JPS6068590A - 透明導電膜上への絶縁膜の形成方法 - Google Patents

透明導電膜上への絶縁膜の形成方法

Info

Publication number
JPS6068590A
JPS6068590A JP58175188A JP17518883A JPS6068590A JP S6068590 A JPS6068590 A JP S6068590A JP 58175188 A JP58175188 A JP 58175188A JP 17518883 A JP17518883 A JP 17518883A JP S6068590 A JPS6068590 A JP S6068590A
Authority
JP
Japan
Prior art keywords
insulating film
film
electrodes
forming
transparent conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58175188A
Other languages
English (en)
Japanese (ja)
Other versions
JPH056319B2 (enrdf_load_stackoverflow
Inventor
雅博 西川
純 桑田
洋介 藤田
任田　隆夫
富造 松岡
阿部　惇
新田　恒治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58175188A priority Critical patent/JPS6068590A/ja
Publication of JPS6068590A publication Critical patent/JPS6068590A/ja
Publication of JPH056319B2 publication Critical patent/JPH056319B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP58175188A 1983-09-24 1983-09-24 透明導電膜上への絶縁膜の形成方法 Granted JPS6068590A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58175188A JPS6068590A (ja) 1983-09-24 1983-09-24 透明導電膜上への絶縁膜の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58175188A JPS6068590A (ja) 1983-09-24 1983-09-24 透明導電膜上への絶縁膜の形成方法

Publications (2)

Publication Number Publication Date
JPS6068590A true JPS6068590A (ja) 1985-04-19
JPH056319B2 JPH056319B2 (enrdf_load_stackoverflow) 1993-01-26

Family

ID=15991819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58175188A Granted JPS6068590A (ja) 1983-09-24 1983-09-24 透明導電膜上への絶縁膜の形成方法

Country Status (1)

Country Link
JP (1) JPS6068590A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320461A (ja) * 1986-07-14 1988-01-28 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成装置
JPH02226692A (ja) * 1989-02-23 1990-09-10 Nec Kansai Ltd 薄膜ｅｌパネルの製造方法
JP2007534847A (ja) * 2004-04-29 2007-11-29 ファスロック．インターナショナル．リミテッド 犠牲陽極アセンブリ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152882A (en) * 1978-05-23 1979-12-01 Sharp Corp Structure of thin film el element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54152882A (en) * 1978-05-23 1979-12-01 Sharp Corp Structure of thin film el element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320461A (ja) * 1986-07-14 1988-01-28 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成装置
JPH02226692A (ja) * 1989-02-23 1990-09-10 Nec Kansai Ltd 薄膜ｅｌパネルの製造方法
JP2007534847A (ja) * 2004-04-29 2007-11-29 ファスロック．インターナショナル．リミテッド 犠牲陽極アセンブリ

Also Published As

Publication number Publication date
JPH056319B2 (enrdf_load_stackoverflow) 1993-01-26

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