JPS61105408A - 光学測定装置 - Google Patents

光学測定装置

Info

Publication number
JPS61105408A
JPS61105408A JP59228114A JP22811484A JPS61105408A JP S61105408 A JPS61105408 A JP S61105408A JP 59228114 A JP59228114 A JP 59228114A JP 22811484 A JP22811484 A JP 22811484A JP S61105408 A JPS61105408 A JP S61105408A
Authority
JP
Japan
Prior art keywords
light
measured
objective lens
measurement
measurement light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59228114A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0255722B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Keiichi Yoshizumi
恵一 吉住
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59228114A priority Critical patent/JPS61105408A/ja
Publication of JPS61105408A publication Critical patent/JPS61105408A/ja
Publication of JPH0255722B2 publication Critical patent/JPH0255722B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G01B9/02003—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies using beat frequencies

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP59228114A 1984-10-30 1984-10-30 光学測定装置 Granted JPS61105408A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59228114A JPS61105408A (ja) 1984-10-30 1984-10-30 光学測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59228114A JPS61105408A (ja) 1984-10-30 1984-10-30 光学測定装置

Publications (2)

Publication Number Publication Date
JPS61105408A true JPS61105408A (ja) 1986-05-23
JPH0255722B2 JPH0255722B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-28

Family

ID=16871418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59228114A Granted JPS61105408A (ja) 1984-10-30 1984-10-30 光学測定装置

Country Status (1)

Country Link
JP (1) JPS61105408A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63228003A (ja) * 1987-03-02 1988-09-22 Yokogawa Hewlett Packard Ltd 干渉計
NL9202303A (nl) * 1992-12-31 1994-07-18 Univ Delft Tech Zeeman-ellipsometer.
US7962275B2 (en) 2006-12-21 2011-06-14 Toyota Jidosha Kabushiki Kaisha Control device and control method for internal combustion engine

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63228003A (ja) * 1987-03-02 1988-09-22 Yokogawa Hewlett Packard Ltd 干渉計
NL9202303A (nl) * 1992-12-31 1994-07-18 Univ Delft Tech Zeeman-ellipsometer.
WO1994016310A1 (en) * 1992-12-31 1994-07-21 Technische Universiteit Delft Zeeman ellipsometer
US7962275B2 (en) 2006-12-21 2011-06-14 Toyota Jidosha Kabushiki Kaisha Control device and control method for internal combustion engine

Also Published As

Publication number Publication date
JPH0255722B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-11-28

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term