JPS6049546A - 複合分析装置 - Google Patents

複合分析装置

Info

Publication number
JPS6049546A
JPS6049546A JP58158306A JP15830683A JPS6049546A JP S6049546 A JPS6049546 A JP S6049546A JP 58158306 A JP58158306 A JP 58158306A JP 15830683 A JP15830683 A JP 15830683A JP S6049546 A JPS6049546 A JP S6049546A
Authority
JP
Japan
Prior art keywords
ion
electron
sample
gun
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58158306A
Other languages
English (en)
Japanese (ja)
Other versions
JPH057823B2 (enrdf_load_stackoverflow
Inventor
Akio Hori
彰男 堀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP58158306A priority Critical patent/JPS6049546A/ja
Publication of JPS6049546A publication Critical patent/JPS6049546A/ja
Publication of JPH057823B2 publication Critical patent/JPH057823B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP58158306A 1983-08-29 1983-08-29 複合分析装置 Granted JPS6049546A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58158306A JPS6049546A (ja) 1983-08-29 1983-08-29 複合分析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58158306A JPS6049546A (ja) 1983-08-29 1983-08-29 複合分析装置

Publications (2)

Publication Number Publication Date
JPS6049546A true JPS6049546A (ja) 1985-03-18
JPH057823B2 JPH057823B2 (enrdf_load_stackoverflow) 1993-01-29

Family

ID=15668742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58158306A Granted JPS6049546A (ja) 1983-08-29 1983-08-29 複合分析装置

Country Status (1)

Country Link
JP (1) JPS6049546A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215856U (enrdf_load_stackoverflow) * 1988-07-11 1990-01-31

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145186A (enrdf_load_stackoverflow) * 1974-05-10 1975-11-21
JPS58110956U (ja) * 1982-01-22 1983-07-28 株式会社日立製作所 荷電粒子照射装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50145186A (enrdf_load_stackoverflow) * 1974-05-10 1975-11-21
JPS58110956U (ja) * 1982-01-22 1983-07-28 株式会社日立製作所 荷電粒子照射装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215856U (enrdf_load_stackoverflow) * 1988-07-11 1990-01-31

Also Published As

Publication number Publication date
JPH057823B2 (enrdf_load_stackoverflow) 1993-01-29

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