JPH069083B2 - Vertical magnetic head - Google Patents
Vertical magnetic headInfo
- Publication number
- JPH069083B2 JPH069083B2 JP7142185A JP7142185A JPH069083B2 JP H069083 B2 JPH069083 B2 JP H069083B2 JP 7142185 A JP7142185 A JP 7142185A JP 7142185 A JP7142185 A JP 7142185A JP H069083 B2 JPH069083 B2 JP H069083B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- permeability
- recording
- permeability magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、磁気記録媒体を媒体面の垂直方向に磁化する
垂直磁化記録において、効率の良い記録再生を行なう垂
直磁気記録ヘッドに関する。Description: TECHNICAL FIELD The present invention relates to a perpendicular magnetic recording head that performs efficient recording / reproduction in perpendicular magnetization recording in which a magnetic recording medium is magnetized in a direction perpendicular to the medium surface.
（従来技術とその問題点） 磁気記録の記録密度を高めることにおいて、従来の磁気
記録媒体の膜面に平行に記録する長手記録方式では、反
磁界の影響のため、記録密度に限界が生じる。そこで、
近年、反磁界の影響がなく、飛躍的な高記録密度が望め
る記録形式として媒体の膜面に対し垂直な方向に記録す
る垂直記録方式ば提案され、現在に至るまで盛んに研究
が行なわれている。(Prior Art and Its Problems) In increasing the recording density of magnetic recording, in the longitudinal recording method of recording parallel to the film surface of the conventional magnetic recording medium, the recording density is limited due to the influence of the demagnetizing field. Therefore,
In recent years, a perpendicular recording method for recording in a direction perpendicular to the film surface of a medium has been proposed as a recording format that is expected to have a dramatically high recording density without being affected by a demagnetizing field, and has been actively researched to date. There is.
垂直磁気記録における記録再生ヘッドとして従来提案さ
れているヘッドの例（第８回日本応用磁気学会術講演集
１９８４年１１月、Ｐ２５１，１５ａＢ−１１）を第３
図に示す。これは、非磁性基板５上に高透磁率磁性薄膜
からなる主磁極１と、主磁極１に磁束を集中させるため
に形成した高透磁率磁性膜２″と、コイル７′と、磁束
のリターンパスとしての高透磁率磁性膜４と、非磁性絶
縁膜６とを集積化デバイス技術を使用し、薄膜化した垂
直磁気記録ヘッドである。A third example of a head that has been conventionally proposed as a recording / reproducing head in perpendicular magnetic recording (8th Japan Society for Applied Magnetics Technical Lecture, November 1984, P251, 15aB-11)
Shown in the figure. This is the main magnetic pole 1 made of a high magnetic permeability magnetic thin film on the non-magnetic substrate 5, the high magnetic permeability magnetic film 2 ″ formed to concentrate the magnetic flux on the main magnetic pole 1, the coil 7 ′, and the return of the magnetic flux. This is a perpendicular magnetic recording head in which a high-permeability magnetic film 4 as a path and a non-magnetic insulating film 6 are thinned by using integrated device technology.
しかし、このようなヘッドにおいて、主磁極１及び高透
磁率磁性膜２″、４はトラック幅方向３に磁化容易軸を
もつように形成されており、記録再生効率が必ずしも十
分ではなかつた。However, in such a head, the main magnetic pole 1 and the high-permeability magnetic films 2 ″, 4 are formed so as to have an easy axis of magnetization in the track width direction 3, and the recording / reproducing efficiency is not always sufficient.
（発明の目的） 本発明は、上記の点に鑑み、磁性膜の磁化容易軸を一部
変更し、記録再生効率を向上させた垂直磁気記録ヘッド
を提供するものである。(Object of the Invention) In view of the above points, the present invention provides a perpendicular magnetic recording head in which the easy axis of magnetization of a magnetic film is partially changed to improve the recording / reproducing efficiency.
（発明の構成） 本発明は、磁性薄膜を含む複数の高透磁率磁性体と、単
数又は複数のコイルとを含んで構成される磁気ヘッドに
おいて、前記複数の高透磁率磁性体が少くとも記録再生
に関与する第１の高透磁率磁性薄膜と、第１の高透磁率
磁性薄膜の側面に積層された第２の高透磁率磁性膜とを
含み、前記第１の高透磁率磁性薄膜並びに第２の高透磁
率磁性膜が磁気記録媒体の一方の側にあり、前記第１の
高透磁率磁性薄膜及び第２の高透磁率磁性膜の磁化容易
軸がトラック幅方向に対し、それぞれ平行及び垂直な方
向であることを特徴とする。(Structure of the Invention) According to the present invention, in a magnetic head including a plurality of high magnetic permeability magnetic bodies including a magnetic thin film, and a single or a plurality of coils, the plurality of high magnetic permeability magnetic bodies are recorded at least. A first high-permeability magnetic thin film and a second high-permeability magnetic thin film laminated on a side surface of the first high-permeability magnetic thin film, and the first high-permeability magnetic thin film; The second high-permeability magnetic film is on one side of the magnetic recording medium, and the easy magnetization axes of the first high-permeability magnetic thin film and the second high-permeability magnetic film are parallel to the track width direction, respectively. And a vertical direction.
（発明の概要） 本発明の概要について、図を用いて説明する。第１図
は、本発明の一例を示すヘッドの一部の斜視図である。
スパッタ法等を用いて形成した第１の高透磁率磁性膜で
ある主磁極１と、さりに主磁極１に磁束を集中させるた
めに厚く形成した第２の高透磁率磁性膜２とを備えてい
る。なお、３の矢印はトラック幅方向を示し、白ぬきの
矢印11及び21は、それぞれ、主磁極１及び第２の高透磁
率磁性膜２の磁化容易軸の方向を示している。ここで、
主磁極の磁化容易軸11及び第２の高透磁率磁性膜２の磁
化容易軸21がトラック幅方向とそれぞれ０゜±20゜及び9
0゜±20゜の角度であることにより、実質的に記録再生
電圧に関与する透磁率を高め、記録再生効率の向上を高
めるものである。ここで主磁極１の磁化容易軸11及び第
２の高透磁率磁性膜２の磁化容易軸21とトラック幅方向
はそれぞれ平行及び垂直であることが望ましいが０゜±
20゜及び90゜±20゜の範囲なら前記効果を充分に奏する
ものである。(Outline of the Invention) An outline of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a part of a head showing an example of the present invention.
A main magnetic pole 1 that is a first high-permeability magnetic film formed by using a sputtering method, and a second high-permeability magnetic film 2 that is thickly formed to concentrate the magnetic flux on the main magnetic pole 1 are provided. ing. The arrow 3 indicates the track width direction, and the white arrows 11 and 21 indicate the directions of the easy axes of magnetization of the main pole 1 and the second high-permeability magnetic film 2, respectively. here,
The easy axis 11 of the main pole and the easy axis 21 of the second high-permeability magnetic film 2 are respectively 0 ° ± 20 ° and 9 ° with the track width direction.
The angle of 0 ° ± 20 ° substantially enhances the magnetic permeability involved in the recording / reproducing voltage and enhances the recording / reproducing efficiency. Here, it is desirable that the easy axis 11 of the main magnetic pole 1 and the easy axis 21 of the second high-permeability magnetic film 2 and the track width direction are parallel and perpendicular, respectively.
In the range of 20 ° and 90 ° ± 20 °, the above-mentioned effects are sufficiently exhibited.
次に本発明の実施例を第２図に示す。ただし、以下の実
施例では主磁極１、高透磁率磁性膜２は、第１図に示し
たように、磁化容易軸を持つように形成した。Next, an embodiment of the present invention is shown in FIG. However, in the following examples, the main pole 1 and the high-permeability magnetic film 2 were formed so as to have an easy axis of magnetization as shown in FIG.
（実施例） 第２図(a)は片側励磁型ヘツドの実施例を示したもの
で、非磁性基板５として厚さ１mmのガラス基板上に主磁
極として厚さ０．３mmのCoZr非晶質合金からなる第１の
高透磁率磁性薄膜としての主磁極１を、次に前記主磁極
に磁束を集中させるために厚づけした厚さ３μｍの同じ
くCoZr非晶質合金からなる第２の高透磁率磁性膜２をＲ
Ｆマグネトロンスパッタ法により作成した。高透磁率磁
性薄膜１及び２のスパッタ時に互いに直交する方向とな
る磁界を加えて形成し、その後２５０℃１時間の回転磁
場中アニールを行い、それぞれの磁化容易軸が第１図に
示したようになっていることを力−効果法により確認し
た。そして、記録再生用コイル７を巻き、次に、Ｌ字型
の高透磁率磁性材料４からなる側面部材として、Mn−Zn
フェライトを用い同図(a)のように接着した。さらに、
保護膜の役目の非磁性絶縁膜６としてエポキシ樹脂系硬
質耐熱性接着剤を用いた。記録再生の方法は、次の通り
である。記録媒体８を移動させ、記録時にはコイル７に
電圧を加え、流れた電流による発生した磁界により情報
を記憶し、再生時には、記録媒体６からの漏洩磁界によ
りコイル７に誘起される電圧を検出することにより情報
の再生を行なつた。(Embodiment) FIG. 2 (a) shows an embodiment of a single-sided excitation type head. A non-magnetic substrate 5 is a glass substrate having a thickness of 1 mm, and a main magnetic pole is a CoZr amorphous material having a thickness of 0.3 mm. The main magnetic pole 1 as a first high-permeability magnetic thin film made of an alloy is next thickened to concentrate magnetic flux on the main magnetic pole. R for magnetic susceptibility magnetic film 2
It was created by the F magnetron sputtering method. The high permeability magnetic thin films 1 and 2 were formed by applying magnetic fields in directions orthogonal to each other during sputtering, and then annealed in a rotating magnetic field at 250 ° C. for 1 hour, and the respective easy axes of magnetization were as shown in FIG. It was confirmed by the force-effect method that Then, the recording / reproducing coil 7 is wound, and then Mn-Zn is used as a side member made of the L-shaped high-permeability magnetic material 4.
Adhesion was performed using ferrite as shown in FIG. further,
An epoxy resin-based hard heat resistant adhesive was used as the non-magnetic insulating film 6 serving as a protective film. The recording / reproducing method is as follows. The recording medium 8 is moved, a voltage is applied to the coil 7 during recording, information is stored by the magnetic field generated by the flowing current, and the voltage induced in the coil 7 by the leakage magnetic field from the recording medium 6 is detected during reproduction. By doing so, the information was reproduced.
（実施例２） 第２図(b)は、薄膜ヘッドの実施例を示したもので同図
(a)と同様のプロセスで作製した。即ち非磁性基板５上
に第１の高透磁率磁性薄膜としての主磁極１を形成し、
次にこれに接した第２の高透磁率磁性膜２を形成し、さ
らに磁束のリターンパスとして高透磁率磁性膜２′を、
ＲＦマグネトロンスパッタ法によりCo−Zr非晶質膜で形
成した。また、コイル７′として銅をメッキ法により形
成し、保護膜の役目の非磁性絶縁膜６としてエポキシ樹
脂系硬質耐熱性接着剤を用いた。。記録再生の方法は前
記と同様である。(Embodiment 2) FIG. 2 (b) shows an embodiment of a thin film head.
It was manufactured by the same process as in (a). That is, the main magnetic pole 1 as the first high magnetic permeability magnetic thin film is formed on the non-magnetic substrate 5,
Next, the second high-permeability magnetic film 2 which is in contact with this is formed, and the high-permeability magnetic film 2'is further provided as a return path of the magnetic flux.
A Co—Zr amorphous film was formed by the RF magnetron sputtering method. Further, copper was formed as the coil 7'by a plating method, and an epoxy resin hard heat resistant adhesive was used as the non-magnetic insulating film 6 serving as a protective film. . The recording / reproducing method is the same as described above.
（実施例３） 第２図(c)及び(d)は、記録媒体８を挾んで主磁極を補助
するために、補助磁極を設けた磁気ヘッドで同図(c)
は、補助磁極励磁ヘッド、同図(d)は、主磁極励磁ヘッ
ドの実施例である。(Embodiment 3) FIGS. 2 (c) and 2 (d) show a magnetic head provided with an auxiliary magnetic pole in order to sandwich the recording medium 8 to assist the main magnetic pole.
Is an auxiliary magnetic pole excitation head, and FIG. 7D is an embodiment of a main magnetic pole excitation head.
同図(c)で、、非磁性基板５上に、前述の同様の方法材
料で、第１の高透磁率磁性膜としての主磁極１と、第２
の高透磁率磁性膜２を作成した。また、補助磁極とし
て、高透磁率磁性材料４′から成るMn−Znフェライトに
コイルを巻き使用した。記録再生の方法は前記の実施例
１及び２と同様であるが、記録媒体８を挾んで主磁極と
補助磁極を配置しているところと、記録及び再生に補助
磁極に巻かれたコイルを用いているところが異なる。In the same figure (c), the main magnetic pole 1 as the first high permeability magnetic film and the second magnetic pole 2 are formed on the non-magnetic substrate 5 by the same method material as described above.
A high magnetic permeability magnetic film 2 was prepared. A coil was wound around an Mn-Zn ferrite made of a high-permeability magnetic material 4'as an auxiliary magnetic pole. The recording / reproducing method is the same as in the first and second embodiments, except that the main magnetic pole and the auxiliary magnetic pole are arranged so as to sandwich the recording medium 8 and a coil wound around the auxiliary magnetic pole is used for recording and reproducing. The place is different.
同図(d)は、同図(c)と同様であり、コイル７を主磁極側
に巻き、上部に磁束をさらに集中させるために、高透磁
率磁性材料４″から成るMn−Znフエライトを設けたもの
である。しかし、高透磁率磁性材料４″は、必要に応じ
て設ければよく、なくてもよい。記録再生の方法は、前
記実施例１及び２と同様である。The same figure (d) is the same as the same figure (c), in which the coil 7 is wound around the main magnetic pole side, and in order to further concentrate the magnetic flux, an Mn-Zn ferrite composed of a high-permeability magnetic material 4 ″ is used. However, the high-permeability magnetic material 4 ″ may be provided or may not be provided as needed. The recording / reproducing method is the same as in the first and second embodiments.
なお、上記実施例１から３において、高透磁率磁性膜
１，２，２′として、スパッタ法によるCo−Zr非晶質膜
を用いたが、他の成膜法、例えば、メッキ法、蒸着法で
もよく、また、売パーマロイ膜センダスト膜等でもよ
い。さらに高透磁率磁性材料４，４′，４″として、Mn
−Zn系フェライトの他、Ni−Znフェライト、Ni−Fe合
金、センダスト等でもよい。Although Co-Zr amorphous films formed by sputtering are used as the high-permeability magnetic films 1, 2, 2'in Examples 1 to 3 above, other film forming methods such as plating and vapor deposition are used. Alternatively, a permalloy film, a sendust film or the like may be used. Further, as the high permeability magnetic material 4, 4 ', 4 ", Mn
Besides -Zn type ferrite, Ni-Zn ferrite, Ni-Fe alloy, sendust, etc. may be used.
次に本発明ヘッドの一例として第２図(a)の形状を用い
たヘッドについて記録再生評価を行った。ただし、主磁
極１及び第２の高透磁率磁性膜２の磁化容易軸は、トラ
ック幅方向に対し、それぞれ平行及び垂直である。ま
た、従来ヘッドも、比較のため、本発明ヘッドと同じ形
状を用いた。ただし、主磁極１及び第２の高透磁率磁性
膜２の磁化容易軸は、トラック幅方向に対し、共に平行
である。なお、ここで用いた磁性膜は、主磁極１として
０．３μｍのCo−Zr非晶質膜を用い、第２の高透磁率磁
性膜２として、３μｍのCo−Zr非晶質膜を用いた。Co−
Zr膜の飽和磁化は、１４０００Gauss、透磁率は４００
０（困難軸、１０MHz）であった。一方、記録媒体８
は、Co−Cr／Ni−Fe二層媒体（飽和磁化４００qmu/emu/
cc、垂直磁力４００Oe、異方性磁界２ＫOe、Co−Crの厚
み０．３５μｍ、Ni−Feの厚み０．５μｍ）を用い、
３．５インチブロツピーデイスク評価装置にて、記録再
生評価した。その結果を第４図に示す。第４図は、記録
電流Ｉｏ−再生電圧Ｅｏ特性を示したもので、これか
ら、本発明ヘッドは、従来ヘッドより記録し易く、再生
電圧も増加することがわかった。Next, as an example of the head of the present invention, recording / reproducing evaluation was performed on a head using the shape of FIG. 2 (a). However, the easy magnetization axes of the main pole 1 and the second high-permeability magnetic film 2 are parallel and perpendicular to the track width direction, respectively. For comparison, the conventional head used the same shape as the head of the present invention. However, the axes of easy magnetization of the main magnetic pole 1 and the second high-permeability magnetic film 2 are both parallel to the track width direction. As the magnetic film used here, a 0.3 μm Co-Zr amorphous film was used as the main magnetic pole 1, and a 3 μm Co-Zr amorphous film was used as the second high-permeability magnetic film 2. I was there. Co-
The saturation magnetization of the Zr film is 14000 Gauss and the magnetic permeability is 400.
It was 0 (hard axis, 10 MHz). On the other hand, the recording medium 8
Is a Co-Cr / Ni-Fe bilayer medium (saturation magnetization 400 qmu / emu /
cc, perpendicular magnetic force 400 Oe, anisotropic magnetic field 2 KOe, Co—Cr thickness 0.35 μm, Ni—Fe thickness 0.5 μm),
Recording / reproduction was evaluated by a 3.5-inch Bloppy disk evaluation device. The results are shown in FIG. FIG. 4 shows the recording current Io -reproduction voltage Eo characteristic. From this, it was found that the head of the present invention is easier to record than the conventional head and the reproduction voltage also increases.
（発明の効果） 本発明は、主磁極膜の厚づけ層の磁化容易軸をトラック
幅方向と垂直にすることにより、以下の効果があった。(Effect of the Invention) The present invention has the following effects by making the easy magnetization axis of the thick layer of the main magnetic pole film perpendicular to the track width direction.
(1) 記録時において、より少ない記録電流で媒体の磁
化を飽和でき、消費電力も少なくなった。(1) At the time of recording, the magnetization of the medium could be saturated with a smaller recording current and the power consumption was reduced.
(2) 再生電圧は、従来より増加した。(2) The reproduction voltage has increased from the conventional level.
(3) 従来ヘッドと同じ再生電圧を得るのに、厚づけ層
の膜厚が、より薄くでき、生産性が向上した。(3) Even though the same reproducing voltage as that of the conventional head is obtained, the thickness of the thickening layer can be made thinner and the productivity is improved.
第１図は、本発明の概要を示す図、第２図は、本発明の
実施例を示す図、第３図は従来から提案されているヘッ
ドを示す図、第４図は従来ヘッドと本発明ヘッドについ
て、記録電流Ｉｏと再生出力電圧Ｅｏとの関係について
示した図である。 １…主磁極、２，２′，２″…高透磁率磁性膜、３…ト
ラック幅方向、４，４′，４″…高透磁率磁性材料、５
…非磁性基板、６…非磁性絶縁膜、７，７′…コイル、
８…記録媒体、11，21…磁化容易方向FIG. 1 is a diagram showing an outline of the present invention, FIG. 2 is a diagram showing an embodiment of the present invention, FIG. 3 is a diagram showing a head conventionally proposed, and FIG. 4 is a conventional head and a book. for the invention the head is a diagram showing the relationship between the recording current I o and the reproduction output voltage E o. DESCRIPTION OF SYMBOLS 1 ... Main magnetic pole, 2, 2 ', 2 "... High-permeability magnetic film, 3 ... Track width direction, 4, 4', 4" ... High-permeability magnetic material, 5
... non-magnetic substrate, 6 ... non-magnetic insulating film, 7, 7 '... coil,
8 ... Recording medium, 11, 21 ... Easy magnetization direction
Claims (1)
単数又は複数のコイルを含んで構成される垂直磁気ヘッ
ドにおいて、前記複数の高透磁率磁性体が少なくとも記
録再生に関与する第１の高透磁率磁性薄膜と、第１の高
透磁率磁性薄膜の側面に積層された第２の高透磁率磁性
膜とを含み、前記第１の高透磁率磁性薄膜並びに第２の
高透磁率磁性薄膜が磁気記録媒体の一方の側にあり、前
記第１の高透磁率磁性薄膜及び前記第２の高透磁率磁性
膜の磁化容易軸がトラック幅方向に対し、それぞれ０゜
±20゜及び90゜±20゜の角度を有することを特徴とする
垂直磁気ヘッド。1. A plurality of high-permeability magnetic bodies including a magnetic thin film,
In a perpendicular magnetic head including a single coil or a plurality of coils, a plurality of high magnetic permeability magnetic bodies include at least a first high magnetic permeability magnetic thin film and a first high magnetic permeability magnetic thin film. A second high-permeability magnetic film laminated on a side surface, wherein the first high-permeability magnetic thin film and the second high-permeability magnetic thin film are on one side of the magnetic recording medium, and A perpendicular magnetic head characterized in that the easy magnetic axes of the high magnetic permeability magnetic thin film and the second high magnetic permeability magnetic film have an angle of 0 ° ± 20 ° and 90 ° ± 20 ° with respect to the track width direction, respectively. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7142185A JPH069083B2 (en) | 1985-04-04 | 1985-04-04 | Vertical magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7142185A JPH069083B2 (en) | 1985-04-04 | 1985-04-04 | Vertical magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61229209A JPS61229209A (en) | 1986-10-13 |
| JPH069083B2 true JPH069083B2 (en) | 1994-02-02 |
Family
ID=13460028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7142185A Expired - Lifetime JPH069083B2 (en) | 1985-04-04 | 1985-04-04 | Vertical magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069083B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA1334447C (en) * | 1988-08-03 | 1995-02-14 | Digital Equipment Corporation | Perpendicular anisotropy in thin film devices |
| US5089334A (en) * | 1988-08-03 | 1992-02-18 | Digital Equipment Corporation | Flux spreading thin film magnetic devices |
| US5085935A (en) * | 1988-08-03 | 1992-02-04 | Digital Equipment Corporation | Flux spreading thin film magnetic devices |
-
1985
- 1985-04-04 JP JP7142185A patent/JPH069083B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61229209A (en) | 1986-10-13 |
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