JPH0470693B2 - - Google Patents
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- Publication number
- JPH0470693B2 JPH0470693B2 JP25019284A JP25019284A JPH0470693B2 JP H0470693 B2 JPH0470693 B2 JP H0470693B2 JP 25019284 A JP25019284 A JP 25019284A JP 25019284 A JP25019284 A JP 25019284A JP H0470693 B2 JPH0470693 B2 JP H0470693B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film layer
- magnetic recording
- magnetization
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
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- 229910003271 Ni-Fe Inorganic materials 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 230000005415 magnetization Effects 0.000 description 30
- 238000010586 diagram Methods 0.000 description 16
- 230000035699 permeability Effects 0.000 description 12
- 238000004544 sputter deposition Methods 0.000 description 5
- 229910000815 supermalloy Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、垂直磁気記録用の磁気記録媒体に関
する。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic recording medium for perpendicular magnetic recording.
従来の技術
垂直磁気記録方式は、従来の面内磁気記録方式
に比べて、記録密度を10〜100倍程度も高くとる
ことができ、高密度磁気記録方式として注目を集
めている。垂直磁気記録用の磁気記録媒体として
は、例えば第１図に示すように、非磁性基体１１
の上に、高透磁率層となる水平磁化膜層２を形成
すると共に、この水平磁化膜層２の上に磁気記録
層となる垂直磁化膜層３を積層した２層膜構造の
ものが知られている。前記水平磁化膜層２はMo
添加Ni−Fe系スーパマロイまたはNi−Fe系パー
マロイ等で構成され、垂直磁化膜層３はCo−Cr
の組成で構成される。水平磁化膜層２をスーパマ
ロイで構成する場合には、Mo添加量は４〜51wt
％の範囲に選定される。BACKGROUND ART Perpendicular magnetic recording systems can achieve recording densities approximately 10 to 100 times higher than conventional longitudinal magnetic recording systems, and are attracting attention as high-density magnetic recording systems. As a magnetic recording medium for perpendicular magnetic recording, for example, as shown in FIG.
A two-layer film structure is known in which a horizontal magnetization film layer 2, which serves as a high magnetic permeability layer, is formed thereon, and a perpendicular magnetization film layer 3, which serves as a magnetic recording layer, is laminated on top of this horizontal magnetization film layer 2. It is being The horizontal magnetic film layer 2 is made of Mo
The perpendicular magnetic film layer 3 is made of Co-Cr.
It consists of the composition of When the horizontal magnetization film layer 2 is made of supermalloy, the amount of Mo added is 4 to 51wt.
% range.
上記の２層膜構造の磁気記録媒体において、磁
気記録を行なうに当り、例えば第２図に示すよう
に、磁気記録媒体の垂直磁化膜層２に対向して主
磁極４を配置し、背面側に補助磁極５を配置した
場合、補助磁極５からの磁束は、高透磁率層であ
る水平磁化膜層２を水平方向に流れて主磁極４に
集中し、主磁極４の部分で垂直磁化膜層３を垂直
磁化する。このため、２層膜構造の磁気記録媒体
では、補助磁極５を垂直磁化膜層３に極めて接近
させたと等価の状態で高密度磁気記録を行なうこ
とができる。また、水平磁化膜層２の存在によつ
て、垂直磁化膜層３の垂直磁化に対して馬蹄形磁
化モードが形成され、減磁作用が小さくなるこ
と、記録密度特性を損なうことなく、垂直ヘツド
における記録再生の感度を10倍以上に向上させる
ことができること、更に、記録の保存性を高める
ことができること等の利点も得られる。 When performing magnetic recording in the magnetic recording medium with the above-mentioned two-layer film structure, for example, as shown in FIG. When the auxiliary magnetic pole 5 is arranged at Layer 3 is magnetized perpendicularly. Therefore, in a magnetic recording medium having a two-layer film structure, high-density magnetic recording can be performed in a state equivalent to having the auxiliary magnetic pole 5 extremely close to the perpendicular magnetization film layer 3. In addition, due to the presence of the horizontal magnetization film layer 2, a horseshoe-shaped magnetization mode is formed with respect to the perpendicular magnetization of the perpendicular magnetization film layer 3, and the demagnetization effect is reduced. There are also advantages such as being able to improve the sensitivity of recording and reproducing by more than 10 times and further improving the storage stability of recordings.
上述の垂直磁気記録用磁気記録媒体の工業的製
造方法としては、スパツタ法が採用される。第３
図はマグネトロンスパツタ方式の製造装置を概略
的に示す図である。図において、７はArガス等
を導入して10-3Torr程度に圧力設定した真空槽、
８はターゲツト、９はこのターゲツト８の背面側
に配置されたマグネツトである。１０は矢印ａ方
向に走行する非磁性基体、１１は非磁性基体１０
を供給する供給ロール、１２は巻取ロール、１３
は冷却ドラムである。 A sputtering method is employed as an industrial manufacturing method for the above-mentioned magnetic recording medium for perpendicular magnetic recording. Third
The figure is a diagram schematically showing a magnetron sputter type manufacturing apparatus. In the figure, 7 is a vacuum chamber in which Ar gas, etc. is introduced and the pressure is set to about 10 -3 Torr.
8 is a target, and 9 is a magnet placed on the back side of this target 8. 10 is a non-magnetic substrate running in the direction of arrow a, 11 is a non-magnetic substrate 10
12 is a take-up roll, 13 is a supply roll that supplies
is a cooling drum.
前記ターゲツト８は、水平磁化膜層２を形成す
る場合には、Mo添加Ni−Fe系スーパマロイまた
はNi−Fe系パーマロイ等で構成され、垂直磁化
膜層３を形成する場合にはCo−Cr系材料によつ
て構成される。また、ターゲツト８は、第４図に
示すように、非磁性基体１０の幅w1をカバーで
きる幅w2を有する矩形状に形成し、その背面側
に、外形に沿う矩形リング状の外側コア９１及び
中脚コア９２を有するマグネツト９を配置した構
造となつている。 The target 8 is made of Mo-doped Ni-Fe supermalloy or Ni-Fe permalloy when forming the horizontal magnetization film layer 2, and is made of Co-Cr-based material when forming the perpendicular magnetization film layer 3. Composed of materials. Further, as shown in FIG. 4, the target 8 is formed into a rectangular shape having a width w2 that can cover the width w1 of the non-magnetic substrate 10, and has a rectangular ring-shaped outer core 91 and a rectangular ring-shaped outer core 91 along the outer shape on the back side thereof. It has a structure in which a magnet 9 having a middle leg core 92 is arranged.
上記の装置において、冷却ドラム１３とターゲ
ツト８との間に、ターゲツト８側を負とする400
〜500Vの高電圧を印加すると、真空槽７内でプ
ラズマ放電が発生し、Ar+がターゲツト８の負電
位に引かれてその表面に衝突し、ターゲツト表面
の金原子が叩き出される。叩き出された金属原子
はターゲツト８に対向させた非磁性基体１０の表
面に析出する。ターゲツト８の表面における金属
原子の放出跡イは、第４図に示すように、ターゲ
ツト８の背面に配置されたマグネツト９の形状に
応じて、矩形リング状となる。 In the above device, a 400 mm
When a high voltage of ~500 V is applied, a plasma discharge is generated in the vacuum chamber 7, and Ar + is attracted to the negative potential of the target 8 and collides with the surface of the target, thereby knocking out gold atoms on the surface of the target. The ejected metal atoms are deposited on the surface of the nonmagnetic substrate 10 facing the target 8. The emitted trace of metal atoms on the surface of the target 8 has a rectangular ring shape depending on the shape of the magnet 9 placed on the back surface of the target 8, as shown in FIG.
従来技術の問題点
ところが、水平磁化膜層２を、スパツタ法によ
つて形成した場合、非磁性基体１０の長さ方向Ｘ
（走行方向ａ）で磁化困難、幅w1の方向Ｙで磁化
容易となる磁気異方性を生じ（第４図参照）、再
生出力のモジユレーシヨンが大きくなつてしまう
と言う問題を生じることが解つた。第５図は、水
平磁化膜層２を磁歪零組成のスーパマロイとし、
上述のスパツタ法によつて得られた磁気記録媒体
を、円形状に打抜いて得られた磁気デイスク（フ
ロツピデイスク）を、円周360゜に亘つてトレース
して得られた再生出力特性図である。この第５図
に示すように、従来の磁気記録媒体では、再生出
力が磁化困難方向（長さ方向）Ｘで大きく、磁化
容易方向（幅方向）Ｙで小さくなるモジユレーシ
ヨンが現われる。Problems with the Prior Art However, when the horizontal magnetization film layer 2 is formed by the sputtering method, the longitudinal direction of the nonmagnetic substrate 10
It was found that a magnetic anisotropy occurs in which magnetization is difficult in the travel direction a and magnetization is easy in the direction Y of the width w1 (see Figure 4), resulting in a problem in which the modulation of the reproduced output becomes large. . In FIG. 5, the horizontal magnetization film layer 2 is made of supermalloy with zero magnetostriction composition,
This is a reproduction output characteristic diagram obtained by tracing a magnetic disk (floppy disk) obtained by punching out a magnetic recording medium obtained by the above-mentioned sputtering method into a circular shape over a 360° circumference. . As shown in FIG. 5, in the conventional magnetic recording medium, a modulation appears in which the reproduction output is large in the direction of difficult magnetization (length direction) X and small in the direction of easy magnetization (width direction) Y.
本発明の目的
そこで本発明は、磁気記録面内の磁気異方性を
持たず、磁気特性が等方的で、再生出力モジユレ
ーシヨンの小く、しかも高透磁率の垂直磁気記録
用の磁気記録媒体を提供することを目的とする。Purpose of the Invention The present invention provides a magnetic recording medium for perpendicular magnetic recording that has no magnetic anisotropy in the magnetic recording plane, has isotropic magnetic properties, has a small reproduction output modulation, and has high magnetic permeability. The purpose is to provide
本発明の構成
上記目的を達成するため、本発明は、非磁性基
体の表面にMo添加Ni−Fe系水平磁化膜層と垂直
磁化膜層とを順次積層して設けた磁気記録媒体に
おいて、前記水平磁化膜層におけるMo添加量を
0wt％より大きく4wt％より小さい値としたこと
を特徴とする。Structure of the Present Invention In order to achieve the above object, the present invention provides a magnetic recording medium in which a Mo-doped Ni-Fe horizontal magnetic film layer and a perpendicular magnetic film layer are sequentially laminated on the surface of a non-magnetic substrate. The amount of Mo added in the horizontal magnetization film layer is
It is characterized by having a value greater than 0wt% and less than 4wt%.
Mo添加Ni−Fe系水平磁化膜層は、Mo添加量
に応じて垂直異方性磁界が変化する。第６図は
Mo添加Ni−Fe系水平磁化膜層におけるMo添加
量wt％と垂直異方性磁界（0e）との関係を示す
特性図である。この特性図から明らかなように、
Mo添加量が減少すると垂直異方性磁界Hkが大
きくなる。 In the Mo-added Ni-Fe-based horizontally magnetized film layer, the vertical anisotropy magnetic field changes depending on the amount of Mo added. Figure 6 is
FIG. 2 is a characteristic diagram showing the relationship between the amount of Mo added (wt%) and the vertical anisotropy magnetic field (0e) in a Mo-doped Ni—Fe-based horizontally magnetized film layer. As is clear from this characteristic diagram,
As the amount of Mo added decreases, the perpendicular anisotropy field Hk increases.
一方、磁気デイスクにおいては、水平磁化膜層
の磁化困難方向Ｘと磁化容易方向Ｙの透磁率が垂
直異方性磁界に応じて変化する。第７図は磁気デ
イスクにおける水平磁化膜層の垂直異方性磁界と
初透磁率μiとの関係を示す図である。この第７図
に示すように、垂直異方性磁界Hkが小さい領域
では、磁化困難方向（長さ方向）Ｘの初透磁率μi
が非常に大きくなり、磁化容易方向（幅方向）Ｙ
における初透磁率μiとの差が非常に大きくなる
が、垂直異方性磁界Hkが大きくなるにつれて、
磁化困難方向Ｘと磁化容易方向Ｙでの初透磁率μi
の値が次第に接近する傾向を示す。このことは垂
直異方性磁界Hkが大きくなるにつれて、磁気記
録面内での磁気特性が等方的傾向となることを意
味する。 On the other hand, in a magnetic disk, the magnetic permeability of the horizontally magnetized film layer in the direction of difficult magnetization X and the direction of easy magnetization Y changes depending on the vertical anisotropic magnetic field. FIG. 7 is a diagram showing the relationship between the vertical anisotropy magnetic field of the horizontally magnetized film layer and the initial magnetic permeability μi in a magnetic disk. As shown in Fig. 7, in the region where the perpendicular anisotropy magnetic field Hk is small, the initial magnetic permeability μi in the direction of difficult magnetization (lengthwise direction)
becomes very large, and the direction of easy magnetization (width direction) Y
The difference from the initial permeability μi becomes very large, but as the perpendicular anisotropy field Hk increases,
Initial magnetic permeability μi in the direction of difficult magnetization X and the direction of easy magnetization Y
shows a tendency for the values to gradually approach each other. This means that as the perpendicular anisotropic magnetic field Hk increases, the magnetic properties within the magnetic recording plane tend to be isotropic.
そこで本発明においては、Mo添加Ni−Fe系水
平磁化膜層を形成する場合に、Mo添加量を0wt
％より大きく4wt％より小さい範囲に選定する。
すると、第６図に示したように、垂直異方性磁界
Hkが、Mo添加量を４〜5wt％とした従来のスー
パマロイ系水平磁化膜層の場合より大きくなり、
第７図に示したように、磁化困難軸方向（長さ方
向）Ｘと磁化容易軸方向（幅方向）Ｙでの初透磁
率μiの値が近似する方向となり、磁気記録面内で
の磁気特性が等方化される。従つて、本発明によ
れば、磁気デイスクの磁気記録面内での磁気特性
を等方化し、再生出力のモジユレーシヨンをなく
することができる。しかも、上述のMo添加量は
水平磁化膜層の高透磁率を損なうことがない。特
に、Mo添加量を、垂直異方性磁界Hkが20（0e）
以上となる3wt％以下にした場合には、第７図に
示すように、磁化困難方向Ｘと磁化容易方向Ｙの
初透磁率μiが略等しくなり、磁気記録面内での磁
気特性がほぼ等方化され、再生出力モジユレーシ
ヨンが非常に小さくなる。 Therefore, in the present invention, when forming a Mo-doped Ni-Fe-based horizontally magnetized film layer, the amount of Mo added is set to 0wt.
Select a range greater than % and less than 4wt%.
Then, as shown in Figure 6, the perpendicular anisotropic magnetic field
Hk is larger than in the case of a conventional supermalloy horizontally magnetized film layer with a Mo addition amount of 4 to 5 wt%,
As shown in Figure 7, the values of the initial magnetic permeability μi in the hard axis direction (length direction) X and the easy axis direction (width direction) Y are similar, and the magnetic The properties are made isotropic. Therefore, according to the present invention, the magnetic characteristics within the magnetic recording surface of the magnetic disk can be made isotropic, and the modulation of the reproduced output can be eliminated. Moreover, the above-described amount of Mo added does not impair the high magnetic permeability of the horizontally magnetized film layer. In particular, the amount of Mo added is set to 20 (0e) when the perpendicular anisotropy magnetic field Hk is
When the content is 3wt% or less, as shown in Figure 7, the initial magnetic permeability μi in the direction of difficult magnetization The playback output modulation becomes very small.
第８図は本発明に係るMo添加Ni−Fe系水平磁
化膜層を備える磁気デイスクを、円周360゜に亘つ
てトレースして得られた再生出力特性図である。
この第８図の再生出力特性図を、第５図に示した
従来の磁気デイスクの再生出力特性図と比較する
と明らかなように、従来の磁気デイスクでは、磁
化困難軸方向Ｘで大きく、磁化容易軸方向Ｙで小
さな再生出力モジユレーシヨンが見られたが、本
発明に係る磁気デイスクにおいては、再生出力モ
ジユレーシヨンが非常に小さくなつている。 FIG. 8 is a reproduction output characteristic diagram obtained by tracing a magnetic disk provided with a Mo-doped Ni-Fe horizontal magnetic film layer according to the present invention over a circumference of 360°.
As is clear from comparing the reproduction output characteristic diagram of FIG. 8 with the reproduction output characteristic diagram of the conventional magnetic disk shown in FIG. A small reproduction output modulation was observed in the axial direction Y, but in the magnetic disk according to the present invention, the reproduction output modulation is extremely small.
本発明の効果
以上述べたように、本発明は、非磁性基体の表
面にMo添加Ni−Fe系水平磁化膜層と垂直磁化膜
層とを順次積層して設けた磁気記録媒体におい
て、前記水平磁化膜層におけるMo添加量を0wt
％より大きく4wt％より小さい値としたことを特
徴とするから、磁気記録面内で磁気異方性を持た
ず、磁気特性が等方的で、再生出力モジユレーシ
ヨンが非常に小さく、しかも高透磁率の垂直磁気
記録用の磁気記録媒体を提供することができる。Effects of the Invention As described above, the present invention provides a magnetic recording medium in which a Mo-doped Ni-Fe horizontal magnetization film layer and a perpendicular magnetization film layer are sequentially stacked on the surface of a nonmagnetic substrate. The amount of Mo added in the magnetic film layer is 0wt.
% and smaller than 4wt%, it has no magnetic anisotropy within the magnetic recording surface, has isotropic magnetic properties, has a very small reproduction output modulation, and has high magnetic permeability. A magnetic recording medium for perpendicular magnetic recording can be provided.
第１図は垂直磁気記録用の磁気記録媒体の構造
を示す図、第２図は同じくその磁気記録方式を示
す図、第３図は第１図及び第２図に示した磁気記
録媒体を製造するスパツタ装置の構成を概略的に
示す図、第４図はスパツタ装置におけるターゲツ
ト、非磁性基体及びマグネツトの関係を示す図、
第５図は従来の磁気記録媒体の再生出力特性図、
第６図はMo添加Ni−Fe系水平磁化膜層における
Mo添加量（wt％）と垂直異方性磁界（0e）との
関係を示す特性図、第７図は磁気デイスクにおけ
る水平磁化膜層の垂直異方性磁界Hkと初透磁率
μiとの関係を示す図、第８図は本発明に係る磁気
記録媒体の再生出力特性図である。
１…非磁性基体、２…水平磁化膜層、３…垂直
磁化膜層。
Figure 1 is a diagram showing the structure of a magnetic recording medium for perpendicular magnetic recording, Figure 2 is a diagram showing the magnetic recording method, and Figure 3 is a diagram showing the manufacture of the magnetic recording medium shown in Figures 1 and 2. FIG. 4 is a diagram schematically showing the configuration of a sputtering device, and FIG. 4 is a diagram showing the relationship between a target, a nonmagnetic substrate, and a magnet in the sputtering device.
Figure 5 is a reproduction output characteristic diagram of a conventional magnetic recording medium.
Figure 6 shows the Mo-doped Ni-Fe horizontal magnetization film layer.
Characteristic diagram showing the relationship between Mo addition amount (wt%) and perpendicular anisotropy magnetic field (0e). Figure 7 shows the relationship between perpendicular anisotropy magnetic field Hk and initial magnetic permeability μi of the horizontally magnetized film layer in a magnetic disk. FIG. 8 is a reproduction output characteristic diagram of the magnetic recording medium according to the present invention. DESCRIPTION OF SYMBOLS 1...Nonmagnetic substrate, 2...Horizontal magnetization film layer, 3...Vertical magnetization film layer.
Claims (1)
化膜層と垂直磁化膜層とを順次積層して設けた磁
気記録媒体において、前記水平磁化膜層における
Mo添加量を0wt％より大きく4wt％より小さい値
としたことを特徴とする磁気記録媒体。1. In a magnetic recording medium in which a Mo-added Ni-Fe horizontal magnetic film layer and a perpendicular magnetic film layer are sequentially laminated on the surface of a non-magnetic substrate,
A magnetic recording medium characterized in that the amount of Mo added is greater than 0wt% and less than 4wt%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25019284A JPS61129729A (en) | 1984-11-26 | 1984-11-26 | Magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25019284A JPS61129729A (en) | 1984-11-26 | 1984-11-26 | Magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61129729A JPS61129729A (en) | 1986-06-17 |
| JPH0470693B2 true JPH0470693B2 (en) | 1992-11-11 |
Family
ID=17204181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25019284A Granted JPS61129729A (en) | 1984-11-26 | 1984-11-26 | Magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61129729A (en) |
-
1984
- 1984-11-26 JP JP25019284A patent/JPS61129729A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61129729A (en) | 1986-06-17 |
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