JPS61129336U - - Google Patents
Info
- Publication number
- JPS61129336U JPS61129336U JP1379085U JP1379085U JPS61129336U JP S61129336 U JPS61129336 U JP S61129336U JP 1379085 U JP1379085 U JP 1379085U JP 1379085 U JP1379085 U JP 1379085U JP S61129336 U JPS61129336 U JP S61129336U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- semiconductor
- semiconductor wafer
- element regions
- dry etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000001312 dry etching Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1379085U JPS61129336U (OSRAM) | 1985-02-01 | 1985-02-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1379085U JPS61129336U (OSRAM) | 1985-02-01 | 1985-02-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61129336U true JPS61129336U (OSRAM) | 1986-08-13 |
Family
ID=30498120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1379085U Pending JPS61129336U (OSRAM) | 1985-02-01 | 1985-02-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61129336U (OSRAM) |
-
1985
- 1985-02-01 JP JP1379085U patent/JPS61129336U/ja active Pending
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