JPS6066454A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS6066454A
JPS6066454A JP58174801A JP17480183A JPS6066454A JP S6066454 A JPS6066454 A JP S6066454A JP 58174801 A JP58174801 A JP 58174801A JP 17480183 A JP17480183 A JP 17480183A JP S6066454 A JPS6066454 A JP S6066454A
Authority
JP
Japan
Prior art keywords
semiconductor device
holes
lead frame
package
inner leads
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58174801A
Other languages
Japanese (ja)
Inventor
Isao Baba
馬場 勲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP58174801A priority Critical patent/JPS6066454A/en
Publication of JPS6066454A publication Critical patent/JPS6066454A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49541Geometry of the lead-frame
    • H01L23/49544Deformation absorbing parts in the lead frame plane, e.g. meanderline shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To enhance adhesion between molding resin and a lead frame, and to enhance humidity resistance of a semiconductor device by a method wherein holes are formed respectively in the hang pins and the inner leads of a lead frame to make molding resin to enter into the holes and to be solidified. CONSTITUTION:A punch hole of one piece or more are provided to respective hang pins 21 connected to a mounting part 3 fixed with a semiconductor element pellet 2, punch holes 24 are formed to the stopper parts 23' of respective inner leads 23, and the hang pins 21 are formed being curved in a zigzag type. Molding resin 6 enters into the punch holes 22, 24 to be solidified, favorable adhesion is held between the molded resin 6, the hang pins 21 and the inner leads 23 to make a gap to be hardly generated, and almost no invasion of water into a package from the outside is generated.

Description

【発明の詳細な説明】 〔発明の技術分野〕 本発明は、プラスチックパッケージを有する半導体装置
に係り、特にリードフレームの半導体素子載置部に連接
する吊りピンおよび半導体素子の外部ピンとして接続さ
れるインナーリードの構造に関する。
[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a semiconductor device having a plastic package, and particularly to a hanging pin connected to a semiconductor element mounting portion of a lead frame and an external pin of the semiconductor element. Regarding the structure of the inner lead.

〔発明の技術的背景〕[Technical background of the invention]

第1図(a)は従来のフラットパッケージ型の半導体装
&1を示すもので、その内部は第1図(b)、(C)に
示すように構成されていた。即ち、2は半導体素子ペレ
ット、3はリードフレームの素子載置部であって、その
上に前記ペレット2が接着剤4により固着されている。
FIG. 1(a) shows a conventional flat package type semiconductor device &1, the interior of which was constructed as shown in FIGS. 1(b) and 1(C). That is, 2 is a semiconductor element pellet, 3 is an element mounting part of a lead frame, and the pellet 2 is fixed thereon by an adhesive 4.

5は上記素子載置部3に連通する吊りピンであって、半
導体装置の製造段階ではリードフl/一ノ・の外枠部に
も連通しているが、最終的にはモールド樹脂6外へ突出
しないように切断ghている。7は前記ペレット2に金
線8を介]2て接続さわるインナーリードであって、半
導体装1りの製造段階ではリードフレームに連接して支
持さねているが、最終的にはモールド樹脂6から所定長
さだけ突出した部分で切断されている。なお、リードフ
レームはニッケル合金もしくは銅合金からなり、そのう
ち前記素子載置部3、吊りピン5、インナーリード7の
モールド樹脂内端部付近はそれぞれ銀メッキあるいは金
メッキが施さ力ており、このメッキ部を図中斜線にて示
している。また、前記モールド樹脂6は、素子載置部3
およびその上に固着されたペレット2ならびに吊りビン
5、インナーリード7、金線8を一体的に固定して内蔵
するパッケージとなっている。
Reference numeral 5 denotes a hanging pin that communicates with the element mounting section 3, and at the manufacturing stage of the semiconductor device, it also communicates with the outer frame of the lead flask, but ultimately the pin 5 is connected to the outside of the mold resin 6. It is cut so that it does not protrude. Reference numeral 7 denotes an inner lead which is connected to the pellet 2 via a gold wire 8. Although it is connected to and supported by a lead frame at the manufacturing stage of the semiconductor device 1, it is ultimately connected to the mold resin 6. It is cut at a portion that protrudes a predetermined length from the base. The lead frame is made of nickel alloy or copper alloy, and the inner ends of the molded resin of the element mounting portion 3, hanging pins 5, and inner leads 7 are each plated with silver or gold. is indicated by diagonal lines in the figure. Further, the mold resin 6 is attached to the element mounting portion 3
The pellet 2 fixed thereon, the hanging bottle 5, the inner lead 7, and the gold wire 8 are integrally fixed and built into the package.

〔背景技術の問題点〕[Problems with background technology]

ところで、上述したようなプラスチックパッケージ型の
半導体装置は、製品段階での半田ジャブ漬け(浸漬半田
付け)に際して、そのときのヒートショックによりパッ
ケージ内の各材料の界面に熱応力が生じる。これは、各
材料の熱膨張係数が違うために起こるもので、この応力
は特にモールド樹脂6とペレット2との間、モールド樹
脂6とリードフレーム部との間で太きい。そして、この
ように生じた応力に対して、モールド樹脂6の耐弾性が
弱い場合にはパッケージの外形変形が起きる欠点があっ
た。また、前記応力により、モールド樹脂6とインナー
リード7との間およびモールド樹脂6と吊りビン5との
間で密着性が悪くなって隙間が生じる。
By the way, when the above-mentioned plastic package type semiconductor device is subjected to solder jab dipping (immersion soldering) at the product stage, thermal stress is generated at the interface between each material in the package due to the heat shock at that time. This occurs because the coefficients of thermal expansion of each material are different, and this stress is particularly large between the mold resin 6 and the pellet 2 and between the mold resin 6 and the lead frame portion. If the mold resin 6 has weak elasticity against the stress generated in this way, there is a drawback that the outer shape of the package may be deformed. Further, due to the stress, the adhesion between the mold resin 6 and the inner lead 7 and between the mold resin 6 and the hanging bottle 5 deteriorates, and gaps are created.

このため、半田ジャブ漬は後の4湿性試験時に、パッケ
ージ外から上記隙間を通って水分とが水分と同時に汚染
物がパッケージ内に浸入し易くなり、これによって製品
不良が多く発生する原因となっている。また、前記半田
ジャブ漬けに際して、パンケージ内に水分を含んでいた
場合には内部で発生する熱応力は増長する部面があるの
で、パッケージ内への水分の浸入を防ぐ対策が特に必要
である。
For this reason, solder jab dipping makes it easier for contaminants to infiltrate into the package from outside the package through the above-mentioned gap during the subsequent 4 humidity tests, and this causes many product defects. ing. Further, when the solder jab is soaked, if the pan cage contains moisture, the thermal stress generated inside the pan cage will increase, so it is especially necessary to take measures to prevent moisture from penetrating into the package.

〔発明の目的〕[Purpose of the invention]

本発明は上記の事情に鑑みてなさhたもので、プラスチ
ックバラゲージ内に外部から水分が浸入し難く、パッケ
ージ外形の渡形が生じ維く、モールド樹脂と吊りビンお
よびインナーリードとの密着性が良くて隙間が生じ絆<
、1酬湿性の良い半導体装置を提供するものである。
The present invention has been developed in view of the above circumstances, and has the following features: it is difficult for moisture to enter the plastic baggage from the outside, it maintains the shape of the package, and it has good adhesion between the mold resin, the hanging bottle, and the inner lead. It is good and a gap is created and the bond <
One advantage is to provide a semiconductor device with good moisture resistance.

〔発明の概畳〕[Summary of the invention]

即ち、本発明は、リードフレームの素子載置部に半導体
素子が固着され21’態でモールド樹脂によりパッケー
ジングされてなる半導体装置において、前記リードフレ
ームの吊りビンおよびインナーリードにそれぞれ穴が形
成されていることを特徴とするものであり、この穴にモ
ールド樹脂が入り込んで固化することによってモールド
樹脂とリードフレームとの密着性が向上(7、外部から
パッケージ内へ水分が浸入し難くなっている。
That is, the present invention provides a semiconductor device in which a semiconductor element is fixed to an element mounting portion of a lead frame and packaged in a 21' state with a molded resin, in which holes are formed in each of a hanging bottle and an inner lead of the lead frame. The mold resin enters these holes and solidifies, improving the adhesion between the mold resin and the lead frame. .

〔多、明の実施例〕[Example of many examples]

以下、図面を参照して本発明の一実施例を詳細に説明す
る。
Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings.

第2図(ロ)) 、 (b) 、 (c)に示す半導体
装置2oは、第1図(a) e (b) 、(c)を参
照【1.て前述した従来の半導体装u1に比べて、吊り
ビン2ノに1個以上(本例では21β1)のパンチ穴2
2が形成されてイル点、各インナーリード23のストッ
パ部23′にそれぞれパンチ穴24が形成されている点
、吊りビン2ノが蛇行状に湾曲形成されている点が異な
り、その他は同じであるので第1図中と同一部分には同
一符号を付してその説明を省略する。
The semiconductor device 2o shown in FIGS. 2(b), (b), and (c) is shown in FIGS. 1(a), (b), and (c) [1. Compared to the conventional semiconductor device u1 described above, one or more punch holes 2 (21β1 in this example) are provided in the hanging bottle 2.
2 is formed, a punch hole 24 is formed in the stopper part 23' of each inner lead 23, and the hanging bottle 2 is curved in a serpentine shape, but the other points are the same. Therefore, the same parts as in FIG. 1 are denoted by the same reference numerals, and the explanation thereof will be omitted.

上記構成の半導体装置によれば、吊りビン21およびイ
ンナーリード23にそれぞれパンチ穴22.24?i−
設けているので、第2図(d) 、 (e)に示すよう
にモールド樹脂6は上記パンチ穴22.24に入り込ん
だ状態で固化(−ている。【7たがって、モールド樹脂
6と吊りビン2.1との間およびモールド樹脂6とイン
ナーリード23との間は、密着性が良く保たれて隙11
11がケじ離〈なり、外部から上記隙間を通ってパッケ
ージ内に水分が浸入することは殆んと生じない。
According to the semiconductor device having the above configuration, the hanging bottle 21 and the inner lead 23 have punch holes 22 and 24, respectively. i-
As shown in FIGS. 2(d) and 2(e), the mold resin 6 is solidified (-) in the punched hole 22.24. Good adhesion is maintained between the bottle 2.1 and between the molded resin 6 and the inner lead 23, leaving a gap 11.
11 is separated, and moisture hardly enters into the package from the outside through the gap.

また、吊りビン2)は蛇行しており、パッケージ内の吊
りビン21の寸法が長くなっているので、吊りビン2ノ
に沿って外部からパッケージ内の夾深くまで水分が浸入
することはんんど生じない。なお、インナーリード23
もその内光端部が一般に蛇行しているので、やはりそr
lぞれに沿って水分が浸入することは殆んど生じない。
In addition, since the hanging bottle 2) has a meandering shape, and the length of the hanging bottle 21 inside the package is long, moisture cannot penetrate from the outside along the hanging bottle 2) to deep inside the package. It won't happen. In addition, inner lead 23
Also, since the inner light end is generally meandering,
There is almost no intrusion of moisture along each line.

次に、上記構成による半導体装jd 2 oの半田ジャ
ブ漬は後における外観該層、耐湿性試験の結果を下表(
5)、■)に示す。なお、対比のために従来の半導体装
置1の同様の試駁結朱も示している。ここで、半田ジャ
ブ漬けの条件は360℃、10秒間であり、本発明装置
は試験サンプル数24個のうちパッケージの外ノド変化
としてふくワ、破裂、クラックが生じた不良数は皆無で
あり、全品とも正常であった。また、耐湿性試かの条件
は127°C1湿度100%、圧力2.5atmであり
、本発明装置は試験サンプル数24イ1〜のうち試駄町
間が20時曲、40時間、60時間、80時IMJの後
で生じた不良1iJ、は皆無であり、全品とも正猟であ
った。
Next, after soldering the semiconductor device JD2O with the above configuration, the appearance of the layer and the results of the moisture resistance test are shown in the table below (
5) and ■). For comparison, a similar test result of the conventional semiconductor device 1 is also shown in red. Here, the solder jab dipping conditions were 360°C and 10 seconds, and the device of the present invention had no defects in which bubbles, ruptures, or cracks occurred as a result of changes in the outer edges of the package out of 24 test samples. All items were normal. In addition, the conditions for the moisture resistance test were 127°C, 100% humidity, and 2.5 atm, and the device of the present invention was tested for 20 hours, 40 hours, and 60 hours. There were no defective 1iJs that occurred after 80:00 IMJ, and all products were in good condition.

表(A)外紐試鹸結呆(サンプル数24 (1,!it
 )表(B)耐湿性試験(サンプル数24個)(半田ジ
ャブ漬は条件=260’0.10秒間)(ブレラシャフ
ラカーテスト条件: 127°C1漫度100%、25気圧)なお、前記吊り
ビン2ノの蛇行形状は、上記力ゝ 実施例のようなくの字状にμF1らず、S字状とがジグ
ザグ状であってもよい。また、本発明は上記実施例の7
ラツトタイプ以外にもデュアルインラインタイプなどの
パッケージを有する半導体装置にも適用可能である〇 また、本発明による前述し7た効果は、少なくとも吊り
ビンおよびインナーリードにパンチ穴を設けておくこと
によって得られるものであり、さらに前述したように吊
りビンを蛇行状に形成しておくことによって一層効果的
である。
Table (A) Outer string test saponification (number of samples 24 (1,!it
) Table (B) Moisture resistance test (24 samples) (Solder jab soaking conditions = 260' for 0.10 seconds) (Brella Shafracar test conditions: 127°C 100%, 25 atm) In addition, the above The meandering shape of the hanging bottle 2 may not be in the dogleg shape μF1 as in the above embodiment, but may be in a zigzag shape with the S shape. In addition, the present invention is based on the seventh embodiment described above.
In addition to the rat type, it is also applicable to semiconductor devices having packages such as a dual in-line type. Also, the above-mentioned seven effects of the present invention can be obtained by providing punch holes in at least the hanging bottle and the inner lead. This is even more effective if the hanging bottle is formed in a meandering shape as described above.

〔発明の効果〕〔Effect of the invention〕

」:述したように木兄り)1の半(体装汎によれば、プ
ラスチックパッケージ内にlA部から水分が浸入しKl
: < 、パッケージ例形の変形が住じ虹く、モールド
樹脂と吊りビンお・よひインナーリードとの密着性がル
くて淑!間が生じ虹<、ill++湿性がpいなどの効
果が荀られる。
”: As mentioned above, according to Kisouhan, moisture entered the plastic package from the 1A area and the 1/2
: < , The shape of the package is very flexible, and the adhesion between the mold resin and the inner lead of the hanging bottle is very good! There is a pause, and effects such as rainbow<, ill++ and wetness are observed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従沫の半塔体装誦を示すもので、同図(B)は
上面図、同図(b)はfiiJ図(a)のB −B’l
jに沿う断面の拡大図、同図(c)はリードフト−ム部
を月シリ出してその一部を省略して示す平面図、第2図
は本発明に係る半導体装置の一実施シ11を示すもので
、同図(a) f町上平面、同図(b)は同図(a)の
H−B/塾に沿う断面の拡大図、同図(e)はリードフ
1/−ム%5を取り出してその−に1<を省略して示す
平面図、同図(d)、、 、(e)はそ刊、ぞハ、同図
(e)のパンチ穴I/3にモールド樹脂が入り込んで密
着している様子を拡大して示す平面図である。 2・・・半導体ぺ1/ツト、3・・・素子載置部、2゜
吊りビン、22.24・・・パンチ穴、23・・・イン
ナーリード。
Figure 1 shows the half-tower structure of the Congregation, where (B) is a top view, and (b) is B-B'l of fiiJ diagram (a).
FIG. 2 is an enlarged view of the cross section along the direction j, FIG. The figure (a) is a plan view of f-cho, the figure (b) is an enlarged view of the cross section along H-B/Juku in figure (a), and the figure (e) is the lead f 1/-m%. 5 is taken out and 1< is omitted from its -, the same figure (d), , , (e) is the same publication. FIG. 7 is a plan view showing an enlarged view of the state in which the parts are inserted and in close contact with each other. 2...Semiconductor plate 1/tsut, 3...Element mounting portion, 2° hanging bottle, 22.24...Punched hole, 23...Inner lead.

Claims (2)

【特許請求の範囲】[Claims] (1)リードフレームの素子載置部に外導体素子が固着
された状態でモールド樹脂によりパッケージングされて
なる半導体装置において、前記リードフレームの吊りピ
ンおよびインナーリードにそれぞれ穴が形成されている
ことを特徴とする半導体装置。
(1) In a semiconductor device that is packaged with molded resin with an outer conductor element fixed to the element mounting portion of a lead frame, holes are formed in each of the suspension pins and inner leads of the lead frame. A semiconductor device characterized by:
(2)前記吊りピンは蛇行状に形成さ力ていることを特
徴とする特許 載の半導体装置。
(2) The semiconductor device described in the patent is characterized in that the hanging pin is formed in a meandering shape.
JP58174801A 1983-09-21 1983-09-21 Semiconductor device Pending JPS6066454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58174801A JPS6066454A (en) 1983-09-21 1983-09-21 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58174801A JPS6066454A (en) 1983-09-21 1983-09-21 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS6066454A true JPS6066454A (en) 1985-04-16

Family

ID=15984898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58174801A Pending JPS6066454A (en) 1983-09-21 1983-09-21 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS6066454A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003019677A3 (en) * 2001-08-21 2004-04-29 Osram Opto Semiconductors Gmbh Conductor frame and housing for a radiation-emitting component

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614053B2 (en) * 1974-07-19 1981-04-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5614053B2 (en) * 1974-07-19 1981-04-02

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003019677A3 (en) * 2001-08-21 2004-04-29 Osram Opto Semiconductors Gmbh Conductor frame and housing for a radiation-emitting component
US7193299B2 (en) 2001-08-21 2007-03-20 Osram Opto Semiconductors Gmbh Conductor frame and housing for a radiation-emitting component, radiation-emitting component and display and/or illumination system using radiation-emitting components

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