JPS61127625U - - Google Patents
Info
- Publication number
- JPS61127625U JPS61127625U JP1170485U JP1170485U JPS61127625U JP S61127625 U JPS61127625 U JP S61127625U JP 1170485 U JP1170485 U JP 1170485U JP 1170485 U JP1170485 U JP 1170485U JP S61127625 U JPS61127625 U JP S61127625U
- Authority
- JP
- Japan
- Prior art keywords
- electrode pattern
- sandwiched
- lower electrode
- subdivided
- upper electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 239000003989 dielectric material Substances 0.000 claims 1
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Description
第１図ａ，ｂはこの考案の一実施例による可変
キヤパシタ素子を示す断面側面図、及び上視図、
第２図ａ，ｂは従来の薄膜キヤパシタ素子を示す
断面側面図及び、上視図である。
１は上部電極、２は下部電極、３は誘電体、４
は基板、５はストリツプ線路である。なお、図中
同一あるいは相当部分には同一符号を付して示し
てある。
FIGS. 1a and 1b are a cross-sectional side view and a top view showing a variable capacitor element according to an embodiment of the invention,
FIGS. 2a and 2b are a cross-sectional side view and a top view showing a conventional thin film capacitor element. 1 is the upper electrode, 2 is the lower electrode, 3 is the dielectric, 4
5 is a substrate, and 5 is a strip line. It should be noted that the same or corresponding parts in the drawings are designated by the same reference numerals.
Claims (1)
ーンと、上記の上部と下部の電極パターンにはさ
まれた誘電体とを備え、マイクロ波集積回路の基
板上に実装し、上部と下部の電極パターンにはさ
まれた誘電体の容量を、細分化した上部電極パタ
ーンの面積により、任意に実現できることを特徴
とする薄膜キヤパシタ素子。 It is equipped with a subdivided upper electrode pattern, a lower electrode pattern, and a dielectric sandwiched between the upper and lower electrode patterns, and is mounted on a substrate of a microwave integrated circuit. A thin film capacitor element characterized in that the capacitance of the sandwiched dielectric material can be arbitrarily realized by the area of the subdivided upper electrode pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1170485U JPS61127625U (en) | 1985-01-30 | 1985-01-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1170485U JPS61127625U (en) | 1985-01-30 | 1985-01-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61127625U true JPS61127625U (en) | 1986-08-11 |
Family
ID=30494070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1170485U Pending JPS61127625U (en) | 1985-01-30 | 1985-01-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61127625U (en) |
-
1985
- 1985-01-30 JP JP1170485U patent/JPS61127625U/ja active Pending