JPS61124588A - Spray type etching device - Google Patents

Abstract

PURPOSE:To equalize the etching depth of a work piece, and to improve the roughness of an etching surface by enlarging a diffusion angle from plural diffusion nozzles, and forming an atmosphere in which a jetted etching liquid interferes with each other. CONSTITUTION:An etching liquid 10 which has been transferred under pressure from a pump 11 passes through a pressure transfer pipe 12, and goes into plural diffusion nozzles. A spray of a state diffused to a diffusion angle forms an atmospheric range of a stabilized and equalized state, in the center of a work 17 by an interference of diffusion nozzles 13 which have been opposed to each other adjacently. According to this mechanism, the contact way of the etching liquid becomes uniform and the etching working accuracy is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a spray etching apparatus for etching a workpiece using an etching liquid diffused through a nozzle in wet etching.

Structure of the conventional example and its problems As shown in FIG. 1, the conventional spray type etching apparatus has a specific structure, as shown in FIG. The workpiece 6 to be etched was placed at the center of the nozzle 4, and the workpiece 6 was constructed of a casing 7 containing all of the workpieces.

In such a configuration, the etching liquid 8 injected from the diffusion nozzle 4 directly hits the workpiece 6 and
This method has the problem that the first etching depth becomes uneven and the second etching surface roughness worsens because some parts are directly etched and others are indirectly etched.

OBJECTS OF THE INVENTION The present invention solves the above-mentioned conventional drawbacks by changing the diffusion angle of the diffusion nozzle so that the etching liquid hits the workpiece uniformly.

Structure of the Invention The present invention provides a stable etching method in which a plurality of nozzles are provided, and each nozzle is provided with a predetermined gap so that the etching liquid diffused around the workpiece interferes with each other and creates a stable and constant atmosphere. This improves the depth and roughness of the etched surface, which is extremely advantageous in terms of notching accuracy.

DESCRIPTION OF THE EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. 2 and 3. In the figure, 9 is a tank for storing the etching liquid 10, and 11 is a diffusion nozzle 13 through a pressure pipe 12.
A pump pumps the etching liquid 10, 14 is a workpiece set at the center of the diffusion nozzle 13, and 15 is a housing containing the above components.

Next, the operation will be explained. The etching liquid 10 is pumped from the pump 11 through the pressure pipe 12 and then to the diffusion nozzle 13.
An atmosphere range 1 in which the spray state 15 diffused into the ore from
By forming 6 at the center of the workpiece, etching accuracy can be improved.

Effects of the Invention As described above, the present invention increases the etching depth of a workpiece by increasing the diffusion angle from two or more diffusion nozzles and forming a stable and uniform atmosphere where the etching liquid is reflected and interferes with each other. Since it is possible to make the etching surface uniform and improve the roughness of the etched surface, it is easy to improve and stabilize the etching processing accuracy, which is extremely advantageous in the processing of parts.

[Brief explanation of drawings]

FIG. 1 is a sectional view of a conventional spray etching apparatus, and FIG. 2 is a sectional view of a spray etching apparatus according to an embodiment of the present invention. 4.13...Diffusion nozzle, 8@16...
・Sprayed etching liquid, 6.14...work. Name of agent: Patent attorney Toshio Nakao and one other IE
Figure I Figure 2

Claims (1)

[Claims] (1) Consists of a pump that pumps the etching solution, and a number of nozzles that diffuse the etching solution pumped by the pump and inject it onto the workpiece, and the nozzles allow the etching solution spread around the workpiece to interfere with each other. Spray etching devices are installed with a predetermined gap between each other to create a stable and constant atmosphere.