JPH0445522U - - Google Patents

Info

Publication number
JPH0445522U
JPH0445522U JP8582990U JP8582990U JPH0445522U JP H0445522 U JPH0445522 U JP H0445522U JP 8582990 U JP8582990 U JP 8582990U JP 8582990 U JP8582990 U JP 8582990U JP H0445522 U JPH0445522 U JP H0445522U
Authority
JP
Japan
Prior art keywords
casing
electric motor
fan
filter unit
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8582990U
Other languages
English (en)
Other versions
JPH08969Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990085829U priority Critical patent/JPH08969Y2/ja
Publication of JPH0445522U publication Critical patent/JPH0445522U/ja
Application granted granted Critical
Publication of JPH08969Y2 publication Critical patent/JPH08969Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の実施例を示すクリーンルー
ム設備の垂直断面図、第２図は第１図の天井部の
一部を拡大して示す平面図、第３図は第１図のフ
アンフイルタユニツトの部分を拡大して示す正面
図、第４図は第３図のフアンフイルタユニツトの
側面図、第５図は縦ビームの部分を拡大して示す
横断面図、第６図は横ビームの部分を拡大して示
す横断面図である。 ４……フアンフイルタユニツト、２０……ケー
シング、２０ａ……上壁、２１……電動モータ、
２２……フアン、２３……空気吹出口、２４……
フイルタ、２７……バツフル板。

Claims (1)

    【実用新案登録請求の範囲】
  1. ケーシングの上壁上面に、電動モータと、この
    電動モータにより駆動されてケーシング内に空気
    を供給するフアンが設けられ、ケーシングの下部
    の空気吹出口に、フイルタが下から装着され、ケ
    ーシング内にバツフル板が設けられているフアン
    フイルタユニツト。
JP1990085829U 1990-08-13 1990-08-13 ファンフィルタユニット Expired - Fee Related JPH08969Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990085829U JPH08969Y2 (ja) 1990-08-13 1990-08-13 ファンフィルタユニット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990085829U JPH08969Y2 (ja) 1990-08-13 1990-08-13 ファンフィルタユニット

Publications (2)

Publication Number Publication Date
JPH0445522U true JPH0445522U (ja) 1992-04-17
JPH08969Y2 JPH08969Y2 (ja) 1996-01-17

Family

ID=31817209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990085829U Expired - Fee Related JPH08969Y2 (ja) 1990-08-13 1990-08-13 ファンフィルタユニット

Country Status (1)

Country Link
JP (1) JPH08969Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010279888A (ja) * 2009-06-04 2010-12-16 Hitachi Industrial Equipment Systems Co Ltd ファンフィルタユニット

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4485756B2 (ja) * 2003-04-21 2010-06-23 株式会社東洋精米機製作所 無洗米の製造方法及びその装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0275115U (ja) * 1988-11-21 1990-06-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0275115U (ja) * 1988-11-21 1990-06-08

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010279888A (ja) * 2009-06-04 2010-12-16 Hitachi Industrial Equipment Systems Co Ltd ファンフィルタユニット

Also Published As

Publication number Publication date
JPH08969Y2 (ja) 1996-01-17

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees