JPS6111630Y2 - - Google Patents
Info
- Publication number
- JPS6111630Y2 JPS6111630Y2 JP4978380U JP4978380U JPS6111630Y2 JP S6111630 Y2 JPS6111630 Y2 JP S6111630Y2 JP 4978380 U JP4978380 U JP 4978380U JP 4978380 U JP4978380 U JP 4978380U JP S6111630 Y2 JPS6111630 Y2 JP S6111630Y2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust system
- gas
- sealed chamber
- test
- helium gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 47
- 239000001307 helium Substances 0.000 claims description 20
- 229910052734 helium Inorganic materials 0.000 claims description 20
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 20
- 238000001816 cooling Methods 0.000 claims description 15
- 238000007689 inspection Methods 0.000 claims description 10
- 239000003507 refrigerant Substances 0.000 claims description 7
- 238000004891 communication Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 description 7
- 239000000428 dust Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000005494 condensation Effects 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000007774 longterm Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4978380U JPS6111630Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-04-10 | 1980-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4978380U JPS6111630Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-04-10 | 1980-04-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56149936U JPS56149936U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-11-11 |
| JPS6111630Y2 true JPS6111630Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-04-12 |
Family
ID=29644747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4978380U Expired JPS6111630Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-04-10 | 1980-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111630Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017022349A1 (ja) * | 2015-08-03 | 2017-02-09 | 株式会社ジェイ・イー・ティ | センサユニット及び気密性検査装置 |
-
1980
- 1980-04-10 JP JP4978380U patent/JPS6111630Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017022349A1 (ja) * | 2015-08-03 | 2017-02-09 | 株式会社ジェイ・イー・ティ | センサユニット及び気密性検査装置 |
| US10514315B2 (en) | 2015-08-03 | 2019-12-24 | J.E.T. Co., Ltd. | Sensor unit and airtightness inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56149936U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-11-11 |