing an embodiment of the present invention, and Figure 3 is a diagram showing another shape of the main pole magnetic thin film. Figure 4 is
Figure 5 shows an example of a conventional magnetic head. Figure 5 is a diagram showing the relationship between the narrowing angle φ and the reproduction voltage E.Roto...High permeability magnetic thin film 2, 2', 2#...High permeability magnetic Membrane 4, 4/,
4II,...High permeability magnetic material 5...Nonmagnetic substrate 6...Nonmagnetic insulating film 7.7'...Coil 8...Recording medium? b) (C) (d) Fig. 3 7w (α) (b) (C) (d) Fig. 4

Claims (1)

【特許請求の範囲】[Claims] 高透磁率磁性薄膜を含む複数の高透磁率磁性体から成る
主磁極磁性膜と、1つ又は複数のコイルとを含んで構成
される磁気ヘッドにおいて、記録再生に関与する該主磁
極磁性薄膜の幅が媒体と接する端面へ向かって、トラッ
ク幅より大きな幅からトラック幅の長さにまで変化して
いる形状を有することを特徴とする磁気ヘッド。
In a magnetic head that includes a main pole magnetic film made of a plurality of high permeability magnetic materials including a high permeability magnetic thin film, and one or more coils, the main pole magnetic thin film involved in recording and reproduction is 1. A magnetic head having a shape in which the width changes from a width larger than a track width to a length equal to the track width toward an end surface in contact with a medium.
JP19625485A 1985-09-04 1985-09-04 Magnetic head Pending JPS6257111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19625485A JPS6257111A (en) 1985-09-04 1985-09-04 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19625485A JPS6257111A (en) 1985-09-04 1985-09-04 Magnetic head

Publications (1)

Publication Number Publication Date
JPS6257111A true JPS6257111A (en) 1987-03-12

Family

ID=16354748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19625485A Pending JPS6257111A (en) 1985-09-04 1985-09-04 Magnetic head

Country Status (1)

Country Link
JP (1) JPS6257111A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04366403A (en) * 1991-06-14 1992-12-18 Nec Corp Vertical magnetic head and its manufacture
KR20000007599A (en) * 1998-07-04 2000-02-07 구자홍 Magnetic head apparatus
JP2008123692A (en) * 2005-02-07 2008-05-29 Samsung Electronics Co Ltd Vertical magnetic recording head
WO2009019981A1 (en) * 2007-08-08 2009-02-12 Seiko Instruments Inc. Proximity-field optical head, and information recording/reproducing device
US7518826B2 (en) 2004-11-08 2009-04-14 Tdk Corporation Perpendicular magnetic recording head and magnetic recording apparatus
US8098456B2 (en) 2005-04-28 2012-01-17 Samsung Electronics Co., Ltd. Perpendicular magnetic recording head having a tapered main pole
JP2013054809A (en) * 2011-09-06 2013-03-21 Hitachi Ltd Magnetic recording head and magnetic recording apparatus
US8599520B1 (en) * 2011-12-20 2013-12-03 Western Digital (Fremont), Llc Method and system for providing a read transducer having an adaptive read sensor track width

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04366403A (en) * 1991-06-14 1992-12-18 Nec Corp Vertical magnetic head and its manufacture
KR20000007599A (en) * 1998-07-04 2000-02-07 구자홍 Magnetic head apparatus
US7518826B2 (en) 2004-11-08 2009-04-14 Tdk Corporation Perpendicular magnetic recording head and magnetic recording apparatus
JP2008123692A (en) * 2005-02-07 2008-05-29 Samsung Electronics Co Ltd Vertical magnetic recording head
US8098456B2 (en) 2005-04-28 2012-01-17 Samsung Electronics Co., Ltd. Perpendicular magnetic recording head having a tapered main pole
WO2009019981A1 (en) * 2007-08-08 2009-02-12 Seiko Instruments Inc. Proximity-field optical head, and information recording/reproducing device
JP5611590B2 (en) * 2007-08-08 2014-10-22 セイコーインスツル株式会社 Near-field optical head and information recording / reproducing apparatus
JP2013054809A (en) * 2011-09-06 2013-03-21 Hitachi Ltd Magnetic recording head and magnetic recording apparatus
US8824103B2 (en) 2011-09-06 2014-09-02 Hitachi, Ltd. Magnetic recording head and magnetic recording apparatus
US8599520B1 (en) * 2011-12-20 2013-12-03 Western Digital (Fremont), Llc Method and system for providing a read transducer having an adaptive read sensor track width

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