JPS6093311A - 容量式変位測定機 - Google Patents

容量式変位測定機

Info

Publication number
JPS6093311A
JPS6093311A JP58201673A JP20167383A JPS6093311A JP S6093311 A JPS6093311 A JP S6093311A JP 58201673 A JP58201673 A JP 58201673A JP 20167383 A JP20167383 A JP 20167383A JP S6093311 A JPS6093311 A JP S6093311A
Authority
JP
Japan
Prior art keywords
displacement measuring
electrodes
signal
square wave
multiplexer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58201673A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0374766B2 (US06650917-20031118-M00005.png
Inventor
Suteiibun Etsukaaru Jiyosefu
ジヨセフ　ステイーブン　エツカール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP58201673A priority Critical patent/JPS6093311A/ja
Priority to DE19843438234 priority patent/DE3438234A1/de
Priority to US06/665,534 priority patent/US4743838A/en
Publication of JPS6093311A publication Critical patent/JPS6093311A/ja
Publication of JPH0374766B2 publication Critical patent/JPH0374766B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G01D5/2415—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap adapted for encoders

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP58201673A 1983-10-27 1983-10-27 容量式変位測定機 Granted JPS6093311A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP58201673A JPS6093311A (ja) 1983-10-27 1983-10-27 容量式変位測定機
DE19843438234 DE3438234A1 (de) 1983-10-27 1984-10-18 Kapazitives verschiebungs-messinstrument
US06/665,534 US4743838A (en) 1983-10-27 1984-10-26 Capacitance displacement measuring instrument having wave shaped subelectrodes and multiplexer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58201673A JPS6093311A (ja) 1983-10-27 1983-10-27 容量式変位測定機

Publications (2)

Publication Number Publication Date
JPS6093311A true JPS6093311A (ja) 1985-05-25
JPH0374766B2 JPH0374766B2 (US06650917-20031118-M00005.png) 1991-11-28

Family

ID=16444999

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58201673A Granted JPS6093311A (ja) 1983-10-27 1983-10-27 容量式変位測定機

Country Status (3)

Country Link
US (1) US4743838A (US06650917-20031118-M00005.png)
JP (1) JPS6093311A (US06650917-20031118-M00005.png)
DE (1) DE3438234A1 (US06650917-20031118-M00005.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5229836A (en) * 1990-10-03 1993-07-20 Canon Kabushiki Kaisha Position detecting apparatus for a moving body
JP2008502051A (ja) * 2004-06-03 2008-01-24 シナプティックス インコーポレーテッド 変動幅の検知素子を有する、一層式容量性検知装置
JP2012068255A (ja) * 1999-04-19 2012-04-05 Netzer Precision Motion Sensors Ltd 容量性変位エンコーダ
JP2017072468A (ja) * 2015-10-07 2017-04-13 アルプス電気株式会社 入力装置

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4879508A (en) * 1986-04-04 1989-11-07 Mitutoyo Corporation Capacitance-type measuring device for absolute measurement of positions
CH666122A5 (fr) * 1986-04-10 1988-06-30 Hans Ulrich Meyer Capteur capacitif de position.
US4893071A (en) * 1988-05-24 1990-01-09 American Telephone And Telegraph Company, At&T Bell Laboratories Capacitive incremental position measurement and motion control
US5136250A (en) * 1989-04-28 1992-08-04 Seagate Technology, Inc. Capacitance height gauge
US5122755A (en) * 1990-05-11 1992-06-16 New Sd, Inc. Capacitive position detector
WO1992004669A1 (en) * 1990-09-06 1992-03-19 Drexelbrook Controls Inc. Improved imstrumentation system
DE4034991A1 (de) * 1990-11-03 1992-05-07 Valeo Borg Instr Verw Gmbh Messeinrichtung zum elektrischen erfassen eines stellwinkels
DE4118218A1 (de) * 1990-11-03 1992-12-10 Valeo Borg Instr Verw Gmbh Kapazitive messeinrichtung zum elektrischen erfassen eines stellwinkels, insbesondere einer drosselklappe
US5428355A (en) * 1992-03-23 1995-06-27 Hewlett-Packard Corporation Position encoder system
US5414420A (en) * 1992-03-23 1995-05-09 Hewlett-Packard Corporation Switch interconnect for position encoder system
US5537109A (en) * 1993-05-28 1996-07-16 General Scanning, Inc. Capacitive transducing with feedback
EP0836076B1 (fr) * 1996-10-11 2002-05-22 Brown & Sharpe Tesa S.A. Dispositif de mesure de dimension capacitif
DE19715078A1 (de) * 1997-04-11 1998-10-15 Univ Ilmenau Tech Verfahren zur kapazitiven Weg- und Winkelmessung
JP2010210351A (ja) * 2009-03-09 2010-09-24 Fanuc Ltd 励振位相検出方式静電容量型位置検出器
CN103591896B (zh) * 2013-11-29 2016-05-11 重庆理工大学 一种基于交变光场的时栅直线位移传感器
CN103822571B (zh) * 2014-03-19 2016-11-02 重庆理工大学 基于单排多层结构的电场式时栅直线位移传感器
CN103968750B (zh) * 2014-05-09 2017-01-18 重庆理工大学 一种电场式时栅角位移传感器
JP6862668B2 (ja) * 2016-03-25 2021-04-21 ヤマハ株式会社 基板及び位置検出装置
JP6823483B2 (ja) * 2017-02-02 2021-02-03 株式会社ミツトヨ 変位検出器
US20190360843A1 (en) * 2018-05-22 2019-11-28 Chad Unterschultz Capacitive Position Sensing
EP4356074A1 (de) * 2021-09-09 2024-04-24 Siemens Aktiengesellschaft Kapazitive ablesevorrichtung für ein zeigerinstrument

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3125716A (en) * 1964-03-17 Machlis
US3068457A (en) * 1957-11-01 1962-12-11 Telecomputing Corp Displacement measuring device
US3068467A (en) * 1958-12-12 1962-12-11 Motorola Inc Periphery plot converter
DE1423823B1 (de) * 1961-02-21 1971-06-03 Telecomputing Corp Kapazitiver messumformer
US3219920A (en) * 1961-04-05 1965-11-23 Whittaker Corp Transducer employing a guard ring between input and output means to reduce stray capacitances
US3938113A (en) * 1974-06-17 1976-02-10 International Business Machines Corporation Differential capacitive position encoder
US4092579A (en) * 1976-12-15 1978-05-30 Contraves Goerz Corporation Brushless printed circuit resolver
SE411392B (sv) * 1977-12-09 1979-12-17 Inst Mikrovagsteknik Vid Tekni Metanordning for kapacitiv bestemning av det inbordes leget hos tva relativt varandra rorliga delar
US4238781A (en) * 1979-02-09 1980-12-09 Westinghouse Electric Corp. Capacitive angular displacement transducer for remote meter reading
US4242666A (en) * 1979-05-23 1980-12-30 General Electric Company Range selectable contactless data acquisition system for rotating machinery
CH651136A5 (de) * 1980-11-21 1985-08-30 Hans Ulrich Meyer Kapazitives laengen- und winkelmessverfahren.
GB2097128B (en) * 1981-04-16 1984-12-12 Medwin Albert H Electrical vernier measuring apparatus
US4429307A (en) * 1982-01-29 1984-01-31 Dataproducts Corporation Capacitive transducer with continuous sinusoidal output
US4654581A (en) * 1983-10-12 1987-03-31 Hewlett-Packard Company Capacitive mask aligner

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5229836A (en) * 1990-10-03 1993-07-20 Canon Kabushiki Kaisha Position detecting apparatus for a moving body
JP2012068255A (ja) * 1999-04-19 2012-04-05 Netzer Precision Motion Sensors Ltd 容量性変位エンコーダ
JP2008502051A (ja) * 2004-06-03 2008-01-24 シナプティックス インコーポレーテッド 変動幅の検知素子を有する、一層式容量性検知装置
JP2017072468A (ja) * 2015-10-07 2017-04-13 アルプス電気株式会社 入力装置

Also Published As

Publication number Publication date
DE3438234A1 (de) 1985-05-09
US4743838A (en) 1988-05-10
DE3438234C2 (US06650917-20031118-M00005.png) 1992-07-09
JPH0374766B2 (US06650917-20031118-M00005.png) 1991-11-28

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