JPS61104102U - - Google Patents

Info

Publication number
JPS61104102U
JPS61104102U JP18808984U JP18808984U JPS61104102U JP S61104102 U JPS61104102 U JP S61104102U JP 18808984 U JP18808984 U JP 18808984U JP 18808984 U JP18808984 U JP 18808984U JP S61104102 U JPS61104102 U JP S61104102U
Authority
JP
Japan
Prior art keywords
space
forming
ceiling surface
layer
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18808984U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18808984U priority Critical patent/JPS61104102U/ja
Publication of JPS61104102U publication Critical patent/JPS61104102U/ja
Pending legal-status Critical Current

Links

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  • Ventilation (AREA)

Description

【図面の簡単な説明】
第1図は、本考案の垂直層流式クリーンルーム
の略断面図である。 1……天井面、2……天井裏空間、3……HE
PAフイルター、4……プレナムチヤンバー、5
……清浄空間プレナムチヤンバー、6……多孔板
、7……スラブ、8……クリーンルーム空間、9
……盲板、10……床面、11……多孔板、12
……吸引チヤンバー、13……スラブ、14……
ダクト、15……循環送風機。

Claims (1)

    【実用新案登録請求の範囲】
  1. 垂直層流式クリーンルームのルーム平面積を包
    含する天井面1の上方に天井裏空間2を形成し、
    この天井裏空間2をHEPAフイルターの層3に
    よつて上部プレナム空間4と清浄空気プレナム空
    間5とに分割し、天井面1の全面または一部の面
    を多孔板6で形成してなる垂直層流式クリーンル
    ームの天井部の構造。
JP18808984U 1984-12-13 1984-12-13 Pending JPS61104102U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18808984U JPS61104102U (ja) 1984-12-13 1984-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18808984U JPS61104102U (ja) 1984-12-13 1984-12-13

Publications (1)

Publication Number Publication Date
JPS61104102U true JPS61104102U (ja) 1986-07-02

Family

ID=30745560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18808984U Pending JPS61104102U (ja) 1984-12-13 1984-12-13

Country Status (1)

Country Link
JP (1) JPS61104102U (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58129125A (ja) * 1982-01-29 1983-08-02 Hitachi Ltd 清浄作業室
JPS59157432A (ja) * 1983-02-23 1984-09-06 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58129125A (ja) * 1982-01-29 1983-08-02 Hitachi Ltd 清浄作業室
JPS59157432A (ja) * 1983-02-23 1984-09-06 Hitachi Plant Eng & Constr Co Ltd 組替式局所環境制御室

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