JPS61107774A - 圧力感知装置及びその製作方法 - Google Patents

圧力感知装置及びその製作方法

Info

Publication number
JPS61107774A
JPS61107774A JP60159289A JP15928985A JPS61107774A JP S61107774 A JPS61107774 A JP S61107774A JP 60159289 A JP60159289 A JP 60159289A JP 15928985 A JP15928985 A JP 15928985A JP S61107774 A JPS61107774 A JP S61107774A
Authority
JP
Japan
Prior art keywords
resistor
terminal
region
pressure sensing
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60159289A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350424B2 (enrdf_load_stackoverflow
Inventor
ロバート　イー　ヒコツクス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Tucson Corp
Original Assignee
Burr Brown Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Burr Brown Corp filed Critical Burr Brown Corp
Publication of JPS61107774A publication Critical patent/JPS61107774A/ja
Publication of JPH0350424B2 publication Critical patent/JPH0350424B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP60159289A 1984-10-30 1985-07-18 圧力感知装置及びその製作方法 Granted JPS61107774A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US666372 1984-10-30
US06/666,372 US4672853A (en) 1984-10-30 1984-10-30 Apparatus and method for a pressure-sensitive device

Publications (2)

Publication Number Publication Date
JPS61107774A true JPS61107774A (ja) 1986-05-26
JPH0350424B2 JPH0350424B2 (enrdf_load_stackoverflow) 1991-08-01

Family

ID=24673910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60159289A Granted JPS61107774A (ja) 1984-10-30 1985-07-18 圧力感知装置及びその製作方法

Country Status (5)

Country Link
US (1) US4672853A (enrdf_load_stackoverflow)
JP (1) JPS61107774A (enrdf_load_stackoverflow)
DE (1) DE3538453A1 (enrdf_load_stackoverflow)
FR (1) FR2572525A1 (enrdf_load_stackoverflow)
GB (1) GB2166287B (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007116957A1 (ja) * 2006-04-07 2007-10-18 Hitachi Medical Corporation 超音波探触子及び超音波診断装置
JP2011220935A (ja) * 2010-04-13 2011-11-04 Yamatake Corp 圧力センサ

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4809536A (en) * 1986-11-06 1989-03-07 Sumitomo Electric Industries, Ltd. Method of adjusting bridge circuit of semiconductor pressure sensor
US4756193A (en) * 1987-09-11 1988-07-12 Delco Electronics Corporation Pressure sensor
DE3810456C2 (de) * 1988-03-26 1994-09-01 Hottinger Messtechnik Baldwin Verfahren zur Verringerung eines Fehlers eines Meßumformers und Einrichtung hierzu
US4945762A (en) * 1989-01-24 1990-08-07 Sensym, Inc. Silicon sensor with trimmable wheatstone bridge
DE3919059A1 (de) * 1989-06-10 1991-01-03 Bosch Gmbh Robert Drucksensor zum erfassen von druckschwankungen einer druckquelle
US5178016A (en) * 1989-11-15 1993-01-12 Sensym, Incorporated Silicon pressure sensor chip with a shear element on a sculptured diaphragm
CN102282866B (zh) * 2009-01-14 2015-12-09 惠普开发有限公司 声压换能器
US8764678B2 (en) * 2010-02-01 2014-07-01 University Of Limerick Pressure sensor with an interferometric sensor and an in-fiber bragg grating reference sensor
US9419971B2 (en) * 2014-07-08 2016-08-16 International Business Machines Corporation Securely unlocking a device using a combination of hold placement and gesture
US10337942B2 (en) * 2016-08-08 2019-07-02 Honeywell International Inc. Pressure sensor temperature coefficient offset adjustment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5245377A (en) * 1975-10-08 1977-04-09 Hitachi Ltd Silicon mechanical-electrical converter
JPS5451489A (en) * 1977-09-30 1979-04-23 Toshiba Corp Semiconductor pressure converter

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1178130A (en) * 1967-12-08 1970-01-21 Ferranti Ltd Improvements relating to Semiconductor Strain Transducers
GB1278210A (en) * 1970-03-14 1972-06-21 Ferranti Ltd Improvements relating to semiconductir strain transducers
BE793922A (fr) * 1972-01-12 1973-07-11 Philips Nv Dispositif de mesure de la pression de liquides ou de gaz
GB1362616A (en) * 1973-03-21 1974-08-07 Welwyn Electric Ltd Semiconductor strain measuring device
GB1472294A (en) * 1974-12-18 1977-05-04 Welwyn Electric Ltd Strain measuring device
DD133714A1 (de) * 1977-12-29 1979-01-17 Frank Loeffler Silizium-biegeplatte mit integrierten piezoresistiven halbleiter-dehnmesselementen
US4300395A (en) * 1978-11-08 1981-11-17 Tokyo Shibaura Denki Kabushiki Kaisha Semiconductor pressure detection device
US4320664A (en) * 1980-02-25 1982-03-23 Texas Instruments Incorporated Thermally compensated silicon pressure sensor
US4333349A (en) * 1980-10-06 1982-06-08 Kulite Semiconductor Products, Inc. Binary balancing apparatus for semiconductor transducer structures
DE3118306A1 (de) * 1981-05-08 1982-12-02 Siemens AG, 1000 Berlin und 8000 München Vorrichtung zur kompensation der temperaturdrift eines piezoresistiven halbleiter-drucksensors
GB2107876B (en) * 1981-10-01 1985-08-14 Itt Ind Ltd Temperature compensation of strain gauges
JPS5887880A (ja) * 1981-11-20 1983-05-25 Hitachi Ltd 半導体ダイアフラム形センサ
JPS5896202U (ja) * 1981-12-23 1983-06-30 株式会社石田衡器製作所 歪みゲ−ジの温度補償回路
CA1186163A (en) * 1982-01-04 1985-04-30 James B. Starr Semiconductor pressure transducer
JPS58140604A (ja) * 1982-02-17 1983-08-20 Hitachi Ltd 温度補償回路付き集積化センサ
US4462018A (en) * 1982-11-05 1984-07-24 Gulton Industries, Inc. Semiconductor strain gauge with integral compensation resistors
JPS59117271A (ja) * 1982-12-24 1984-07-06 Hitachi Ltd 圧力感知素子を有する半導体装置とその製造法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5245377A (en) * 1975-10-08 1977-04-09 Hitachi Ltd Silicon mechanical-electrical converter
JPS5451489A (en) * 1977-09-30 1979-04-23 Toshiba Corp Semiconductor pressure converter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007116957A1 (ja) * 2006-04-07 2007-10-18 Hitachi Medical Corporation 超音波探触子及び超音波診断装置
JP5188959B2 (ja) * 2006-04-07 2013-04-24 株式会社日立メディコ 超音波探触子及び超音波診断装置
JP2011220935A (ja) * 2010-04-13 2011-11-04 Yamatake Corp 圧力センサ

Also Published As

Publication number Publication date
US4672853A (en) 1987-06-16
JPH0350424B2 (enrdf_load_stackoverflow) 1991-08-01
FR2572525A1 (fr) 1986-05-02
DE3538453A1 (de) 1986-05-07
GB2166287A (en) 1986-04-30
GB2166287B (en) 1989-04-05
GB8519612D0 (en) 1985-09-11

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