JPS61105408A - 光学測定装置 - Google Patents
光学測定装置Info
- Publication number
- JPS61105408A JPS61105408A JP59228114A JP22811484A JPS61105408A JP S61105408 A JPS61105408 A JP S61105408A JP 59228114 A JP59228114 A JP 59228114A JP 22811484 A JP22811484 A JP 22811484A JP S61105408 A JPS61105408 A JP S61105408A
- Authority
- JP
- Japan
- Prior art keywords
- light
- measured
- objective lens
- measurement
- measurement light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02007—Two or more frequencies or sources used for interferometric measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
- G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
- G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59228114A JPS61105408A (ja) | 1984-10-30 | 1984-10-30 | 光学測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59228114A JPS61105408A (ja) | 1984-10-30 | 1984-10-30 | 光学測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61105408A true JPS61105408A (ja) | 1986-05-23 |
JPH0255722B2 JPH0255722B2 (zh) | 1990-11-28 |
Family
ID=16871418
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59228114A Granted JPS61105408A (ja) | 1984-10-30 | 1984-10-30 | 光学測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61105408A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63228003A (ja) * | 1987-03-02 | 1988-09-22 | Yokogawa Hewlett Packard Ltd | 干渉計 |
NL9202303A (nl) * | 1992-12-31 | 1994-07-18 | Univ Delft Tech | Zeeman-ellipsometer. |
US7962275B2 (en) | 2006-12-21 | 2011-06-14 | Toyota Jidosha Kabushiki Kaisha | Control device and control method for internal combustion engine |
-
1984
- 1984-10-30 JP JP59228114A patent/JPS61105408A/ja active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63228003A (ja) * | 1987-03-02 | 1988-09-22 | Yokogawa Hewlett Packard Ltd | 干渉計 |
NL9202303A (nl) * | 1992-12-31 | 1994-07-18 | Univ Delft Tech | Zeeman-ellipsometer. |
WO1994016310A1 (en) * | 1992-12-31 | 1994-07-21 | Technische Universiteit Delft | Zeeman ellipsometer |
US7962275B2 (en) | 2006-12-21 | 2011-06-14 | Toyota Jidosha Kabushiki Kaisha | Control device and control method for internal combustion engine |
Also Published As
Publication number | Publication date |
---|---|
JPH0255722B2 (zh) | 1990-11-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |