JPS6111250A - 透明導電膜の形成方法 - Google Patents
透明導電膜の形成方法Info
- Publication number
- JPS6111250A JPS6111250A JP59132420A JP13242084A JPS6111250A JP S6111250 A JPS6111250 A JP S6111250A JP 59132420 A JP59132420 A JP 59132420A JP 13242084 A JP13242084 A JP 13242084A JP S6111250 A JPS6111250 A JP S6111250A
- Authority
- JP
- Japan
- Prior art keywords
- transparent conductive
- conductive film
- glass substrate
- fine particles
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 38
- 239000000758 substrate Substances 0.000 claims description 74
- 239000011521 glass Substances 0.000 claims description 68
- 239000010419 fine particle Substances 0.000 claims description 37
- 239000012159 carrier gas Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 4
- 230000005684 electric field Effects 0.000 claims description 2
- 230000005611 electricity Effects 0.000 claims 1
- 239000000243 solution Substances 0.000 description 22
- 239000002245 particle Substances 0.000 description 10
- 150000002500 ions Chemical class 0.000 description 9
- 239000003513 alkali Substances 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 238000000889 atomisation Methods 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000007654 immersion Methods 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- PSCMQHVBLHHWTO-UHFFFAOYSA-K indium(iii) chloride Chemical compound Cl[In](Cl)Cl PSCMQHVBLHHWTO-UHFFFAOYSA-K 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000010425 asbestos Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 150000002472 indium compounds Chemical class 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- -1 oxygen ions Chemical class 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910052895 riebeckite Inorganic materials 0.000 description 1
- HUAUNKAZQWMVFY-UHFFFAOYSA-M sodium;oxocalcium;hydroxide Chemical compound [OH-].[Na+].[Ca]=O HUAUNKAZQWMVFY-UHFFFAOYSA-M 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59132420A JPS6111250A (ja) | 1984-06-27 | 1984-06-27 | 透明導電膜の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59132420A JPS6111250A (ja) | 1984-06-27 | 1984-06-27 | 透明導電膜の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6111250A true JPS6111250A (ja) | 1986-01-18 |
| JPH0513097B2 JPH0513097B2 (enrdf_load_stackoverflow) | 1993-02-19 |
Family
ID=15080957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59132420A Granted JPS6111250A (ja) | 1984-06-27 | 1984-06-27 | 透明導電膜の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6111250A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11181336A (ja) * | 1997-09-30 | 1999-07-06 | Sumitomo Metal Mining Co Ltd | 選択透過膜用塗布液、選択透過膜および選択透過多層膜 |
| JP2000096034A (ja) * | 1998-09-22 | 2000-04-04 | Sumitomo Metal Mining Co Ltd | 日射遮蔽材料、日射遮蔽膜用塗布液、及び、日射遮蔽膜 |
| JP2000169765A (ja) * | 1998-12-10 | 2000-06-20 | Sumitomo Metal Mining Co Ltd | 日射遮蔽膜用塗布液及びこれを用いた日射遮蔽膜 |
| JP2012513357A (ja) * | 2008-12-22 | 2012-06-14 | ベネク・オサケユキテュア | ガラスをコーティングする方法および装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4997011A (enrdf_load_stackoverflow) * | 1972-10-16 | 1974-09-13 | ||
| JPS5474819A (en) * | 1977-11-26 | 1979-06-15 | Nissho Kk | Method of coloring glass surface |
-
1984
- 1984-06-27 JP JP59132420A patent/JPS6111250A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4997011A (enrdf_load_stackoverflow) * | 1972-10-16 | 1974-09-13 | ||
| JPS5474819A (en) * | 1977-11-26 | 1979-06-15 | Nissho Kk | Method of coloring glass surface |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11181336A (ja) * | 1997-09-30 | 1999-07-06 | Sumitomo Metal Mining Co Ltd | 選択透過膜用塗布液、選択透過膜および選択透過多層膜 |
| JP2000096034A (ja) * | 1998-09-22 | 2000-04-04 | Sumitomo Metal Mining Co Ltd | 日射遮蔽材料、日射遮蔽膜用塗布液、及び、日射遮蔽膜 |
| JP2000169765A (ja) * | 1998-12-10 | 2000-06-20 | Sumitomo Metal Mining Co Ltd | 日射遮蔽膜用塗布液及びこれを用いた日射遮蔽膜 |
| JP2012513357A (ja) * | 2008-12-22 | 2012-06-14 | ベネク・オサケユキテュア | ガラスをコーティングする方法および装置 |
| US8865265B2 (en) | 2008-12-22 | 2014-10-21 | Beneq Oy | Process and apparatus for coating glass |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0513097B2 (enrdf_load_stackoverflow) | 1993-02-19 |
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