JPS6063534A - 微細加工方法 - Google Patents

微細加工方法

Info

Publication number
JPS6063534A
JPS6063534A JP17159283A JP17159283A JPS6063534A JP S6063534 A JPS6063534 A JP S6063534A JP 17159283 A JP17159283 A JP 17159283A JP 17159283 A JP17159283 A JP 17159283A JP S6063534 A JPS6063534 A JP S6063534A
Authority
JP
Japan
Prior art keywords
film
resist
etched
resist film
patterned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17159283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0349102B2 (enrdf_load_stackoverflow
Inventor
Kyusaku Nishioka
西岡　久作
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP17159283A priority Critical patent/JPS6063534A/ja
Publication of JPS6063534A publication Critical patent/JPS6063534A/ja
Publication of JPH0349102B2 publication Critical patent/JPH0349102B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/094—Multilayer resist systems, e.g. planarising layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP17159283A 1983-09-17 1983-09-17 微細加工方法 Granted JPS6063534A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17159283A JPS6063534A (ja) 1983-09-17 1983-09-17 微細加工方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17159283A JPS6063534A (ja) 1983-09-17 1983-09-17 微細加工方法

Publications (2)

Publication Number Publication Date
JPS6063534A true JPS6063534A (ja) 1985-04-11
JPH0349102B2 JPH0349102B2 (enrdf_load_stackoverflow) 1991-07-26

Family

ID=15926013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17159283A Granted JPS6063534A (ja) 1983-09-17 1983-09-17 微細加工方法

Country Status (1)

Country Link
JP (1) JPS6063534A (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645759A (en) * 1979-09-20 1981-04-25 Matsushita Electric Ind Co Ltd Preparation of vapor growth film
JPS57136931A (en) * 1981-02-17 1982-08-24 Seiko Epson Corp Photochemical reaction device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5645759A (en) * 1979-09-20 1981-04-25 Matsushita Electric Ind Co Ltd Preparation of vapor growth film
JPS57136931A (en) * 1981-02-17 1982-08-24 Seiko Epson Corp Photochemical reaction device

Also Published As

Publication number Publication date
JPH0349102B2 (enrdf_load_stackoverflow) 1991-07-26

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