JPS61100138U - - Google Patents

Info

Publication number
JPS61100138U
JPS61100138U JP18527084U JP18527084U JPS61100138U JP S61100138 U JPS61100138 U JP S61100138U JP 18527084 U JP18527084 U JP 18527084U JP 18527084 U JP18527084 U JP 18527084U JP S61100138 U JPS61100138 U JP S61100138U
Authority
JP
Japan
Prior art keywords
wafer
prober
protrusions
stage
recess
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18527084U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331077Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984185270U priority Critical patent/JPH0331077Y2/ja
Publication of JPS61100138U publication Critical patent/JPS61100138U/ja
Application granted granted Critical
Publication of JPH0331077Y2 publication Critical patent/JPH0331077Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1984185270U 1984-12-05 1984-12-05 Expired JPH0331077Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984185270U JPH0331077Y2 (OSRAM) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984185270U JPH0331077Y2 (OSRAM) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS61100138U true JPS61100138U (OSRAM) 1986-06-26
JPH0331077Y2 JPH0331077Y2 (OSRAM) 1991-07-01

Family

ID=30742748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984185270U Expired JPH0331077Y2 (OSRAM) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH0331077Y2 (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010027864A (ja) * 2008-07-18 2010-02-04 Sumco Corp 半導体デバイスの製造方法
JP2015049137A (ja) * 2013-09-02 2015-03-16 三菱電機株式会社 半導体チップ試験装置及び方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4123701Y1 (OSRAM) * 1966-02-22 1966-12-02
JPS546867U (OSRAM) * 1977-06-16 1979-01-17
JPS56147076A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Characteristic testing electrode
JPS6080772A (ja) * 1983-10-08 1985-05-08 Rohm Co Ltd プロ−ブニ−ドル

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4123701Y1 (OSRAM) * 1966-02-22 1966-12-02
JPS546867U (OSRAM) * 1977-06-16 1979-01-17
JPS56147076A (en) * 1980-04-18 1981-11-14 Hitachi Ltd Characteristic testing electrode
JPS6080772A (ja) * 1983-10-08 1985-05-08 Rohm Co Ltd プロ−ブニ−ドル

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010027864A (ja) * 2008-07-18 2010-02-04 Sumco Corp 半導体デバイスの製造方法
JP2015049137A (ja) * 2013-09-02 2015-03-16 三菱電機株式会社 半導体チップ試験装置及び方法

Also Published As

Publication number Publication date
JPH0331077Y2 (OSRAM) 1991-07-01

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