JP2008123692A - Vertical magnetic recording head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vertical magnetic recording head which reduces a leakage magnetic flux, while corresponding to a magnetic recording layer having a high track density. <P>SOLUTION: The vertical magnetic recording head with a read head and a write head is characterized in that the write head is a single-pole type head, and provided with a main pole and a return pole. Among a first surface facing the inside of the magnetic recording layer, a second surface facing a data recording surface of the magnetic recording layer, and a third surface facing the outside of the magnetic recording layer, the first and third surfaces are asymmetric to each other. An angle between one of the first and third surfaces and the second surface is greater than 90°. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a magnetic recording head.

  The data recording method for the current hard disk drive (HDD) is almost a horizontal magnetic recording method. Therefore, when data is recorded on the hard disk, the magnetic polarization in the data recording area of the magnetic recording layer of the hard disk is placed horizontally on the surface of the magnetic recording layer. However, in the process of recording data on the magnetic recording layer by the horizontal magnetic recording method, magnetic polarization is frequently arranged so that the same poles face each other. In such a case, since the opposing magnetic polarizations repel each other, the distance between the two magnetic polarizations is longer than the distance between the magnetic polarizations arranged so as to face each other at different poles. Thereby, the area occupied by the magnetic polarization arranged so that the same poles face each other in the magnetic recording layer becomes larger than the area occupied by the magnetic polarization arranged so that different poles face each other. As a result, the data recording density of the magnetic recording layer decreases.

  One method for solving such problems of the horizontal magnetic recording system is to record data on the magnetic recording layer by the perpendicular magnetic recording system. In the perpendicular magnetic recording system, the magnetic polarization in the area where data of the magnetic recording layer is recorded is arranged in the direction perpendicular to the surface of the magnetic recording layer. Accordingly, when the magnetic polarization is placed vertically as in the perpendicular magnetic recording system, different poles are adjacent to each other, so that the magnetic polarization tends to move in a direction that reduces the area by attracting each other. For this reason, if the perpendicular magnetic recording method is used, the data recording density can be improved more than when the horizontal magnetic recording method is used.

  Due to the advantages of such a perpendicular magnetic recording system, attention has been focused on perpendicular magnetic recording heads that can actually use this system, and various perpendicular magnetic recording heads are currently being introduced.

  FIG. 1 is a cross-sectional view of a conventional write head of a perpendicular magnetic recording head. FIG. 1 is a view as seen from a direction parallel to the track.

  As shown in FIG. 1, the write head includes a main pole 10 and a return pole 12, and an insulating layer 16 exists in the magnetic induction coil 14 between the main pole 10 and the return pole 12. A magnetic field Bo for recording bit data on the magnetic recording layer 18 is generated between the main pole 10 and the return pole 12. The magnetic field Bo passes perpendicularly through a predetermined region of the magnetic recording layer 18 directly below the main pole 10 and a soft magnetic layer (not shown) below it, and then returns to the return pole 12 below the soft magnetic layer. Flows to the side. The magnetic field Bo that has reached the lower side of the return pole 12 passes through the magnetic recording layer 18 vertically and enters the return pole 12. In this process, magnetic polarization directed upward or downward occurs in the predetermined region of the magnetic recording layer 18 immediately below the main pole 10. Such magnetic polarization is regarded as bit data recorded in the predetermined area. In FIG. 1, an arrow 22 indicates the traveling direction of the magnetic recording layer 18. FIG. 2 is a front view of the main pole 10 of FIG. 1 viewed from the right side of the drawing, that is, viewed from the track direction. In FIG. 2, reference numeral 24 denotes a track selected in the magnetic recording layer 18.

  As shown in FIG. 2, a portion 10a of the main pole 10 adjacent to the magnetic recording layer 18 has a width w1 that is the same as or narrower than the track width Tw of the magnetic recording layer 18, and is from the base 10b. It turns out that it protruded about predetermined length. FIG. 3 is a view three-dimensionally showing a part of the main pole 10 including the portion 10 a adjacent to the magnetic recording layer 18. As can be seen from FIG. 3, the portion 10a adjacent to the magnetic recording layer 18 has a uniform width w1 and is geometrically symmetric. In FIG. 3, 24E indicates the outer direction of the magnetic recording layer 18, and 24I indicates the inner direction.

  When such a conventional perpendicular recording magnetic head is used, the recording density can be improved as compared with the existing horizontal magnetic recording head, but the leakage flux in the track direction increases as the track density and the skew angle increase. Thereby, in the process of recording data on the selected track, the influence of the non-selected track is also increased.

  SUMMARY OF THE INVENTION The technical problem to be solved by the present invention is to improve the problems of the prior art, and can cope with a magnetic recording layer having a higher track density while reducing the magnetic flux leakage. It is to provide a recording head.

  In order to solve the above problems, the present invention provides a perpendicular magnetic recording head comprising a read head and a write head, wherein the write head is a single pole type head comprising a main pole and a return pole, Of the first surface facing the inside of the magnetic recording layer of the main pole, the second surface facing the data recording surface of the magnetic recording layer, and the third surface facing the outside of the magnetic recording layer, the first surface and the third surface The perpendicular magnetic recording head is characterized in that the planes are symmetrical to each other and both form an angle greater than 90 ° with the second plane.

  A sub yoke may be further provided on a surface of the main pole facing the reading head.

  A shield layer may be further provided between the sub yoke and the read head.

  In the perpendicular magnetic recording head of the present invention, the first surface facing the inside of the track and the third surface facing the outside of the track at the lower end of the main pole near the magnetic recording layer are cut obliquely. Accordingly, an angle between the second surface facing the data recording surface of the track in the adjacent portion, the first surface, and the third surface is greater than 90 °. In the perpendicular magnetic recording head of the present invention, the width of the second surface in the track direction can be adjusted by the cutting inclination of the first surface and the third surface. The width can be narrower than the track width of the magnetic recording layer. Therefore, the track density (TPI) can be improved by using the present invention. In addition, since the magnetic field generated from the main pole due to the structure increases, the magnetic flux leakage can be reduced. Therefore, in the process of recording data on the selected track, the track adjacent to the selected track can be recorded. Can reduce the influence of the head. Furthermore, in terms of process, only the cutting process needs to be added to the existing process, so that the track density can be greatly improved by a relatively simple process.

  Hereinafter, a perpendicular magnetic recording head and a manufacturing method thereof according to embodiments of the present invention will be described in detail with reference to the accompanying drawings. In this process, the thicknesses of layers and regions shown in the drawings are exaggerated for the sake of clarity.

  First, a perpendicular magnetic recording head according to an embodiment of the present invention (a magnetic head of the present invention) will be described.

  As shown in FIG. 4, the magnetic head 44 of the present invention includes a write head 40 and a read head 42. The write head 40 is provided on the front side of the read head 42 with reference to the traveling direction 22 of the magnetic recording layer 18. The write head 40 includes a main pole 40b in contact with the read head 42 and a return pole 40a around which a magnetic induction coil 40c is wound. One end of the return pole 40 a is attached to the main pole 40 b and the other end is close to the magnetic recording layer 18. The one end and the other end of the return pole 40a are convex, and an insulating layer 40d is provided between the return pole 40a and the main pole 40b. The other end of the return pole 40a and the main pole 40b are separated by a predetermined interval, but the interval is very narrow, and the interval is filled with the insulating layer 40d. The magnetic induction coil 40c exists in the insulating layer 40d.

  A dotted line B connecting the return pole 40a and the main pole 40b indicates a magnetic field generated between the return pole 40a and the main pole 40b when recording bit data. The read head 42 includes a first magnetic shield layer 42a and a second magnetic shield layer 42b, and a read device 42c provided between the first magnetic shield layer 42a and the second magnetic shield layer 42b. While the first magnetic shield layer 42a and the second magnetic shield layer 42b read data from a predetermined position of the selected track, a magnetic field generated from a magnetic element around the predetermined position reaches the predetermined position. Block things. The reading device 42c may be, for example, a GMR (Giant Magneto Resistive) or a TMR (Tunneling Magneto Resistive). The main feature of the magnetic head 44 of the present invention is the other end of the main pole 40 b, that is, the portion 40 aa close to the magnetic recording layer 18.

  FIG. 5 is a front view of the main pole 40b, and shows the main pole 40b on the right side of FIG.

  As shown in FIG. 5, the width of the portion 40aa adjacent to the magnetic recording layer 18 of the main pole 40b is not constant. That is, the adjacent portion 40aa of the main pole 40b has a structure in which the width becomes narrower as it is closer to the magnetic recording layer 18. The width w2 at the lower end of the adjacent portion 40aa is narrower than the width w3 of the track 18s immediately below. 4 and 5, when the portion 40aa in the vicinity of the magnetic recording layer 18 of the main pole 40b has a structure in which the width gradually decreases toward the magnetic recording layer 18, the track 18s of the main pole 40b has a structure. This is because one of the surfaces GS1 among the surfaces in the vertical direction or the rotation direction of the support arm (not shown) that supports the magnetic head of the present invention is an obliquely cut surface. Such a fact can be more clearly understood with reference to FIG. 6 which shows a part including the portion 40aa close to the main pole 40b in three dimensions. In FIG. 6, the first arrow 50 and the second arrow 52 indicate the radial direction of the magnetic recording layer 18. The first arrow 50 is directed to the outside of the magnetic recording layer 18, and the second arrow 52 is directed to the inside of the magnetic recording layer 18.

  As shown in FIG. 6, the angle θ between the first surface GS1 facing the inside of the magnetic recording layer 18 of the portion 40aa adjacent to the magnetic recording layer 18 of the main pole 40b and the second surface GS2 facing the track 18s. It can be seen that is greater than 90 °. In FIG. 6, the third surface GS3 facing the outside of the magnetic recording layer 18 of the adjacent portion 40aa of the main pole 40b and the second surface GS2 facing the track 18s form 90 °. The angle between the surface GS2 and the third surface GS3 may be larger than 90 °, and the angle θ between the first surface GS1 and the second surface GS2 may be 90 °. As a result, the portion of the main pole 40b facing the outside of the magnetic recording layer 18 and the portion facing the inside become asymmetric. On the other hand, the angle θ between the first surface GS1 and the second surface GS2 and the angle between the second surface GS2 and the third surface GS3 may all be larger than 90 °. The corners should be different and the main pole 40b should be asymmetric.

  7 and 8 show a case where the main pole 40b has a symmetric structure as in the prior art (hereinafter referred to as a first case) and a case where the main pole 40b has an asymmetric structure as in the magnetic head of the present invention described above. (Hereinafter, in the second case), the field inclination at the position of the magnetic recording layer 18 is shown. FIG. 7 is a graph showing the field inclination in the recording direction, and FIG. 8 is a graph showing the field inclination in the track direction. 7 and 8, the first graphs G1 and G11 are for the first case, and the second graphs G2 and G22 are for the second case.

  As shown in FIG. 7, it can be seen that the field slope of the second graph G2 is greater than the field slope of the first graph G1. The fact that the field gradient is large means that the dispersion of the magnetic field is small. From the result of FIG. 7, the degree of focusing of the magnetic field in the recording direction is higher in the magnetic head of the present invention than in the conventional magnetic head. Therefore, when the magnetic head of the present invention is used, the linear recording density in the recording direction can be improved. As shown in FIG. 8, as in FIG. 7, it can be seen that the field gradient of the second graph G22 is larger than the field gradient of the first graph G11. In the case of 2, it means that the dispersion of the magnetic field in the track direction is small. Thus, since the magnetic head of the present invention has a small dispersion of the magnetic field in the track direction, the degree of focusing of the magnetic field in the track direction can be higher than that of the conventional magnetic head. Therefore, if the magnetic head of the present invention is used, not only the track density can be improved, but also the influence of the non-selected track on the data recording process can be reduced.

  FIG. 9 shows changes in the magnetic field depending on the track direction in the magnetic recording layer when data is recorded using the conventional magnetic head and the magnetic head of the present invention. In FIG. 9, the first graph GG1 is for the first case, and the second graph GG2 is for the second case.

  As shown in FIG. 9, the vertical dispersion is much larger in the first graph GG1 than in the second graph GG2. This means that the degree of focusing of the magnetic field in the second case is much higher than in the first case. Therefore, FIG. 9 is a graph that comprehensively shows the results of FIGS. 7 and 8.

  Such results are further clarified by comparing FIG. 10 and FIG.

  10 and 11 show the simulation results of the magnetic field strength distribution on the track 60 in the first case and the second case, respectively. 10 and 11, the first region A1 is a region where the magnetic field is the strongest, and the second region A2 is a region where the magnetic field is the second strongest. As shown in FIG. 10, the inside of the track 18s is all the first area A1, and the second area A2 shows what deviates from the track 18s. On the other hand, as shown in FIG. 11, it can be seen that the first area A1 and the second area A2 are all inside the track 18s. 10 and 11, it can be seen that the degree of focusing of the magnetic field is much higher in the second case (FIG. 11) than in the first case (FIG. 10). It can be seen that the second case is much smaller.

  Next, a method for manufacturing the magnetic head of the present invention will be described.

  As shown in FIG. 12, the first magnetic shield layer 42 a is formed on the substrate 100. An interlayer insulating film 102 is formed on the first magnetic shield layer 42a. A reading element 42 c is formed in the middle of forming the interlayer insulating film 102, and the reading element 42 c is formed so as to exist in the interlayer insulating film 102. Next, a second magnetic shield layer 42 b is formed on the interlayer insulating film 102. An interlayer insulating layer 50 is formed on the second shield layer 42b, and a main pole 40b and an insulating layer 40d are sequentially stacked on the interlayer insulating layer 50. In the process of forming the insulating layer 40d, the magnetic induction coil 40c is formed to be embedded in the insulating layer 40d. A photosensitive film PR covering the magnetic induction coil 40c is formed on the insulating layer 40d. The insulating layer 40d is etched using the photosensitive film PR as an etching mask. The etching may be performed until the main pole 40b is exposed. FIG. 13 shows the result of the etching.

  As shown in FIG. 13, the left side portion of the photosensitive film RR of the insulating layer 40d, that is, the portion of the insulating layer 40d that faces the magnetic recording layer 18 is not completely removed, and only a certain thickness is left. Meanwhile, the right side portion of the photosensitive film 40d of the insulating layer 40d is removed until the main pole 40b is exposed.

  After the etching, a step corresponding to the thickness of the insulating layer 40d is formed between the upper surface of the insulating layer 40d covered with the photosensitive film PR and a portion of the main pole 40b exposed by the etching. Due to the characteristics of dry etching, the side surface of the insulating layer 40d that connects the upper surface of the insulating layer 40d and the exposed portion of the main pole 40b is formed obliquely. After the etching, the photosensitive film PR is removed, and a return pole 40a is formed on the insulating layer 40d as shown in FIG. The return pole 40a contacts the exposed portion of the main pole 40b by the etching.

  FIG. 15 is a plan view of the main pole 40b. As shown in FIG. 15, the portion 40aa adjacent to the magnetic recording layer 18 of the main pole 40b is formed narrower than the upper portion. The main pole 40b is formed so that the width gradually increases from the narrow portion 40aa to the upper side. However, the main pole 40b can be formed to have a certain width from a certain point. As shown in FIG. 15, after the main pole 40b is once formed, as shown in FIG. 16, the right side surface RS of the narrow portion 40aa at the lower end of the main pole 40b is changed to the first surface GS1 in FIG. A photosensitive film PR1 used for forming the film diagonally is formed on the resultant structure on which the main pole 40b is formed. The photosensitive film PR1 exposes the right side of the narrow portion 40aa of the main pole 40b in the shape of an intuitive triangle.

  The exposed portion 40p of the main pole 40b is etched using the photosensitive film PR1 as an etching mask. The etching is performed until the interlayer insulating layer 50 is exposed. After the etching, the photosensitive film PR1 is removed. FIG. 17 shows the result after removing the photosensitive film PR1.

  As shown in FIG. 17, the right side RS in FIG. 15 facing the inner side 52 of the magnetic recording layer of the narrow portion 40aa at the lower end of the main pole 40b becomes an oblique first surface GS1 by the etching. Thereby, the angle between the first surface GS1 and the second surface GS2 facing the magnetic recording layer of the narrow portion 40aa is greater than 90 °. Further, the narrow portion 40aa at the lower end of the main pole 40b becomes narrower toward the lower end. The width w2 (see FIG. 5) at the lower end of the narrow portion 40aa of the main pole 40b is preferably narrower than the track of the magnetic recording layer.

  On the other hand, when the left side surface of the narrow portion 40aa is limited as the exposed portion 40p of the narrow portion 40aa at the lower end of the main pole 40b in the step of forming the photosensitive film PR1 in FIG. 16, the inclined surface in FIG. It becomes the third surface GS3. Further, in the step of forming the photosensitive film PR1 of FIG. 16, when the left side surface and the right side surface of the narrow portion 40aa at the lower end of the main pole 40b are all exposed, the first surface GS1 and the third surface GS3 in FIG. All are inclined surfaces.

  Next, a perpendicular magnetic recording head according to a second embodiment of the invention is described.

  As shown in FIG. 18, a reading element 202 is provided between the first shield layer 200 and the second shield layer 204. A sub yoke 206 that focuses the magnetic field on the main pole 208 is provided at a distance from the second shield layer 204. The sub yoke 206 is provided in parallel with the second shield layer 204. The main pole 208 is provided on the right side of the sub yoke 206 in contact with the sub yoke 206. The lower end of the sub yoke 206 is located above the lower end of the main pole 208. A return pole 210 exists on the right side of the main pole 208. The upper ends of the return pole 210 and the main pole 208 are in contact with each other, and the lower ends are spaced apart at a narrow interval. The geometric form of the main pole 208 is the same as that of the main pole 40b according to the first embodiment, as shown in FIG. A space between the main pole 208 and the return pole 210 is filled with an insulating layer 214, and a magnetic induction coil 212 is provided in the insulating layer 214. The insulating layer 214 can be, for example, an Al2O3 layer. As described above, the configurations of the main pole 208 and the return pole 210 are substantially the same as the configurations of the first embodiment.

  On the other hand, the separated portions between the components in FIG. 18 are filled with an insulating layer, for example, Al 2 O 3, but are not shown for convenience.

  Next, a perpendicular magnetic recording head according to a third embodiment of the invention is described. The description of the perpendicular magnetic recording head according to the third embodiment is centered on a different part from the perpendicular magnetic recording head according to the second embodiment.

  As shown in FIG. 19, a third shield layer 220 is further provided between the second shield layer 204 and the sub yoke 206. The third shield layer 220 is provided so as not to contact the sub-yoke 206 as well as the second shield layer 204. The other configuration is the same as that of the second embodiment.

  Next, a method for manufacturing the perpendicular magnetic recording head according to the second embodiment will be described. Although the configurations of the perpendicular magnetic recording heads according to the second embodiment and the third embodiment are not so different, this description can also be applied to the manufacturing method of the perpendicular magnetic recording head according to the third embodiment.

  As shown in FIG. 20, the 1st shield layer 200 is formed on the board | substrate 100, and the insulating layer 240 is formed on it. During the formation of the insulating layer 240, the reading element 202 is formed so as to be embedded in the insulating layer 240. The reading element 202 can be the same as in the first embodiment. The reading element 202 is formed so that the remaining portion excluding one surface is embedded in the insulating layer 240. A second shield layer 204 is formed on the insulating layer 240. Next, a first interlayer insulating layer 250 is formed on the second shield layer 204. The first interlayer insulating layer 250 can be formed of, for example, an aluminum oxide film. A second interlayer insulating layer 252 is formed to a predetermined thickness on a partial region of the first interlayer insulating layer 250, and the sub yoke 206 is formed on the second interlayer insulating layer 252 on the remaining region of the first interlayer insulating layer 250. To the same thickness. Such a sub yoke 206 can be formed by, for example, a lift-off method. After the sub yoke 206 is formed, the upper surfaces of the second interlayer insulating layer 252 and the sub yoke 206 are planarized using the CMP method.

  Next, as shown in FIG. 21, the upper surfaces of the second interlayer insulating layer 252 and the sub yoke 206 planarized by the CMP method are covered with a main pole 208 having a predetermined thickness. Thereafter, the main pole 208 is processed into a form as shown in FIG. 24 by using a photographic etching process, and this process is as described in the perpendicular magnetic recording head according to the first embodiment.

  Next, as shown in FIG. 22, an insulating layer 214 including a magnetic induction coil 212 is formed on a partial region of the main pole 208. The insulating layer 214 can be formed of, for example, an aluminum oxide film. The left and right sides of the insulating layer 214 are formed to be inclined. A return pole 210 is formed on the insulating layer 214 as shown in FIG. One end of the return pole 210 is in contact with a portion of the main pole 208 where the insulating layer 214 is not formed. The other end of the return pole 210 is separated by a narrow interval by the insulating layer 214. Depending on the form of the insulating layer 214, the return pole 210 has a convex shape between the one end and the other end.

  On the other hand, in the method for manufacturing the perpendicular magnetic recording head according to the third embodiment, the third shield layer can be formed between the first interlayer insulating layer 250 and the second interlayer insulating layer 252 and the sub yoke 206. At this time, the third shield layer is formed so as not to contact the sub yoke 206.

  Although many matters have been specifically described in the above description, they do not limit the scope of the invention and should be construed as examples of desirable embodiments. For example, those skilled in the art can vary the overall geometric form of the main pole 40b while maintaining the characteristics of the narrow portion 40aa at the lower end of the main pole 40b. Further, as described above, the main pole 40b can try to be deformed with respect to the components other than the main pole 40b. Moreover, you may form a main pole using a lift-off process. For example, in the step of forming a photosensitive film on the insulating layer 40d, a photosensitive film that exposes the exposed region of the insulating layer in the same form as the main pole of the final form is formed. After laminating a magnetic layer on the exposed region, the photosensitive film may be removed to obtain a desired asymmetric main pole. Therefore, the scope of the present invention should not be determined by the described embodiments, but by the technical ideas described in the claims.

  The present invention can be used for all products including a perpendicular magnetic recording medium as a data recording medium, for example, an HDD and a computer including the HDD.

FIG. 3 is a cross-sectional view of a write head of a perpendicular magnetic recording head according to a conventional technique viewed from a direction parallel to a track. It is the front view which looked at the main pole of the writing head shown in FIG. 1 from the advancing direction of the head. FIG. 2 is a perspective view of a portion adjacent to a magnetic recording layer of the main pole in FIG. 1. 1 is a cross-sectional view of an asymmetrical perpendicular magnetic recording head according to a first embodiment of the present invention viewed from a direction parallel to a track. FIG. It is the front view which looked at the main pole of FIG. 4 from the advancing direction. FIG. 5 is a partial perspective view including a characteristic portion of the main pole in FIG. 4. 5 is a graph showing a field inclination in a recording direction in a magnetic recording layer due to a magnetic field generated in a perpendicular magnetic recording head according to an embodiment of the prior art and the present invention in a process of recording data. 5 is a graph showing a field tilt in a track direction in a magnetic recording layer due to a magnetic field generated in a perpendicular magnetic recording head according to an embodiment of the conventional technique and the present invention in a process of recording data. 6 is a graph showing a magnetic field strength distribution in a track direction in a magnetic recording layer by a magnetic field generated in a perpendicular magnetic recording head according to an embodiment of the conventional technique and the present invention in a process of recording data. 6 is an image photograph showing a simulation result of a magnetic field intensity distribution in a track direction in a magnetic recording layer by a magnetic field generated in a perpendicular magnetic recording head according to an embodiment of the prior art. 5 is an image photograph showing a simulation result of a distribution of magnetic field strength in a track direction in a magnetic recording layer by a magnetic field generated in a perpendicular magnetic recording head according to an embodiment of the present invention. 6 is a cross-sectional view illustrating a method of manufacturing an asymmetrical perpendicular magnetic recording head according to an embodiment of the present invention. FIG. 6 is a cross-sectional view illustrating a method of manufacturing an asymmetrical perpendicular magnetic recording head according to an embodiment of the present invention. FIG. 6 is a cross-sectional view illustrating a method of manufacturing an asymmetrical perpendicular magnetic recording head according to an embodiment of the present invention. FIG. FIG. 6 is a plan view showing a method for manufacturing an asymmetric perpendicular magnetic recording head according to an embodiment of the present invention. FIG. 6 is a plan view showing a method for manufacturing an asymmetric perpendicular magnetic recording head according to an embodiment of the present invention. FIG. 6 is a plan view showing a method for manufacturing an asymmetric perpendicular magnetic recording head according to an embodiment of the present invention. 6 is a cross-sectional view of an asymmetrical perpendicular magnetic recording head according to a second embodiment of the present invention viewed from a direction parallel to a track. FIG. FIG. 6 is a cross-sectional view of an asymmetrical perpendicular magnetic recording head according to a third embodiment of the present invention viewed from a direction parallel to a track. FIG. 19 is a cross-sectional view showing a method of manufacturing the perpendicular magnetic recording head shown in FIG. 18 by process. FIG. 19 is a cross-sectional view showing a method of manufacturing the perpendicular magnetic recording head shown in FIG. 18 by process. FIG. 19 is a cross-sectional view showing a method of manufacturing the perpendicular magnetic recording head shown in FIG. 18 by process. FIG. 19 is a cross-sectional view showing a method of manufacturing the perpendicular magnetic recording head shown in FIG. 18 by process. FIG. 19 is a front view showing a geometric form of a main pole of the perpendicular magnetic recording head shown in FIG. 18.

Explanation of symbols

GS1 1st surface GS2 2nd surface GS3 3rd surface 18 Magnetic recording layer 18s Track 22 Progression direction of magnetic recording layer 40a Main pole 50 First arrow 52 Second arrow w2 Bottom width

Claims (3)

In a perpendicular magnetic recording head comprising a read head and a write head,
The write head is a single pole type head and includes a main pole and a return pole, a first surface facing the inside of the magnetic recording layer of the main pole, and a second surface facing the data recording surface of the magnetic recording layer Among the third surfaces facing the outside of the magnetic recording layer, the first surface and the third surface are symmetrical to each other, and both form an angle larger than 90 ° with the second surface. Perpendicular magnetic recording head.   The perpendicular magnetic recording head according to claim 1, further comprising a sub yoke on a surface of the main pole facing the reading head.   The perpendicular magnetic recording head according to claim 2, further comprising a shield layer between the sub-yoke and the reading head.