JPS6110974B2 - - Google Patents

Info

Publication number
JPS6110974B2
JPS6110974B2 JP16162578A JP16162578A JPS6110974B2 JP S6110974 B2 JPS6110974 B2 JP S6110974B2 JP 16162578 A JP16162578 A JP 16162578A JP 16162578 A JP16162578 A JP 16162578A JP S6110974 B2 JPS6110974 B2 JP S6110974B2
Authority
JP
Japan
Prior art keywords
resist
electron beam
alignment marks
forming
mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16162578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5586118A (en
Inventor
Ryuichi Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16162578A priority Critical patent/JPS5586118A/ja
Publication of JPS5586118A publication Critical patent/JPS5586118A/ja
Publication of JPS6110974B2 publication Critical patent/JPS6110974B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP16162578A 1978-12-23 1978-12-23 Alignment mark formation Granted JPS5586118A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16162578A JPS5586118A (en) 1978-12-23 1978-12-23 Alignment mark formation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16162578A JPS5586118A (en) 1978-12-23 1978-12-23 Alignment mark formation

Publications (2)

Publication Number Publication Date
JPS5586118A JPS5586118A (en) 1980-06-28
JPS6110974B2 true JPS6110974B2 (OSRAM) 1986-04-01

Family

ID=15738730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16162578A Granted JPS5586118A (en) 1978-12-23 1978-12-23 Alignment mark formation

Country Status (1)

Country Link
JP (1) JPS5586118A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100540644B1 (ko) * 1998-02-19 2006-02-28 삼성전자주식회사 마이크로 엑츄에이터 제조방법

Also Published As

Publication number Publication date
JPS5586118A (en) 1980-06-28

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