JPS6088247U - 圧力センサ - Google Patents

圧力センサ

Info

Publication number
JPS6088247U
JPS6088247U JP18123583U JP18123583U JPS6088247U JP S6088247 U JPS6088247 U JP S6088247U JP 18123583 U JP18123583 U JP 18123583U JP 18123583 U JP18123583 U JP 18123583U JP S6088247 U JPS6088247 U JP S6088247U
Authority
JP
Japan
Prior art keywords
comparison
diaphragm
measurement
capacitance electrode
span
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18123583U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0138509Y2 (enrdf_load_stackoverflow
Inventor
宣夫 宮地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP18123583U priority Critical patent/JPS6088247U/ja
Publication of JPS6088247U publication Critical patent/JPS6088247U/ja
Application granted granted Critical
Publication of JPH0138509Y2 publication Critical patent/JPH0138509Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP18123583U 1983-11-24 1983-11-24 圧力センサ Granted JPS6088247U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18123583U JPS6088247U (ja) 1983-11-24 1983-11-24 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18123583U JPS6088247U (ja) 1983-11-24 1983-11-24 圧力センサ

Publications (2)

Publication Number Publication Date
JPS6088247U true JPS6088247U (ja) 1985-06-17
JPH0138509Y2 JPH0138509Y2 (enrdf_load_stackoverflow) 1989-11-17

Family

ID=30392772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18123583U Granted JPS6088247U (ja) 1983-11-24 1983-11-24 圧力センサ

Country Status (1)

Country Link
JP (1) JPS6088247U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006071501A (ja) * 2004-09-02 2006-03-16 Canon Anelva Technix Corp 静電容量型圧力センサ
JP2013533974A (ja) * 2010-07-01 2013-08-29 エム ケー エス インストルメンツ インコーポレーテッド 静電容量センサの改善

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006071501A (ja) * 2004-09-02 2006-03-16 Canon Anelva Technix Corp 静電容量型圧力センサ
JP2013533974A (ja) * 2010-07-01 2013-08-29 エム ケー エス インストルメンツ インコーポレーテッド 静電容量センサの改善

Also Published As

Publication number Publication date
JPH0138509Y2 (enrdf_load_stackoverflow) 1989-11-17

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