JPS6048241U - Wafer carrier - Google Patents

Wafer carrier

Info

Publication number
JPS6048241U
JPS6048241U JP13995083U JP13995083U JPS6048241U JP S6048241 U JPS6048241 U JP S6048241U JP 13995083 U JP13995083 U JP 13995083U JP 13995083 U JP13995083 U JP 13995083U JP S6048241 U JPS6048241 U JP S6048241U
Authority
JP
Japan
Prior art keywords
wafer carrier
read
memory
contact terminal
print
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13995083U
Other languages
Japanese (ja)
Inventor
大槻　信雄
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP13995083U priority Critical patent/JPS6048241U/en
Publication of JPS6048241U publication Critical patent/JPS6048241U/en
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は従来のウェーハキャリアの一例を示す外観図、
第２図は本考案のウェーハキャリアの一実施例を示す外
観図、第３図は第２図に示すプリント基板の拡大外観図
である。 １．１１・・・・・・ウェーハキャリア本体、２．１２
・・・・・・溝部、３，１３・・・・・・ウェーハ、４
，１４・・・・・・底部、５，１５・・・・・・側部、
６，１６・・・・・・切欠部、７・・・・・・通し番号
表示部、１７・・・・・・プリント基板、１８・・・・
・・ＩＣソケット、１９・・・・・・接触端子部、２０
・・・・・・リードオンリメモリ。Figure 1 is an external view showing an example of a conventional wafer carrier.
FIG. 2 is an external view showing an embodiment of the wafer carrier of the present invention, and FIG. 3 is an enlarged external view of the printed circuit board shown in FIG. 1.11...Wafer carrier body, 2.12
...Groove, 3, 13...Wafer, 4
, 14... bottom, 5, 15... side,
6, 16...Notch, 7...Serial number display section, 17...Printed circuit board, 18...
...IC socket, 19...Contact terminal section, 20
...Read-only memory.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウェーハを収納するための複数の溝部と切欠部を有する
底部とを有するウェーハキャリア本体と、リードオンリ
メモリが搭載され前記リードオンリメモリからの信号を
加工装置へ伝達するための接触端子部を有するプリント
基板とを含むことを特徴とするウェーハキャリア。A wafer carrier body having a bottom portion having a plurality of grooves and a cutout portion for storing wafers, and a print having a read-only memory mounted therein and a contact terminal portion for transmitting signals from the read-only memory to processing equipment. A wafer carrier comprising a substrate.
JP13995083U 1983-09-09 1983-09-09 Wafer carrier Pending JPS6048241U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13995083U JPS6048241U (en) 1983-09-09 1983-09-09 Wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13995083U JPS6048241U (en) 1983-09-09 1983-09-09 Wafer carrier

Publications (1)

Publication Number Publication Date
JPS6048241U true JPS6048241U (en) 1985-04-04

Family

ID=30313507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13995083U Pending JPS6048241U (en) 1983-09-09 1983-09-09 Wafer carrier

Country Status (1)

Country Link
JP (1) JPS6048241U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06278816A (en) * 1993-12-13 1994-10-04 Tokyo Electron Ltd Object transport system
JPH0761538A (en) * 1993-12-13 1995-03-07 Tokyo Electron Ltd Method for carrying and handling article

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06278816A (en) * 1993-12-13 1994-10-04 Tokyo Electron Ltd Object transport system
JPH0761538A (en) * 1993-12-13 1995-03-07 Tokyo Electron Ltd Method for carrying and handling article

Similar Documents

Publication Publication Date Title
JPS6048241U (en) Wafer carrier
JPS60141129U (en) Terminal structure of leadless chip carrier
JPS5953468U (en) data card
JPS6066038U (en) IC socket for wrapping
JPS6061742U (en) integrated circuit device
JPS60112089U (en) Socket for semiconductor device
JPS58158497U (en) Low noise hybrid integrated circuit
JPS583042U (en) IC package
JPS59130389U (en) IC socket
JPS59192768U (en) data card
JPS6142849U (en) semiconductor equipment
JPS59185866U (en) printed circuit board
JPS6073244U (en) IC fixing device
JPS5936259U (en) Polygonal Pinch Tupkyaria
JPS6115752U (en) Mounting structure of flat package IC
JPS5832657U (en) semiconductor equipment
JPS60141138U (en) IC socket
JPS6096793U (en) Integrated circuit device mounting equipment
JPS6042757U (en) hybrid circuit module
JPS5839049U (en) Chippukiyariya
JPS5931266U (en) Connection terminal of printed wiring board
JPS59105793U (en) IC socket
JPS58144854U (en) small electronic components
JPS59112489U (en) connector
JPS59127258U (en) flexible printed circuit board