JPS61119671A - 真空蒸着装置の金属付着量検出方法 - Google Patents
真空蒸着装置の金属付着量検出方法Info
- Publication number
- JPS61119671A JPS61119671A JP24043184A JP24043184A JPS61119671A JP S61119671 A JPS61119671 A JP S61119671A JP 24043184 A JP24043184 A JP 24043184A JP 24043184 A JP24043184 A JP 24043184A JP S61119671 A JPS61119671 A JP S61119671A
- Authority
- JP
- Japan
- Prior art keywords
- strip
- metal
- vapor deposition
- amount
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007738 vacuum evaporation Methods 0.000 title claims description 5
- 238000001514 detection method Methods 0.000 title description 4
- 239000002184 metal Substances 0.000 claims abstract description 27
- 238000007740 vapor deposition Methods 0.000 claims abstract description 10
- 238000001704 evaporation Methods 0.000 claims abstract description 6
- 230000008020 evaporation Effects 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000005484 gravity Effects 0.000 abstract 1
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 235000012149 noodles Nutrition 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24043184A JPS61119671A (ja) | 1984-11-16 | 1984-11-16 | 真空蒸着装置の金属付着量検出方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24043184A JPS61119671A (ja) | 1984-11-16 | 1984-11-16 | 真空蒸着装置の金属付着量検出方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61119671A true JPS61119671A (ja) | 1986-06-06 |
| JPH0526866B2 JPH0526866B2 (https=) | 1993-04-19 |
Family
ID=17059384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24043184A Granted JPS61119671A (ja) | 1984-11-16 | 1984-11-16 | 真空蒸着装置の金属付着量検出方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61119671A (https=) |
-
1984
- 1984-11-16 JP JP24043184A patent/JPS61119671A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526866B2 (https=) | 1993-04-19 |
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