JPS6073232U - ウエハロ−デング装置 - Google Patents

ウエハロ−デング装置

Info

Publication number
JPS6073232U
JPS6073232U JP16426483U JP16426483U JPS6073232U JP S6073232 U JPS6073232 U JP S6073232U JP 16426483 U JP16426483 U JP 16426483U JP 16426483 U JP16426483 U JP 16426483U JP S6073232 U JPS6073232 U JP S6073232U
Authority
JP
Japan
Prior art keywords
wafer loading
wafer
arm
loading equipment
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16426483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH043496Y2 (cs
Inventor
修一 大橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16426483U priority Critical patent/JPS6073232U/ja
Publication of JPS6073232U publication Critical patent/JPS6073232U/ja
Application granted granted Critical
Publication of JPH043496Y2 publication Critical patent/JPH043496Y2/ja
Granted legal-status Critical Current

Links

JP16426483U 1983-10-24 1983-10-24 ウエハロ−デング装置 Granted JPS6073232U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16426483U JPS6073232U (ja) 1983-10-24 1983-10-24 ウエハロ−デング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16426483U JPS6073232U (ja) 1983-10-24 1983-10-24 ウエハロ−デング装置

Publications (2)

Publication Number Publication Date
JPS6073232U true JPS6073232U (ja) 1985-05-23
JPH043496Y2 JPH043496Y2 (cs) 1992-02-04

Family

ID=30360179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16426483U Granted JPS6073232U (ja) 1983-10-24 1983-10-24 ウエハロ−デング装置

Country Status (1)

Country Link
JP (1) JPS6073232U (cs)

Also Published As

Publication number Publication date
JPH043496Y2 (cs) 1992-02-04

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