JPS6250253B2 - - Google Patents

Info

Publication number
JPS6250253B2
JPS6250253B2 JP59018772A JP1877284A JPS6250253B2 JP S6250253 B2 JPS6250253 B2 JP S6250253B2 JP 59018772 A JP59018772 A JP 59018772A JP 1877284 A JP1877284 A JP 1877284A JP S6250253 B2 JPS6250253 B2 JP S6250253B2
Authority
JP
Japan
Prior art keywords
aluminum
container
cutting
gas
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59018772A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6071101A (ja
Inventor
Hajime Ishimaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP1877284A priority Critical patent/JPS6071101A/ja
Publication of JPS6071101A publication Critical patent/JPS6071101A/ja
Publication of JPS6250253B2 publication Critical patent/JPS6250253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B1/00—Methods for turning or working essentially requiring the use of turning-machines; Use of auxiliary equipment in connection with such methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Milling Processes (AREA)
  • Turning (AREA)
JP1877284A 1984-02-03 1984-02-03 超高真空用アルミ系材料の加工法 Granted JPS6071101A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1877284A JPS6071101A (ja) 1984-02-03 1984-02-03 超高真空用アルミ系材料の加工法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1877284A JPS6071101A (ja) 1984-02-03 1984-02-03 超高真空用アルミ系材料の加工法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58083250A Division JPS59209727A (ja) 1983-05-12 1983-05-12 超高真空用アルミ系材料の加工法

Publications (2)

Publication Number Publication Date
JPS6071101A JPS6071101A (ja) 1985-04-23
JPS6250253B2 true JPS6250253B2 (cg-RX-API-DMAC7.html) 1987-10-23

Family

ID=11980922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1877284A Granted JPS6071101A (ja) 1984-02-03 1984-02-03 超高真空用アルミ系材料の加工法

Country Status (1)

Country Link
JP (1) JPS6071101A (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0454358Y2 (cg-RX-API-DMAC7.html) * 1987-05-16 1992-12-21
JP2004273472A (ja) * 2003-01-14 2004-09-30 Tadahiro Omi プラズマ処理装置用の部材，処理装置用の部材，プラズマ処理装置，処理装置及びプラズマ処理方法
US8057133B2 (en) * 2008-01-24 2011-11-15 GM Global Technology Operations LLC Machining of aluminum surfaces
CN103846640B (zh) * 2012-12-07 2017-02-15 哈尔滨工业大学深圳研究生院 微小孔的等离子体放电加工装置及加工方法
CN106694906B (zh) * 2015-11-13 2018-11-02 首都航天机械公司 一种大直径薄壁叉形环加工方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5038882A (cg-RX-API-DMAC7.html) * 1973-08-13 1975-04-10
JPS5919769B2 (ja) * 1981-11-04 1984-05-08 昭和アルミニウム株式会社 真空用アルミニウム製中空押出形材の製造法

Also Published As

Publication number Publication date
JPS6071101A (ja) 1985-04-23

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