JPS61279854A - Stripping development method - Google Patents

Stripping development method

Info

Publication number
JPS61279854A
JPS61279854A JP12186585A JP12186585A JPS61279854A JP S61279854 A JPS61279854 A JP S61279854A JP 12186585 A JP12186585 A JP 12186585A JP 12186585 A JP12186585 A JP 12186585A JP S61279854 A JPS61279854 A JP S61279854A
Authority
JP
Japan
Prior art keywords
substrate
bar
peeling
photopolymerizable composition
base plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12186585A
Other languages
Japanese (ja)
Inventor
Takashi Yamamura
隆 山村
Kazuo Ouchi
一男 大内
Toshihiko Omote
利彦 表
Noriharu Miyaake
宮明 稚晴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Electric Industrial Co Ltd filed Critical Nitto Electric Industrial Co Ltd
Priority to JP12186585A priority Critical patent/JPS61279854A/en
Publication of JPS61279854A publication Critical patent/JPS61279854A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C63/00Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
    • B29C63/0004Component parts, details or accessories; Auxiliary operations
    • B29C63/0013Removing old coatings
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03CPHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C5/00Photographic processes or agents therefor; Regeneration of such processing agents
    • G03C5/18Diazo-type processes, e.g. thermal development, or agents therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)

Abstract

PURPOSE:To prevent a base plate from being wound up in the stripping development method for use in printed circuits and the like by controlling the distance between a stripping bar and the pressing bar to the total thickness of a carrier tape, a transparent support, and the nonexposed parts of a photopolymerizable composition. CONSTITUTION:The photopolymerizable composition 4, the transparent support 3 are successively laminated on the base plate 5 to form an image forming material. This is exposed to harden the exposed parts 4a, the carrier tape 2 for stripping the support 3 and the nonexposed parts 4b is attached to the support 3, and the support 3 and the nonexposed parts 4b are stripped by pulling up the tape 2 along the edged corner part 1a of the stripping bar 1 from the parts 4a and the base plate 5. The bar 6 for pressing the base plate 5 is arranged above the base plate 5 and opposite to the bar 1 and the distance D between both bars 1, 6 is controlled to a size equal to the total thickness of the tape 2, the support 3, and the parts 4b, thus permitting the base plate 5 to be prevented from being wound up together with the tape 2 even if the base plate 5 is thin.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は印刷回路などの製造の用に供される剥離現像
方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a peeling and developing method used for manufacturing printed circuits and the like.

〔従来の技術〕[Conventional technology]

印刷回路の製造のために、画像形成用基板の表面に、透
明支持体上に光重合性組成物層を被着してなる画像形成
材料の上記光重合性組成物層を積層し、画像状に露光し
て硬化領域を形成し、さらに必要に応じて上記画像形成
材料を加熱したのち、上記支持体を基板から剥離して、
基板上に画像状のレジストを形成する画像形成手段がす
でに案出されている。
In order to produce a printed circuit, the photopolymerizable composition layer of an image-forming material, which is formed by coating a photopolymerizable composition layer on a transparent support, is laminated on the surface of an image-forming substrate to form an image. After exposing to light to form a cured area and further heating the image forming material as necessary, peeling the support from the substrate,
Imaging means have already been devised for forming image-like resists on substrates.

上記のような剥離現像方法において、シャープな仕上が
りの良好な画像を得るための重要なポイントは、画像形
成材料の剥離方法にあるといっても過言ではない。
It is no exaggeration to say that in the above-mentioned peeling development method, an important point for obtaining a good image with a sharp finish lies in the peeling method of the image forming material.

この種の画像形成材料を剥離現像する方法として、たと
えば露光後の画像形成材料における透明支持体に対して
基板を相対移動させることにより連続した粘着テープを
順次押圧して、上記支持体をこれに被着された光重合性
組成物層の未露光部とともに基板側から引き剥がして上
記層の露光部のみを上記基板表面に残存させようとする
方法がある。
As a method for peeling and developing this type of image-forming material, for example, by moving the substrate relative to the transparent support in the image-forming material after exposure, a continuous adhesive tape is sequentially pressed, and the support is attached to the transparent support. There is a method in which the deposited photopolymerizable composition layer is peeled off from the substrate together with the unexposed part, so that only the exposed part of the layer remains on the surface of the substrate.

ところが、上記従来の方法では、透明支持体の剥離角度
に対する考慮がなされておらず、基板と透明支持体との
剥離角度が浅く、しかも不安定であり、基板が硬い場合
には透明支持体の剥離力に抗して基板は安定よく直進す
るが、基板が柔らかく可撓性がある場合には、基板も透
明支持体と共に持ち上げられて剥離角度を維持すること
が困難となる。
However, in the conventional method described above, no consideration is given to the peeling angle of the transparent support, and the peeling angle between the substrate and the transparent support is shallow and unstable, and when the substrate is hard, the peeling angle of the transparent support is The substrate moves straight in a stable manner against the peeling force, but if the substrate is soft and flexible, the substrate is lifted together with the transparent support, making it difficult to maintain the peeling angle.

一方、ニップロールなどで支持体を剥離させる手段も案
出されているが、柔らかく可撓性のある基板で未露光部
が非常に多い場合や、基板が非常に薄い場合などには、
これら基板が透明支持体と共に持ち上げられて、やはり
剥離角度を維持することが困難となり、良好なパターン
が得られにくい。
On the other hand, a method of peeling off the support using nip rolls has been devised, but this method cannot be used when the substrate is soft and flexible and has a large number of unexposed areas, or when the substrate is very thin.
These substrates are lifted together with the transparent support, making it difficult to maintain the peeling angle, making it difficult to obtain a good pattern.

このような不具合を解決するため、第2図に示すように
エツジ状のコーナ一部1aを有する剥離バー 1を用い
る手段が案出されている。これは剥離バー1のコーナ一
部1aに、キャリアシートもしくはキャリアテープ2に
付着させた画像形成材料の透明支持体3と光重合性組成
物層4の未露光部4bを沿わせて剥離するようにしたも
のである。
In order to solve this problem, a method has been devised that uses a peeling bar 1 having an edge-shaped corner portion 1a, as shown in FIG. This is done by aligning the corner part 1a of the peeling bar 1 with the transparent support 3 of the image forming material attached to the carrier sheet or carrier tape 2 and the unexposed part 4b of the photopolymerizable composition layer 4, and peeling it off. This is what I did.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、上記第2図の方法は、基板5が厚い場合は、そ
の基板5め剛性のために、露光部4aの付着した基板5
は問題なく扱き出されるが、薄い場合には、基板5に剛
性がないため、未露光部4bの付着した透明支持体3と
ともに変形してしまい、現像ができずに同図鎖線で示す
ようにキャリアシートもしくはキャリアテープ2ととも
に巻き取られてしまうことがあった。
However, when the substrate 5 is thick, the method shown in FIG.
However, if the substrate 5 is thin, it will be deformed together with the transparent support 3 to which the unexposed portion 4b is attached, and development will not be possible, as shown by the chain line in the figure. In some cases, the carrier sheet or carrier tape 2 was wound up.

そこで、この発明者らは、これの改善策、すなわち上記
基板5がキャリアシートもしくはキャリアテープ2とと
もに巻き取られないようにするために、第3図に示すよ
うに剥離バー1と一定のギャップを開けて設けた基板押
えバー6を設置することを案出し、試みた。
Therefore, in order to improve this problem, that is, to prevent the substrate 5 from being rolled up together with the carrier sheet or carrier tape 2, the inventors created a certain gap between the peeling bar 1 and the peeling bar 1 as shown in FIG. We devised and tried installing a board holding bar 6 that was opened.

ところが、上記の改善策では、基板押えバー6によって
基板5が巻き取られるのをある程度抑制できるものの、
剥離バー1との間の間隔が大きすぎると、基板5が薄く
て柔らかい場合に基板5が剥離バー1と基板押えバー6
との間に巻き取られかけるのを確実に防止できず、画像
不良を発生するおそれがあった。そして、この傾向は未
露光部が多くなるようなパターン画像を形成する場合に
特に顕著であった。
However, with the above improvement measures, although it is possible to prevent the board 5 from being wound up by the board holding bar 6 to some extent,
If the distance between the peeling bar 1 and the substrate 5 is too large, the substrate 5 will be stuck between the peeling bar 1 and the substrate holding bar 6 when the substrate 5 is thin and soft.
It was not possible to reliably prevent the film from being wound up between the paper and the film, which could result in image defects. This tendency was particularly noticeable when forming a pattern image with a large number of unexposed areas.

この発明は、上記観点から、透明支持体の剥離時に基板
の厚さや硬さに関係なく、また未露光部が多くなるよう
なパターン画像を形成する場合でも、基板の巻き取りを
確実に防止できる剥離現像方法を提供することを目的と
している。
From the above viewpoint, the present invention can reliably prevent the substrate from being rolled up when the transparent support is peeled off, regardless of the thickness and hardness of the substrate, and even when forming a pattern image with a large number of unexposed areas. The object of the present invention is to provide a peel-off development method.

〔問題点を解決するための手段〕[Means for solving problems]

この発明者らは、上記の目的を達成するために鋭意検討
した結果、剥離バーと基板押えバーとを用いる上述の剥
離現像方法において、剥離バーとヵviユえ7、−よ。
As a result of intensive studies to achieve the above object, the inventors have developed the above-mentioned peeling and developing method using a peeling bar and a substrate holding bar.

□、6や1.ヤ1.アヶーア。    (箕 しくはキャリアシート、透明支持体および光重合   
    1性組成物層の未露光部の各厚さの加算した値
とはぼ同等の寸法に設定することにより、剥離現像を 
      □゛非常良好に行えることを見い出し、こ
の発明を完成するに至った。
□, 6 and 1. Ya1. Aaaah. (In short, carrier sheet, transparent support and photopolymerization
By setting the dimensions to be approximately the same as the sum of the thicknesses of the unexposed areas of the monochromatic composition layer, peeling development can be achieved.
□゛We have discovered that this can be done very well and have completed this invention.

すなわち、この発明は、画像を形成すべき基板の表面に
、透明支持体および光重合性組成物層か       
□、、。
That is, the present invention provides a transparent support and a photopolymerizable composition layer on the surface of a substrate on which an image is to be formed.
□,,.

らなる画像形成材料を積層し、パターン状の露光を行っ
たのち、上記支持体と光重合性組成物層の      
□未露光部とを基板より剥離し、光重合性組成物層の露
光部を上記基板上に残存させる剥離現像方法において、
上記画像形成材料上にキャリアシートもしくはキャリア
テープを介して設置されてコー’+taBrlRia+
+ ’) ? ’/  ) b I−< L!It ’
J T?−。
After laminating the image forming materials consisting of the above-mentioned support and the photopolymerizable composition layer and exposing them to light in a pattern,
□ In a peeling development method in which the unexposed area is peeled off from the substrate and the exposed area of the photopolymerizable composition layer remains on the substrate,
Co'+taBrlRia+ is placed on the image forming material via a carrier sheet or carrier tape.
+')? '/ ) b I-< L! It'
JT? −.

プを介して透明支持体および光重合性組成物層の未露光
部を基板から剥離させる剥離バーと、この剥離バーの対
向位置において画像の形成された基板を扱き出す基板押
えバーとを設け、上記剥離バ〜と基板押えバーとの間の
間隔を、キャリアテープもしくはキャリアシート、透明
支持体および光重合性組成物層の未露光部の各厚みを加
算゛した厚み寸法と同程度の小隙に設定したことを特徴
とする剥離現像方法に係るものである。
a peeling bar that peels off the unexposed portion of the transparent support and the photopolymerizable composition layer from the substrate via a strip; and a substrate holding bar that handles the substrate on which the image is formed at a position opposite to the peeling bar; The distance between the above-mentioned peeling bar and the substrate holding bar is set to a small gap equivalent to the sum of the thicknesses of the carrier tape or carrier sheet, the transparent support, and the unexposed portion of the photopolymerizable composition layer. The present invention relates to a peeling development method characterized in that:

〔作用〕[Effect]

この発明においては、剥離バーと基板押えバーとの間の
間隔が基板が侵入できない程度の寸法のために、透明支
持体の剥離時に上記剥離バーと基板押えバーとの間から
基板が巻き取られるのが確実に阻止される。
In this invention, since the distance between the peeling bar and the substrate holding bar is such that the substrate cannot enter, the substrate is wound up from between the peeling bar and the substrate holding bar when the transparent support is peeled off. will definitely be prevented.

〔実施例〕〔Example〕

第1図はこの発明に係る剥離現像方法を示すもので、第
2図および第3図と同一部所には同一符合を付して説明
を省略する。
FIG. 1 shows a peeling and developing method according to the present invention, and the same parts as in FIGS. 2 and 3 are given the same reference numerals and the explanation thereof will be omitted.

同図において、剥離バー1と基板押えバー6との間の間
隔りは、キャリアシートもしくはこの例のキャリアテー
プ2、透明支持体3および光重合性組成物層4の未露光
部4bの各厚さの合計寸法とほぼ同じ程度の小隙に設定
されている。
In the figure, the distance between the peeling bar 1 and the substrate holding bar 6 is determined by the thickness of the carrier sheet or the carrier tape 2 in this example, the transparent support 3, and the unexposed portion 4b of the photopolymerizable composition layer 4. The gap is set to be approximately the same as the total dimension of the

このように構成することにより、剥離バー1による剥離
時に上側へ変形しようとする基板5が基板押えバー6で
押さえ込まれ、支持体3や未露光部4bの剥離が順調に
行われる。とくに、上記剥離バー1と基板押えバー6と
の間隔りを上述のように特定の小隙に設定したから、上
記基板5が上記両者1,6の間から巻き上げられるスペ
ースもなくなり、したがって基板5がキャリアテープ2
とともに巻き取られかけてしわが発生するといった不具
合が確実に防止されることになる。
With this configuration, the substrate 5, which tends to deform upward during peeling by the peeling bar 1, is held down by the substrate holding bar 6, and the support 3 and the unexposed portion 4b are peeled off smoothly. In particular, since the distance between the peeling bar 1 and the substrate holding bar 6 is set to a specific small gap as described above, there is no space for the substrate 5 to be rolled up from between the two 1 and 6, and therefore the substrate 5 is carrier tape 2
At the same time, problems such as the occurrence of wrinkles due to being wound up can be reliably prevented.

なお、上記の間隔りは、キャリアシートもしくはキャリ
アテープ2、透明支持体3および光重合性組成物層4の
各厚さによって2概に決められないが、これら各厚さの
合計寸法をD′とすれば一般にD−D’=O〜0.2f
i程度となるようにするのがよい。
Note that the above-mentioned spacing cannot be determined approximately depending on the respective thicknesses of the carrier sheet or carrier tape 2, the transparent support 3, and the photopolymerizable composition layer 4, but the total dimension of each of these thicknesses is defined as D' Then, generally D-D'=O~0.2f
It is preferable to set it to approximately i.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明は、剥離バーと基板押えバーと
の間の間隔を、キャリアシートもしくはキャリアテープ
、画像形成材料の透明支持体3、光重合性組成物層の未
露光部の各厚みを加算した厚み寸法と同程度の小隙に設
定したから、基板5が柔らかくて可撓性を存する薄いも
のであっても、また未露光部が多(なるようなパターン
画像を形成する場合でも、剥離バーと基板押えバーとの
間に上記基板が侵入できるスペースが存在しなくなり、
この結果キャリアシートもしくはキャリアテープととも
に上記基板が巻き取られるのを確実に防止でき、安定し
た剥離現像性を保証することができる。
As described above, the present invention adjusts the distance between the peeling bar and the substrate holding bar to the thickness of the carrier sheet or carrier tape, the transparent support 3 of the image forming material, and the unexposed portion of the photopolymerizable composition layer. Since the gap is set to be about the same as the thickness dimension in which , there is no longer a space between the peeling bar and the substrate holding bar in which the substrate can enter.
As a result, it is possible to reliably prevent the substrate from being rolled up together with the carrier sheet or carrier tape, and to ensure stable peeling and developing performance.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明に係る剥離現像方法の説明図、第2図
は従来の剥離現像方法の説明図、第3図はこの発明に係
るものとは異なる剥離現像方法の説明図である。 ■・・・剥離バー、2・・・キャリアテープ(キャリア
シート)、3・・・透明支持体、4・・・光重合性組成
物層、4a・・・露光部、4b・・・未露光部、5・・
・基板、6・・・基板押えバー、D・・・間隔第1図 D;間隔
FIG. 1 is an explanatory diagram of a peel-off developing method according to the present invention, FIG. 2 is an explanatory diagram of a conventional peel-off developing method, and FIG. 3 is an explanatory diagram of a peel-off developing method different from that according to the present invention. ■... Peeling bar, 2... Carrier tape (carrier sheet), 3... Transparent support, 4... Photopolymerizable composition layer, 4a... Exposed area, 4b... Unexposed Part 5...
・Substrate, 6... Board holding bar, D... Spacing Diagram 1 D; Spacing

Claims (1)

【特許請求の範囲】[Claims] (1)画像を形成すべき基板の表面に、透明支持体およ
び光重合性組成物層からなる画像形成材料を積層し、パ
ターン状の露光を行ったのち、上記支持体と光重合性組
成物層の未露光部とを基板より剥離し、光重合性組成物
層の露光部を上記基板上に残存させる剥離現像方法にお
いて、上記画像形成材料上にキャリアシートもしくはキ
ャリアテープを介して設置されてコーナ部で上記キャリ
アシートもしくはキャリアテープを介して透明支持体お
よび光重合性組成物層の未露光部を基板から剥離させる
剥離バーと、この剥離バーの対向位置において画像の形
成された基板を扱き出す基板押えバーとを設け、上記剥
離バーと基板押えバーとの間の間隔を、キャリアテープ
もしくはキャリアシート、透明支持体および光重合性組
成物層の未露光部の各厚みを加算した厚み寸法と同程度
の小隙に設定したことを特徴とする剥離現像方法。
(1) An image forming material consisting of a transparent support and a photopolymerizable composition layer is laminated on the surface of a substrate on which an image is to be formed, and after patterned exposure, the above support and photopolymerizable composition are layered. In a peeling development method in which the unexposed portion of the photopolymerizable composition layer is peeled off from the substrate and the exposed portion of the photopolymerizable composition layer remains on the substrate, the photopolymerizable composition layer is placed on the image forming material via a carrier sheet or carrier tape. A peeling bar peels off the transparent support and the unexposed portion of the photopolymerizable composition layer from the substrate at the corner part via the carrier sheet or carrier tape, and the substrate on which the image is formed is handled at a position opposite to this peeling bar. A substrate holding bar is provided to release the substrate, and the distance between the peeling bar and the substrate holding bar is the thickness dimension that is the sum of the thicknesses of the carrier tape or carrier sheet, the transparent support, and the unexposed portion of the photopolymerizable composition layer. A peeling development method characterized in that the gap is set to the same level as that of the peeling development method.
JP12186585A 1985-06-05 1985-06-05 Stripping development method Pending JPS61279854A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12186585A JPS61279854A (en) 1985-06-05 1985-06-05 Stripping development method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12186585A JPS61279854A (en) 1985-06-05 1985-06-05 Stripping development method

Publications (1)

Publication Number Publication Date
JPS61279854A true JPS61279854A (en) 1986-12-10

Family

ID=14821841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12186585A Pending JPS61279854A (en) 1985-06-05 1985-06-05 Stripping development method

Country Status (1)

Country Link
JP (1) JPS61279854A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0268290A2 (en) * 1986-11-18 1988-05-25 Somar Corporation Film peeling apparatus
BE1007774A3 (en) * 1993-11-19 1995-10-17 Agfa Gevaert Nv Device for producing imaging element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0268290A2 (en) * 1986-11-18 1988-05-25 Somar Corporation Film peeling apparatus
BE1007774A3 (en) * 1993-11-19 1995-10-17 Agfa Gevaert Nv Device for producing imaging element

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