JPS61122434A - 清浄乾燥空間に製品を保管するための装置 - Google Patents

清浄乾燥空間に製品を保管するための装置

Info

Publication number
JPS61122434A
JPS61122434A JP24248184A JP24248184A JPS61122434A JP S61122434 A JPS61122434 A JP S61122434A JP 24248184 A JP24248184 A JP 24248184A JP 24248184 A JP24248184 A JP 24248184A JP S61122434 A JPS61122434 A JP S61122434A
Authority
JP
Japan
Prior art keywords
air
dry
dehumidifier
clean
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24248184A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454851B2 (enExample
Inventor
Isao Otsuka
大塚　勇夫
Kameo Hosoi
細井　亀夫
Yoshito Shibata
義人 柴田
Masayuki Kimijima
正行 君嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP24248184A priority Critical patent/JPS61122434A/ja
Publication of JPS61122434A publication Critical patent/JPS61122434A/ja
Publication of JPH0454851B2 publication Critical patent/JPH0454851B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Other Air-Conditioning Systems (AREA)
  • Ventilation (AREA)
JP24248184A 1984-11-19 1984-11-19 清浄乾燥空間に製品を保管するための装置 Granted JPS61122434A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24248184A JPS61122434A (ja) 1984-11-19 1984-11-19 清浄乾燥空間に製品を保管するための装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24248184A JPS61122434A (ja) 1984-11-19 1984-11-19 清浄乾燥空間に製品を保管するための装置

Publications (2)

Publication Number Publication Date
JPS61122434A true JPS61122434A (ja) 1986-06-10
JPH0454851B2 JPH0454851B2 (enExample) 1992-09-01

Family

ID=17089725

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24248184A Granted JPS61122434A (ja) 1984-11-19 1984-11-19 清浄乾燥空間に製品を保管するための装置

Country Status (1)

Country Link
JP (1) JPS61122434A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014236081A (ja) * 2013-05-31 2014-12-15 東京エレクトロン株式会社 液処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014236081A (ja) * 2013-05-31 2014-12-15 東京エレクトロン株式会社 液処理装置

Also Published As

Publication number Publication date
JPH0454851B2 (enExample) 1992-09-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees