JPS6069651A - Peeling development method - Google Patents
Peeling development methodInfo
- Publication number
- JPS6069651A JPS6069651A JP17845183A JP17845183A JPS6069651A JP S6069651 A JPS6069651 A JP S6069651A JP 17845183 A JP17845183 A JP 17845183A JP 17845183 A JP17845183 A JP 17845183A JP S6069651 A JPS6069651 A JP S6069651A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- image forming
- forming material
- peeling
- tape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/34—Imagewise removal by selective transfer, e.g. peeling away
- G03F7/343—Lamination or delamination methods or apparatus for photolitographic photosensitive material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/0004—Component parts, details or accessories; Auxiliary operations
- B29C63/0013—Removing old coatings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は印刷回路等の製造の用に供される剥離現像方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a peeling and developing method used for manufacturing printed circuits and the like.
印刷回路の製造等のために、画像形成用基板の表面に透
明支持体とこの支持体上に被着された光重合性組成物層
とからなる画像形成材料の上記光重合性組成物層側を貼
着し、この光重合性組成物層を画像状に露光して硬化領
域を形成して、さらに必要に応じて上記画像形成材料を
加熱した後、上記支持体を基板から剥離して該基板上に
画像状のレジストを形成する画像形成手段がすでに案出
されている。For the production of printed circuits, etc., the photopolymerizable composition layer side of an image forming material consisting of a transparent support and a photopolymerizable composition layer deposited on the support on the surface of an image forming substrate. This photopolymerizable composition layer is imagewise exposed to form a cured area, and if necessary, the image forming material is heated, and then the support is peeled off from the substrate. Imaging means have already been devised for forming image-like resists on substrates.
而して、上記支持体の剥離は、一般に露光終了後におけ
る基板上の上記支持体の一端に該基板より突出するテー
プ状の剥離端片を接着したのち、ニンプロールや吸引ロ
ール等の剥離手段に上記剥離端片を挾み込ませて上記支
持体を巻き上げることによって行われている。Generally, the above-mentioned support is peeled off by adhering a tape-shaped peeling end piece protruding from the substrate to one end of the above-mentioned support on the substrate after exposure, and then using a peeling means such as a ninpro roll or a suction roll. This is done by inserting the peeled end pieces and rolling up the support.
しかるに、上記剥離方法によれば、露光後に別途剥離端
片を設けなければならず、工程数の増加を強いられるこ
とになる。However, according to the above peeling method, it is necessary to separately provide a peeling end piece after exposure, which forces an increase in the number of steps.
一方、露光後にそのまま剥離現像できる方法として、こ
の発明者らは特願昭57−170288号で開示したよ
うに、基板上に画像形成材料を貼着後例えば画像露光に
先立って、基板の少なくとも】5つのコーナ部分に露光
部分を設け、かくして画像形成材料側に対しての接着力
を弱めさせておき、粘着テープあるいは粘着ロールなど
により基板のコーナ一部から支持体を上記基板から分離
しながら剥離現像を行なうことを提案している。On the other hand, as a method in which peeling and development can be performed directly after exposure, the present inventors have disclosed in Japanese Patent Application No. 170288/1988 that after adhering an image forming material onto a substrate, for example, prior to image exposure, at least one of the following methods is used: Exposed areas are provided at five corners to weaken the adhesive force to the image forming material side, and the support is separated from the substrate from a corner part of the substrate and peeled off using an adhesive tape or an adhesive roll. I suggest developing it.
しかるに、この方法においては、現像された基板の周辺
部に光硬化した光重合性組成物層が付着しているから、
この基板を取り扱う過程で上記光重合性組成物層が欠け
て、その欠片が基板の内側へ付着することがあり、その
場合はエツチングやメッキ工程での不良発生の要因とな
る。However, in this method, since the photocured photopolymerizable composition layer is attached to the peripheral area of the developed substrate,
During the process of handling this substrate, the photopolymerizable composition layer may be chipped and the pieces may adhere to the inside of the substrate, which may cause defects in the etching or plating process.
また、この発明者らは、特願昭58−57107号に開
示したように、あらかじめ基板のコーナ一部に接着力の
低い粘着テープを貼着しておき、その」二に画像形成材
料を貼着することにより、容易に剥離し得る方法も案出
している。しかし、この方法は粘着テープの粘着力が弱
いものであっても剥離の最初のきっかけとなる部分が基
板に接着しているため、常時、剥離がスムースにできる
とは限らない。In addition, as disclosed in Japanese Patent Application No. 58-57107, the inventors previously attached adhesive tape with low adhesive strength to a part of the corner of the substrate, and then attached an image forming material to the second corner of the substrate. They have also devised a method that allows them to be easily peeled off by applying it. However, with this method, even if the adhesive tape has a weak adhesive strength, the part that initially triggers peeling is adhered to the substrate, so peeling cannot always be achieved smoothly.
鋭意検討した結果、この発明を完成するに至ったもので
ある。As a result of intensive study, this invention has been completed.
すなわち、この発明は画像形成材料を基板に貼着するに
あたり、上記画像形成材料の端部のみを非粘着性のテー
プを介して基板に積層して該画像形成材料の端部に基板
と接着しない領域を存在させ、画像露光後における支持
体と未露部分の剥m1の容易化を図ったものである。That is, in attaching an image-forming material to a substrate, the present invention laminates only the edges of the image-forming material onto the substrate via a non-adhesive tape and does not adhere the edges of the image-forming material to the substrate. This area is intended to facilitate peeling m1 of the unexposed portion from the support after image exposure.
この発明に使用される非粘着テープ類としては、プラス
チックフィルム、紙、金属箔などが使用される。これら
のも望みは可及的に薄い方がよt、%それは、画像形成
材料を基板に積層したのち、該画像形成材料にフォトマ
スクを密着して露光を行なう際に、上記画像形成材料に
おける非粘着テープの介在された端部と他の部位とで段
差が生じ、これが大きいと、該端部の近傍で上記フォト
マスクの密着性が損なわれるからである。したがって通
常厚さは25pmm下のものが好適に使用されもまた上
記非粘着テープの幅は作業性のうえから、5〜10+a
t程度が好ましい。As the non-adhesive tape used in this invention, plastic film, paper, metal foil, etc. are used. It is desirable for these materials to be as thin as possible.That is, after laminating the image forming material on a substrate, when exposing the image forming material with a photomask in close contact with the image forming material, This is because a difference in level occurs between the end where the non-adhesive tape is interposed and other parts, and if this step is large, the adhesion of the photomask will be impaired in the vicinity of the end. Therefore, the thickness of the non-adhesive tape is usually preferably 25 pmm or less, and the width of the non-adhesive tape is set from 5 to 10 mm from the viewpoint of workability.
About t is preferable.
つぎに、上記のような非粘着テープを画像形成材料の端
部に介在させて基板に貼着させる方法の一例を説明する
。Next, an example of a method of interposing the above-mentioned non-adhesive tape at the end of the image forming material and attaching it to the substrate will be explained.
一般に、この種画像形成材料は第1図に示される方法で
基板に貼着される。同図において、1は矢印a方向へ搬
送される画像形成用基板、2は画像形成材料供給ロール
、3は保護フィルム巻取ロール、4は保護フィルム剥離
ロール、5は転接ロールである。6は画像形成材料7と
これを保護する保護フィルム8とからなる帯状体である
。−上記帯状体6は供給ロール2から繰り出される。Generally, such imaging materials are applied to a substrate in the manner shown in FIG. In the figure, 1 is an image forming substrate conveyed in the direction of arrow a, 2 is an image forming material supply roll, 3 is a protective film winding roll, 4 is a protective film peeling roll, and 5 is a rolling contact roll. Reference numeral 6 denotes a band-shaped body consisting of an image forming material 7 and a protective film 8 for protecting it. - the strip 6 is unwound from the supply roll 2;
繰り出し経路において、剥離ロール4によって保護フィ
ルム8が画像形成材料7から剥離され、これは巻取ロー
ル3に巻き取られる。一方、上記画像形成材料7は転接
ロール5によって基板1の主面に貼着される。In the unwinding path, the protective film 8 is peeled off from the image-forming material 7 by the peeling roll 4 and is wound onto the winding roll 3 . On the other hand, the image forming material 7 is adhered to the main surface of the substrate 1 by a rolling contact roll 5.
上記画像形成材料7が上記基板1に貼着される際に、第
2図のように非粘着テープ巻回ロール9を上記画像形成
材料7の端部に合わせて位置決めセットすればよい。こ
の状態で上記画像形成材料7を基板1に貼着する動作に
合わせて非粘着テープ巻回ロール9から順次非粘着テー
プ10を縁り出させれば、上記画像形成材料7の貼着に
よって該画像形成材料7の端部に非粘着のテープlOが
付着した基板1を得ることができる。この場合、非粘着
テープ10は画像形成材料7の端部より多少はみ出すよ
うにセットすることが重要である。When the image forming material 7 is attached to the substrate 1, the non-adhesive tape winding roll 9 may be positioned and set to match the edge of the image forming material 7 as shown in FIG. In this state, if the non-adhesive tape 10 is sequentially brought out from the non-adhesive tape winding roll 9 in accordance with the operation of adhering the image-forming material 7 to the substrate 1, the image-forming material 7 can be attached to the substrate 1. A substrate 1 can be obtained with a non-adhesive tape IO attached to the edge of the imaging material 7. In this case, it is important to set the non-adhesive tape 10 so that it slightly protrudes from the edge of the image forming material 7.
上記のようにして画像形成材料7を基板1の主面に貼着
したのち、画像露光を行なう。しかる後、粘着テープや
粘着ロールを用いて上記画像形成材料7の端部から剥離
を開始すればよい。After the image forming material 7 is adhered to the main surface of the substrate 1 as described above, image exposure is performed. After that, peeling may be started from the end of the image forming material 7 using an adhesive tape or an adhesive roll.
ここで、画像形成材料7の端部が基板1に対して非粘着
テープ10により接着しないから、−に記剥離現像が失
敗なく容易に行なえる。とくに上記画像形成材料7の基
板1への貼着工程で非粘着テープ10を同時に介在させ
ることができるため、作業工程の増加を招くこともない
。Here, since the ends of the image forming material 7 are not adhered to the substrate 1 by the non-adhesive tape 10, the peeling development described in - can be easily performed without failure. In particular, since the non-adhesive tape 10 can be interposed at the same time in the step of attaching the image forming material 7 to the substrate 1, there is no need for an increase in the number of work steps.
つぎに、この発明の詳細な説明する。Next, this invention will be explained in detail.
実施例
画像形成材料(日東電気工架装のネオロンクE)を銅張
り積層板に貼着する際、この画像形成材料の端部に、厚
さ16μm1幅10勲のポリエステルフィルムを介在さ
せた。Example When an image forming material (Neoronk E manufactured by Nitto Electric Works Co., Ltd.) was attached to a copper-clad laminate, a polyester film having a thickness of 16 μm and a width of 10 layers was interposed at the edge of the image forming material.
ついで、」1記画像形成材料に対して、プリント配線板
用の配線パターンをフォトマスクを介して露光した。こ
の露光後、画像形成材料の上記ポリエステルフィルムが
介在している端部を含む基板のコーナ一部より粘着テー
プを貼着しながら、この粘着テープを基板より引き剥す
ことにより、現像を行なったところ、」1記画像形成材
料が容易に剥がされて現像処理が達成できた。また、上
記ポリエステルフィルムが介在しているところより、約
1mの距離にあるパターンも画像として鮮明なものであ
った。Next, a wiring pattern for a printed wiring board was exposed to light through a photomask on the image forming material described in 1. After this exposure, development was carried out by attaching an adhesive tape to a part of the corner of the substrate, including the edge where the polyester film of the image forming material was interposed, and peeling off the adhesive tape from the substrate. , 1. The image forming material was easily peeled off and the development process was completed. Moreover, the pattern located at a distance of about 1 m from the area where the polyester film was interposed was also a clear image.
第1図は画像形成材料を基板に貼着する方法の説明図、
第2図はこの発明に係る剥離現像方法に適用された画像
形成材料の基板への貼着時の説明図である。
】・・・画像形成用基板、7・・・画像形成材料、IO
・・・非粘着テープ。
特許出願人 日東電気工業株式会社FIG. 1 is an explanatory diagram of a method of attaching an image forming material to a substrate;
FIG. 2 is an explanatory diagram when an image forming material applied to the peeling and developing method according to the present invention is attached to a substrate. ]... Image forming substrate, 7... Image forming material, IO
...Non-adhesive tape. Patent applicant Nitto Electric Industry Co., Ltd.
Claims (1)
物層が透明支持体上に被着された画像形成材料を貼着し
て露光した後、上記支持体を光重合性組成物層の非露光
域とともに上記基板より剥離して画像を形成する剥離現
像方法において、上記画像形成材料を少なくとも基板の
一辺に沿った端部に非粘着テープを介在させながら上記
基板の主面に貼着し、露光を行なった後、上記支持体に
おける上記非粘着テープ介在端部を剥離開始端部として
基板から剥離することを特徴とする剥離現像方法。+1+ An image forming material in which a photopolymerizable composition layer is coated on a transparent support is adhered to the surface of the substrate on which an image is to be formed, and then exposed to light. In a peeling development method in which an image is formed by peeling off the substrate along with the non-exposed area, the image forming material is attached to the main surface of the substrate with a non-adhesive tape interposed at an edge along at least one side of the substrate. . A peeling development method, characterized in that, after exposure, the support is peeled from the substrate using the non-adhesive tape intervening end as a peeling start end.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17845183A JPS6069651A (en) | 1983-09-27 | 1983-09-27 | Peeling development method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17845183A JPS6069651A (en) | 1983-09-27 | 1983-09-27 | Peeling development method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6069651A true JPS6069651A (en) | 1985-04-20 |
Family
ID=16048745
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17845183A Pending JPS6069651A (en) | 1983-09-27 | 1983-09-27 | Peeling development method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6069651A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5531854A (en) * | 1994-12-01 | 1996-07-02 | Eastman Kodak Company | De-laminator apparatus and method |
-
1983
- 1983-09-27 JP JP17845183A patent/JPS6069651A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5531854A (en) * | 1994-12-01 | 1996-07-02 | Eastman Kodak Company | De-laminator apparatus and method |
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