JPS6078125A - 真空バネ - Google Patents

真空バネ

Info

Publication number
JPS6078125A
JPS6078125A JP18496983A JP18496983A JPS6078125A JP S6078125 A JPS6078125 A JP S6078125A JP 18496983 A JP18496983 A JP 18496983A JP 18496983 A JP18496983 A JP 18496983A JP S6078125 A JPS6078125 A JP S6078125A
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
movable member
fixed
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18496983A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6260568B2 (enExample
Inventor
Masao Akimoto
秋元　将男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP18496983A priority Critical patent/JPS6078125A/ja
Publication of JPS6078125A publication Critical patent/JPS6078125A/ja
Publication of JPS6260568B2 publication Critical patent/JPS6260568B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Fluid-Damping Devices (AREA)
  • Vibration Prevention Devices (AREA)
JP18496983A 1983-10-05 1983-10-05 真空バネ Granted JPS6078125A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18496983A JPS6078125A (ja) 1983-10-05 1983-10-05 真空バネ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18496983A JPS6078125A (ja) 1983-10-05 1983-10-05 真空バネ

Publications (2)

Publication Number Publication Date
JPS6078125A true JPS6078125A (ja) 1985-05-02
JPS6260568B2 JPS6260568B2 (enExample) 1987-12-17

Family

ID=16162517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18496983A Granted JPS6078125A (ja) 1983-10-05 1983-10-05 真空バネ

Country Status (1)

Country Link
JP (1) JPS6078125A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7466396B2 (en) 2005-10-13 2008-12-16 Nikon Corporation Lithography apparatus and method utilizing pendulum interferometer system
JP2010031950A (ja) * 2008-07-28 2010-02-12 Tokkyokiki Corp 除振装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01254575A (ja) * 1988-04-02 1989-10-11 Haisensu:Kk 混載輸送用パッケージ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7466396B2 (en) 2005-10-13 2008-12-16 Nikon Corporation Lithography apparatus and method utilizing pendulum interferometer system
JP2010031950A (ja) * 2008-07-28 2010-02-12 Tokkyokiki Corp 除振装置

Also Published As

Publication number Publication date
JPS6260568B2 (enExample) 1987-12-17

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