JPS6091540A - 透過電子顕微鏡における軸合せ方法 - Google Patents

透過電子顕微鏡における軸合せ方法

Info

Publication number
JPS6091540A
JPS6091540A JP58199356A JP19935683A JPS6091540A JP S6091540 A JPS6091540 A JP S6091540A JP 58199356 A JP58199356 A JP 58199356A JP 19935683 A JP19935683 A JP 19935683A JP S6091540 A JPS6091540 A JP S6091540A
Authority
JP
Japan
Prior art keywords
electron beam
deflection
image
electron microscope
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58199356A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0378738B2 (enrdf_load_stackoverflow
Inventor
Seiichi Suzuki
清一 鈴木
Katsushige Tsuno
勝重 津野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP58199356A priority Critical patent/JPS6091540A/ja
Publication of JPS6091540A publication Critical patent/JPS6091540A/ja
Publication of JPH0378738B2 publication Critical patent/JPH0378738B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP58199356A 1983-10-25 1983-10-25 透過電子顕微鏡における軸合せ方法 Granted JPS6091540A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58199356A JPS6091540A (ja) 1983-10-25 1983-10-25 透過電子顕微鏡における軸合せ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58199356A JPS6091540A (ja) 1983-10-25 1983-10-25 透過電子顕微鏡における軸合せ方法

Publications (2)

Publication Number Publication Date
JPS6091540A true JPS6091540A (ja) 1985-05-22
JPH0378738B2 JPH0378738B2 (enrdf_load_stackoverflow) 1991-12-16

Family

ID=16406395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58199356A Granted JPS6091540A (ja) 1983-10-25 1983-10-25 透過電子顕微鏡における軸合せ方法

Country Status (1)

Country Link
JP (1) JPS6091540A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63114035A (ja) * 1986-08-27 1988-05-18 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ ビ−ムの心合せ方法
JP2008100617A (ja) * 2006-10-19 2008-05-01 Piolax Inc ドアガーニッシュの取付構造

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3762982B2 (ja) * 2001-12-26 2006-04-05 独立行政法人物質・材料研究機構 透過電子顕微鏡の軸調整方法およびその装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5723455A (en) * 1980-07-17 1982-02-06 Akashi Seisakusho Co Ltd Electromagnetic lens current varing device for electron microscope and the like
JPS5767912A (en) * 1980-10-14 1982-04-24 Toshiba Corp Axis aligning method of electronic optical lens barrel
JPS5741780B2 (enrdf_load_stackoverflow) * 1975-01-27 1982-09-04

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5741780B2 (enrdf_load_stackoverflow) * 1975-01-27 1982-09-04
JPS5723455A (en) * 1980-07-17 1982-02-06 Akashi Seisakusho Co Ltd Electromagnetic lens current varing device for electron microscope and the like
JPS5767912A (en) * 1980-10-14 1982-04-24 Toshiba Corp Axis aligning method of electronic optical lens barrel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63114035A (ja) * 1986-08-27 1988-05-18 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ ビ−ムの心合せ方法
JP2008100617A (ja) * 2006-10-19 2008-05-01 Piolax Inc ドアガーニッシュの取付構造

Also Published As

Publication number Publication date
JPH0378738B2 (enrdf_load_stackoverflow) 1991-12-16

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