JPS6071101A - 超高真空用アルミ系材料の加工法 - Google Patents
超高真空用アルミ系材料の加工法Info
- Publication number
- JPS6071101A JPS6071101A JP1877284A JP1877284A JPS6071101A JP S6071101 A JPS6071101 A JP S6071101A JP 1877284 A JP1877284 A JP 1877284A JP 1877284 A JP1877284 A JP 1877284A JP S6071101 A JPS6071101 A JP S6071101A
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- high vacuum
- gas
- container
- thin layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052782 aluminium Inorganic materials 0.000 title claims abstract description 23
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 239000000463 material Substances 0.000 title claims description 19
- 238000003672 processing method Methods 0.000 title description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910001882 dioxygen Inorganic materials 0.000 claims abstract description 9
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 7
- 239000011261 inert gas Substances 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 12
- 238000007664 blowing Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 abstract description 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract description 8
- 238000001816 cooling Methods 0.000 abstract description 6
- 238000003801 milling Methods 0.000 abstract description 5
- 229910052786 argon Inorganic materials 0.000 abstract description 4
- -1 sapphire Chemical compound 0.000 abstract description 2
- 229910052594 sapphire Inorganic materials 0.000 abstract description 2
- 239000010980 sapphire Substances 0.000 abstract description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 238000010891 electric arc Methods 0.000 abstract 1
- 238000003754 machining Methods 0.000 abstract 1
- 239000000203 mixture Substances 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000007921 spray Substances 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 13
- 239000003921 oil Substances 0.000 description 4
- 239000003082 abrasive agent Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 238000005422 blasting Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000010730 cutting oil Substances 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B1/00—Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Turning (AREA)
- Milling Processes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1877284A JPS6071101A (ja) | 1984-02-03 | 1984-02-03 | 超高真空用アルミ系材料の加工法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1877284A JPS6071101A (ja) | 1984-02-03 | 1984-02-03 | 超高真空用アルミ系材料の加工法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58083250A Division JPS59209727A (ja) | 1983-05-12 | 1983-05-12 | 超高真空用アルミ系材料の加工法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6071101A true JPS6071101A (ja) | 1985-04-23 |
| JPS6250253B2 JPS6250253B2 (cg-RX-API-DMAC7.html) | 1987-10-23 |
Family
ID=11980922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1877284A Granted JPS6071101A (ja) | 1984-02-03 | 1984-02-03 | 超高真空用アルミ系材料の加工法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6071101A (cg-RX-API-DMAC7.html) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63182351U (cg-RX-API-DMAC7.html) * | 1987-05-16 | 1988-11-24 | ||
| EP1593751A4 (en) * | 2003-01-14 | 2008-08-06 | Tokyo Electron Ltd | ELEMENT OF A PLASMA TREATMENT DEVICE, ELEMENT OF A TREATMENT DEVICE, PLASMA TREATMENT DEVICE, TREATMENT DEVICE AND METHOD OF PLASMA TREATMENT |
| WO2009094269A3 (en) * | 2008-01-24 | 2009-10-29 | Gm Global Technology Operations, Inc. | Machining of aluminum surfaces |
| CN103846640A (zh) * | 2012-12-07 | 2014-06-11 | 哈尔滨工业大学深圳研究生院 | 微小孔的等离子体放电加工装置及加工方法 |
| CN106694906A (zh) * | 2015-11-13 | 2017-05-24 | 首都航天机械公司 | 一种大直径薄壁叉形环加工方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5038882A (cg-RX-API-DMAC7.html) * | 1973-08-13 | 1975-04-10 | ||
| JPS5877712A (ja) * | 1981-11-04 | 1983-05-11 | 昭和アルミニウム株式会社 | 真空用アルミニウム製中空押出形材の製造法 |
-
1984
- 1984-02-03 JP JP1877284A patent/JPS6071101A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5038882A (cg-RX-API-DMAC7.html) * | 1973-08-13 | 1975-04-10 | ||
| JPS5877712A (ja) * | 1981-11-04 | 1983-05-11 | 昭和アルミニウム株式会社 | 真空用アルミニウム製中空押出形材の製造法 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63182351U (cg-RX-API-DMAC7.html) * | 1987-05-16 | 1988-11-24 | ||
| EP1593751A4 (en) * | 2003-01-14 | 2008-08-06 | Tokyo Electron Ltd | ELEMENT OF A PLASMA TREATMENT DEVICE, ELEMENT OF A TREATMENT DEVICE, PLASMA TREATMENT DEVICE, TREATMENT DEVICE AND METHOD OF PLASMA TREATMENT |
| WO2009094269A3 (en) * | 2008-01-24 | 2009-10-29 | Gm Global Technology Operations, Inc. | Machining of aluminum surfaces |
| CN103846640A (zh) * | 2012-12-07 | 2014-06-11 | 哈尔滨工业大学深圳研究生院 | 微小孔的等离子体放电加工装置及加工方法 |
| CN106694906A (zh) * | 2015-11-13 | 2017-05-24 | 首都航天机械公司 | 一种大直径薄壁叉形环加工方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6250253B2 (cg-RX-API-DMAC7.html) | 1987-10-23 |
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