JPS6111714A - 顕微鏡の自動焦点調整装置 - Google Patents

顕微鏡の自動焦点調整装置

Info

Publication number
JPS6111714A
JPS6111714A JP13135984A JP13135984A JPS6111714A JP S6111714 A JPS6111714 A JP S6111714A JP 13135984 A JP13135984 A JP 13135984A JP 13135984 A JP13135984 A JP 13135984A JP S6111714 A JPS6111714 A JP S6111714A
Authority
JP
Japan
Prior art keywords
video signal
optical system
slice level
section
bits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13135984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0462046B2 (enrdf_load_stackoverflow
Inventor
Keinosuke Kanejima
敬之介 金島
Hiroshi Yasumoto
博 安本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP13135984A priority Critical patent/JPS6111714A/ja
Publication of JPS6111714A publication Critical patent/JPS6111714A/ja
Publication of JPH0462046B2 publication Critical patent/JPH0462046B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/244—Devices for focusing using image analysis techniques

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Automatic Focus Adjustment (AREA)
JP13135984A 1984-06-26 1984-06-26 顕微鏡の自動焦点調整装置 Granted JPS6111714A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13135984A JPS6111714A (ja) 1984-06-26 1984-06-26 顕微鏡の自動焦点調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13135984A JPS6111714A (ja) 1984-06-26 1984-06-26 顕微鏡の自動焦点調整装置

Publications (2)

Publication Number Publication Date
JPS6111714A true JPS6111714A (ja) 1986-01-20
JPH0462046B2 JPH0462046B2 (enrdf_load_stackoverflow) 1992-10-05

Family

ID=15056079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13135984A Granted JPS6111714A (ja) 1984-06-26 1984-06-26 顕微鏡の自動焦点調整装置

Country Status (1)

Country Link
JP (1) JPS6111714A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5969273A (en) * 1998-02-12 1999-10-19 International Business Machines Corporation Method and apparatus for critical dimension and tool resolution determination using edge width
WO2003077008A3 (en) * 2002-03-13 2003-12-18 Yeda Res & Dev Auto-focusing method and device
JP2005202087A (ja) * 2004-01-15 2005-07-28 Olympus Corp 顕微鏡装置、顕微鏡装置の制御方法、及びプログラム
JP2007140087A (ja) * 2005-11-18 2007-06-07 Hitachi Kokusai Electric Inc 合焦点方法及び合焦点装置並びにそれを使った測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137784A (en) * 1979-04-16 1980-10-27 Omron Tateisi Electronics Co Focus adjustment system in image pickup device using image sensor
JPS599613A (ja) * 1982-07-08 1984-01-19 Mitsubishi Rayon Co Ltd 自動焦点調節方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137784A (en) * 1979-04-16 1980-10-27 Omron Tateisi Electronics Co Focus adjustment system in image pickup device using image sensor
JPS599613A (ja) * 1982-07-08 1984-01-19 Mitsubishi Rayon Co Ltd 自動焦点調節方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5969273A (en) * 1998-02-12 1999-10-19 International Business Machines Corporation Method and apparatus for critical dimension and tool resolution determination using edge width
WO2003077008A3 (en) * 2002-03-13 2003-12-18 Yeda Res & Dev Auto-focusing method and device
US7109459B2 (en) 2002-03-13 2006-09-19 Yeda Research And Development Company Ltd. Auto-focusing method and device for use with optical microscopy
JP2005202087A (ja) * 2004-01-15 2005-07-28 Olympus Corp 顕微鏡装置、顕微鏡装置の制御方法、及びプログラム
JP2007140087A (ja) * 2005-11-18 2007-06-07 Hitachi Kokusai Electric Inc 合焦点方法及び合焦点装置並びにそれを使った測定装置

Also Published As

Publication number Publication date
JPH0462046B2 (enrdf_load_stackoverflow) 1992-10-05

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