JPH06278816A - Object transport system - Google Patents
Object transport systemInfo
- Publication number
- JPH06278816A JPH06278816A JP5311909A JP31190993A JPH06278816A JP H06278816 A JPH06278816 A JP H06278816A JP 5311909 A JP5311909 A JP 5311909A JP 31190993 A JP31190993 A JP 31190993A JP H06278816 A JPH06278816 A JP H06278816A
- Authority
- JP
- Japan
- Prior art keywords
- storage device
- article
- article transport
- stored
- articles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012545 processing Methods 0.000 claims abstract description 43
- 238000004891 communication Methods 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims abstract description 21
- 230000032258 transport Effects 0.000 claims abstract 64
- 238000004519 manufacturing process Methods 0.000 claims description 37
- 238000012546 transfer Methods 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 11
- 235000012431 wafers Nutrition 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 230000004308 accommodation Effects 0.000 abstract 4
- 238000007726 management method Methods 0.000 description 8
- 238000004886 process control Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 101100321304 Bacillus subtilis (strain 168) yxdM gene Proteins 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000013404 process transfer Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は、製造工場等において製
品および製造部品等の物品の搬送に利用される多機能物
品搬送用収納装置を用いた物品搬送システムに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an article carrying system using a storage device for carrying a multifunctional article used for carrying articles such as products and manufactured parts in a manufacturing factory.
【０００２】[0002]
【従来の技術】一般に製造工場内等では、製造途中の半
製品および部品等はそれぞれの物品の形状に合せて形成
されたラック、トレ―、ボックス等の物品搬送用収納装
置に収納され各工程間を搬送される。2. Description of the Related Art Generally, in a manufacturing plant or the like, semi-finished products and parts in the process of being manufactured are stored in a storage device for transporting articles such as racks, trays, boxes, etc., which are formed in accordance with the shapes of the respective articles. Transported between.
【０００３】このような製造工場内における工程管理で
は、上述のような物品搬送用収納装置内に収納された複
数の物品を１つの単位として取扱うことが多く、自動化
された製造ラインでは、工程管理用コンピュ―タによっ
てこれら１つ１つの物品搬送用収納装置が例えばバ―コ
―ド等により識別され監視される。そしてこれらの情報
はすべて上位コンピュ―タである工場管理用コンピュ―
タへ送られてその管理が行われている。In the process control in such a manufacturing factory, a plurality of articles stored in the above-mentioned article transport storage device are often handled as one unit, and in an automated production line, the process control is performed. The storage device for transporting articles one by one is identified and monitored by a computer for bar code, for example. And all of this information is the computer for factory management which is the upper computer.
It is sent to the factory and managed.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上述の
従来の物品搬送用収納装置を用いた工場等においては、
管理用コンピュ―タに情報が集中するため、管理用コン
ピュ―タに故障が発生した場合に生産ラインがすべて停
止してしまう等の問題と、これらの管理用コンピュ―タ
の負担が増大し、このため自動化が制限されたり、工程
変更等の変更が困難になる等の問題がある。However, in a factory or the like using the above-described conventional article storage device,
Since information is concentrated on the management computer, problems such as all production lines being stopped when a failure occurs in the management computer and the burden on these management computers increase, For this reason, there are problems that automation is limited, and it becomes difficult to make changes such as process changes.
【０００５】本発明はかかる従来の問題に対処してなさ
れたもので、自動化の促進、工程変更等の自由度の増大
を図ることのできる物品搬送システムを提供しようとす
るものである。The present invention has been made in consideration of the above conventional problems, and an object of the present invention is to provide an article conveying system capable of promoting automation and increasing the degree of freedom in process changes.
【０００６】[0006]
【課題を解決するための手段】すなわち、第１の発明の
物品搬送システムは、製造工程間で物品を搬送する物品
搬送システムであって、収納する物品の形状および数に
応じて形成された物品搬送用収納装置と、外部から書き
込み読み出し自在とされ、前記物品搬送用収納装置内に
収納された物品についての情報を記憶し、前記物品搬送
用収納装置に設けられた記憶装置と、前記製造工程間で
前記物品搬送用収納装置を搬送する搬送ロボットと、こ
の搬送ロボットにより搬送される前記物品搬送用収納装
置がロードされる前記製造工程の処理装置と、この処理
装置と前記物品搬送用収納装置との間で光による通信を
行い前記記憶装置に記憶された情報を読み出す通信手段
とを具備し、この通信手段の読み出した情報に従って、
前記物品搬送用収納装置に収納された物品の処理を前記
処理装置により行うことを特徴とする。That is, the article carrying system of the first invention is an article carrying system for carrying articles between manufacturing processes, wherein the articles are formed according to the shape and number of articles to be stored. A storage device for transport, a storage device which is externally writable and readable, stores information about the articles stored in the storage device for article transport, and is provided in the storage device for article transport; A transport robot for transporting the article transport storage device between the two, a processing device in the manufacturing process in which the article transport storage device transported by the transport robot is loaded, the processing device and the article transport storage device And a communication unit for reading information stored in the storage device by performing optical communication with the storage device, and according to the information read by the communication unit,
It is characterized in that the article stored in the article transport storage apparatus is processed by the processing apparatus.
【０００７】第２の発明の物品搬送システムは、製造工
程間で半導体ウエハを搬送する物品搬送システムであっ
て、収納する半導体ウエハの形状および数に応じて形成
された物品搬送用収納装置と、この物品搬送用収納装置
に設けられ外部から書き込み読み出し自在とされ前記物
品搬送用収納装置内に収納された半導体ウエハについて
の情報を記憶する記憶装置と、前記製造工程間で前記物
品搬送用収納装置を搬送する搬送ロボットと、この搬送
ロボットにより搬送される前記物品搬送用収納装置がロ
ードされる前記製造工程の処理装置と前記物品搬送用収
納装置との間で光による通信を行い前記記憶装置に記憶
された情報を読み出す通信手段とを具備し、この通信手
段の読み出した情報に従って、前記物品搬送用収納装置
に収納された半導体ウエハの処理を前記処理装置により
行うことを特徴とする。An article transfer system according to a second aspect of the present invention is an article transfer system for transferring a semiconductor wafer between manufacturing steps, and an article transfer storage device formed according to the shape and number of semiconductor wafers to be stored. A storage device which is provided in the article transport accommodating apparatus and which is readable and writable from the outside and stores information about semiconductor wafers accommodated in the article transport accommodating apparatus; and the article transport accommodating apparatus between the manufacturing steps. And a storage robot for carrying out optical communication between a transport robot for transporting an object, a processing device in the manufacturing process in which the storage device for transporting the transport robot is loaded, and the storage device for transporting the article. A semiconductor unit stored in the storage device for article transportation according to the information read by the communication unit. Wafer processing and performing by said processing unit.
【０００８】第３の発明の物品搬送システムは、製造工
程間で物品を搬送する物品搬送システムであって、収納
する物品の形状および数に応じて形成された物品搬送用
収納装置と、この物品搬送用収納装置に設けられ外部か
ら書き込み読み出し自在とされ前記物品搬送用収納装置
内に収納された物品についての情報および各製造工程の
状況に応じた処理プログラムを記憶する記憶装置と、前
記製造工程間で前記物品搬送用収納装置を搬送する搬送
ロボットと、この搬送ロボットにより搬送される前記物
品搬送用収納装置がロードされる前記製造工程の処理装
置と前記物品搬送用収納装置との間で光による通信を行
い前記記憶装置に記憶された情報を読み出す通信手段と
を具備し、この通信手段の読み出した情報に従って、前
記物品搬送用収納装置に収納された物品の処理を前記処
理装置により行うことを特徴とする。An article transporting system of a third invention is an article transporting system for transporting articles between manufacturing processes, and an article transporting storage device formed according to the shape and number of articles to be stored, and the article transporting system. A storage device which is provided in the transport storage device and which is readable and writable from the outside and stores information about the articles stored in the article transport storage device and a processing program according to the status of each manufacturing process; A transfer robot that transfers the article transfer storage device between them, and an optical transfer between the article transfer storage device that is loaded by the transfer robot that is transferred by the transfer robot and the article transfer storage device. And a communication means for reading information stored in the storage device by performing communication by means of the communication means, and the article transport storage according to the information read by the communication means. And performing processing of articles stored in location by the processing unit.
【０００９】第４の発明の物品搬送システムは、クリー
ンルーム内に配置され、製造工程間で物品を搬送する物
品搬送システムであって、収納する物品の形状および数
に応じて形成された物品搬送用収納装置と、この物品搬
送用収納装置に設けられ外部から書き込み読み出し自在
とされ前記物品搬送用収納装置内に収納された物品につ
いての情報を記憶する記憶装置と、前記製造工程間で前
記物品搬送用収納装置を搬送する搬送ロボットと、この
搬送ロボットにより搬送される前記物品搬送用収納装置
がロードされる前記製造工程の処理装置と前記物品搬送
用収納装置との間で光による通信を行い前記記憶装置に
記憶された情報を読み出す通信手段とを具備し、この通
信手段の読み出した情報に従って、前記物品搬送用収納
装置に収納された物品の処理を前記処理装置により行う
ことを特徴とする。An article conveying system according to a fourth aspect of the present invention is an article conveying system which is arranged in a clean room and conveys articles between manufacturing steps. The article conveying system is formed according to the shape and number of articles to be stored. A storage device, a storage device that is provided in the storage device for transporting articles, is readable and writable from the outside, and stores information about the articles stored in the storage device for transporting articles, and the storage device for transporting the articles between the manufacturing processes. For carrying out optical communication between the transfer robot for transferring the storage device for storage, the processing device in the manufacturing process in which the storage device for transferring the article conveyed by the transfer robot is loaded, and the storage device for transferring the article. A storage means for reading the information stored in the storage device, and the storage means for storing articles is stored in accordance with the information read by the communication means. And performing processing of goods by the processor.
【００１０】第５の発明の物品搬送システムは、製造工
程間で物品を搬送する物品搬送システムであって、収納
する物品の形状および数に応じて形成された物品搬送用
収納装置と、この物品搬送用収納装置に設けられ外部か
ら書き込み読み出し自在とされ前記物品搬送用収納装置
内に収納された物品についての情報を記憶する記憶装置
と、前記製造工程間で前記物品搬送用収納装置を搬送す
る搬送ロボットと、この搬送ロボットにより搬送される
前記物品搬送用収納装置がロードされる前記製造工程の
処理装置と前記物品搬送用収納装置との間で光による通
信を行い前記記憶装置に記憶された情報を読み出す通信
手段と、複数の前記物品搬送用収納装置を収納可能に構
成されたストッカとを具備し、前記搬送ロボットによ
り、前記ストッカから前記物品搬送用収納装置を取り出
して前記処理装置へ搬送し、前記通信手段の読み出した
情報に従って、前記物品搬送用収納装置に収納された物
品の処理を前記処理装置により行うことを特徴とする。An article carrying system according to a fifth aspect of the present invention is an article carrying system for carrying articles between manufacturing processes, comprising an article carrying storage device formed according to the shape and number of articles to be housed, and the article carrying system. A storage device, which is provided in the storage device for transport and is readable and writable from the outside, for storing information about the items stored in the storage device for transporting the item, and the storage device for transporting the item between the manufacturing steps. Optical communication is performed between the transfer robot, the processing device in the manufacturing process in which the storage device for transporting articles transported by the transport robot is loaded, and the storage device for storage of articles stored in the storage device. The storage robot is provided with a communication unit for reading information and a stocker configured to store a plurality of the storage devices for transporting articles, and the storage robot is operated by the transport robot. The removed an article carrying storage device and transported to the processing device in accordance with the information read out of the communication means, and performing processing of articles stored in the article carrying storage device by the processor.
【００１１】[0011]
【作用】上記構成の本発明の物品搬送システムでは、外
部からの光による通信による書き込み読み出し自在な記
憶装置に物品搬送用収納装置内に収納された物品の情報
が、各工程等において非接触なアクセスによって書き込
まれ、これらの情報が物品搬送用収納装置と共に搬送さ
れるので、自動化の促進、工程変更等の自由度の増大を
図ること。In the article transporting system of the present invention having the above-described structure, information of articles stored in the article transporting storage device in the storage device which is writable and readable by communication by light from the outside does not contact in each process. Since this information is written by access and is conveyed together with the storage device for article conveyance, automation should be promoted and the degree of freedom for process changes, etc. should be increased.
【００１２】[0012]
【実施例】以下本発明システムの実施例を図面を参照し
て説明する。Embodiments of the system of the present invention will be described below with reference to the drawings.
【００１３】図１および図２は製造工場内等で用いられ
る製造部品を収納する搬送用のボックス型の物品搬送用
収納装置を示すもので、この実施例の物品搬送用収納装
置１は、ボックス型に形成された物品収納部２と、内部
にマイクロコンピュ―タ３を収容するマイクロコンピュ
―タ収容部４とから構成されている。FIG. 1 and FIG. 2 show a box-shaped article transport storage device for transporting manufacturing parts used in a manufacturing plant or the like. The article transport storage device 1 of this embodiment is a box. It is composed of an article storage section 2 formed in a mold and a micro computer storage section 4 for storing a micro computer 3 therein.
【００１４】また、マイクロコンピュ―タ３は、プロト
コル等を記憶する内部制御用ＲＯＭ５、情報記憶用のＲ
ＡＭ６、演算用ＣＰＵ７、発光素子８および受光素子９
を備え、動作制御は例えば外部と光通信によって通信を
行う通信用ＬＳＩ１０、バックアップ電源１１および充
電用の太陽電池１２とから構成されている。The microcomputer 3 includes an internal control ROM 5 for storing protocols and the like, and an R for information storage.
AM6, arithmetic CPU7, light emitting element 8 and light receiving element 9
The operation control includes a communication LSI 10 that communicates with the outside by optical communication, a backup power supply 11, and a solar cell 12 for charging.
【００１５】上記構成のこの実施例の物品搬送用収納装
置では、外部との光通信によりＲＡＭ６内の情報の書き
込みおよび読み出しが行われ、例えばロット番号、品
名、部品数、処理プログラム、プロセスフロ―、現在プ
ロセス名、現在処理装置名、測定デ―タ等がＲＡＭ６内
に記憶され、これらの情報は太陽電池１２によって充電
されるバックアップ電源１１からの電気により保持さ
れ、物品収納部２内の物品と共に搬送される。In the article transport storage device of this embodiment having the above-mentioned configuration, the information in the RAM 6 is written and read out by optical communication with the outside. For example, lot number, product name, number of parts, processing program, process flow. , The current process name, the current processing device name, the measurement data, etc. are stored in the RAM 6, and this information is held by electricity from the backup power source 11 charged by the solar cell 12, and the items in the item storage unit 2 are stored. Will be transported with.
【００１６】図３は上記説明の物品搬送用収納装置を用
いて自動化された工場内の概要を示すもので、各工程毎
に、工場管理用コンピュ―タとオンラインで接続された
工程管理用コンピュ―タ（図示せず）を備え物品搬送用
収納装置１を収納するブロックストッカ１３が配置さ
れ、各工程間は工程間搬送システム１４によって接続さ
れている。FIG. 3 shows an outline of an inside of a factory which is automated by using the above-described article transport storage device. For each process, a process management computer connected online with a factory management computer. A block stocker 13 having a data storage unit (not shown) for accommodating the article transport accommodating storage device 1 is arranged, and each process is connected by an inter-process transport system 14.
【００１７】この工程間搬送システム１４によって搬送
された物品搬送用収納装置１は、まずブロックストッカ
１３に配置された受取り用ブロックチェッカ１５上に載
置され、ここで光通信により必要な情報の伝達が行わ
れ、ブロックストッカ１３内に収容される。そして、ブ
ロックストッカ１３内では、太陽電池１２に光が照射さ
れ、充電が行われる。The article transport storage device 1 transported by the inter-process transport system 14 is first placed on the receiving block checker 15 arranged in the block stocker 13, where the necessary information is transmitted by optical communication. Is carried out and is stored in the block stocker 13. Then, in the block stocker 13, the solar cell 12 is irradiated with light to be charged.
【００１８】次に、ブロックストッカ１３内の工程管理
用コンピュ―タは、工程内の状況に応じてＲＡＭ６に処
理装置名、処理プログラム等の情報を書き込み、この後
物品搬送用収納装置１を受渡し用ブロックチェッカ１６
に載置し、搬送ロボット１７に受渡す。Next, the process management computer in the block stocker 13 writes information such as the processing device name and processing program in the RAM 6 according to the situation in the process, and then delivers the article transfer storage device 1. Block checker 16
Then, it is delivered to the transfer robot 17.
【００１９】搬送ロボット１７は、物品搬送用収納装置
１を収容し、この物品搬送用収納装置１と光による通信
を行い、ＲＡＭ６内の処理装置名の情報を読み出して、
物品搬送用収納装置１をその処理装置へ搬送しロ―ドす
る。The transfer robot 17 accommodates the article transport storage device 1, communicates with the article transport storage device 1 by light, reads the information of the processing device name in the RAM 6,
The storage device 1 for transporting articles is transported to the processing device and loaded.
【００２０】物品搬送用収納装置１をロ―ドされた処理
装置１８は、物品搬送用収納装置１と光による通信を行
い、ＲＡＭ６内の処理プログラムを読み出し、この処理
プログラムに従って物品収納部２内の物品の処理を行
い、処理を終了した後は、処理内容あるいは測定デ―タ
等をＲＡＭ６に書き込む。The processing device 18 loaded with the article transport accommodating apparatus 1 communicates with the article transport accommodating apparatus 1 by light, reads the processing program in the RAM 6, and stores the article accommodating section 2 in accordance with the processing program. After the processing of the article is completed and the processing is completed, the processing content or measurement data is written in the RAM 6.
【００２１】この後物品搬送用収納装置１は、再び搬送
ロボット１７によりブロックストッカ１３に搬送され、
ここで次の工程等の情報がＲＡＭ６に書き込まれ、払い
出し用ブロックチェッカ１９から工程間搬送システム１
４に払出され、次の工程へ搬送される。Thereafter, the article transport storage device 1 is again transported to the block stocker 13 by the transport robot 17,
Here, information of the next process and the like is written in the RAM 6, and the inter-process transfer system 1 from the payout block checker 19 is written.
It is delivered to the next process.
【００２２】上述のように、この実施例の物品搬送シス
テムでは、物品搬送用収納装置１内のマイクロコンピュ
―タ３により、物品収納部２内に収納された物品につい
ての情報が記憶される。これらの情報は物品と共に搬送
されるので、情報を分散させることができ、管理用コン
ピュ―タの負担を従来に比べて大幅に低減することがで
きる。また、外部との通信および充電は、光によって行
われるため、電気的な接続端子が不要であり、接続端子
の汚れ等による接続不良が生じたりすることもなく、接
続端子の挿入時等に生じる塵の発生もないため、クリン
ル―ム内等においても使用することができる。As described above, in the article transport system of this embodiment, the microcomputer 3 in the article transport storage device 1 stores information about the articles stored in the article storage section 2. Since these pieces of information are conveyed together with the articles, the information can be dispersed and the burden on the management computer can be significantly reduced as compared with the conventional case. Further, since communication and charging with the outside are performed by light, an electrical connection terminal is not required, and a connection failure due to dirt or the like of the connection terminal does not occur, and occurs when the connection terminal is inserted or the like. Since it does not generate dust, it can be used even in clean rooms.
【００２３】図４は他の実施例として半導体ウエハ搬送
用の物品搬送用収納装置２１を示すもので、この実施例
の物品搬送用収納装置２１では、複数の半導体ウエハを
収納する物品収納部２２と、この物品収納部２２の基板
２２ａ上に脱着自在に配置され内部にマイクロコンピュ
―タ（図示せず）を収容するマイクロコンピュ―タ収容
部２３とから構成されている。FIG. 4 shows, as another embodiment, an article transport accommodating device 21 for transporting semiconductor wafers. In the article transport accommodating device 21 of this embodiment, an article accommodating portion 22 for accommodating a plurality of semiconductor wafers is provided. And a micro-computer accommodating portion 23 that is detachably arranged on the substrate 22a of the article accommodating portion 22 and accommodates a micro computer (not shown) inside.
【００２４】そしてマイクロコンピュ―タ収容部２３内
のマイクロコンピュ―タは、前述の実施例と同様に構成
されており、外部通信用の発光素子２４および受光素子
２５と、充電用の太陽電池２６とを備えている。The micro-computer in the micro-computer accommodating portion 23 has the same structure as that of the above-mentioned embodiment, and the light-emitting element 24 and the light-receiving element 25 for external communication and the solar cell 26 for charging. It has and.
【００２５】またこの物品搬送用収納装置２１は、基板
２２ａに設けられた凹部によって搬送ロボットに握持さ
れるため、搬送ロボットに握持位置を認識させるための
発光素子２７ａ、２７ｂが配置されている。Further, since the storage device 21 for transporting articles is gripped by the transport robot by the recess provided in the substrate 22a, the light emitting elements 27a, 27b for recognizing the gripping position by the transport robot are arranged. There is.
【００２６】上記構成の物品搬送用収納装置を用いた物
品搬送システムでも、前述の実施例と同様な効果を得る
ことができ、またマイクロコンピュ―タ収容部２３が脱
着自在とされているため、高温処理等を行う場合は、こ
のマイクロコンピュ―タ収容部２３を取りはずすことも
でき、高温等によりマイクロコンピュ―タが損傷を受け
ることを防止することができる。さらに、搬送ロボット
に握持位置を示すための発光素子２７ａ、２７ｂが配置
されているので、搬送ロボットはこの物品搬送用収納装
置２１を容易に握持することができる。An article conveying system using the article conveying accommodating device having the above structure can also obtain the same effects as those of the above-mentioned embodiment, and the microcomputer computer accommodating portion 23 is detachable. In the case of performing high temperature processing or the like, the micro computer housing portion 23 can be removed, and it is possible to prevent the micro computer from being damaged by high temperature or the like. Further, since the transport robot is provided with the light emitting elements 27a and 27b for indicating the grip position, the transport robot can easily grip the article transport storage device 21.
【００２７】[0027]
【発明の効果】以上述べたように本発明の物品搬送シス
テムでは、外部からの光による通信による書き込み読み
出し自在とされた記憶装置を備えているので、物品搬送
用収納装置の記憶装置に非接触でアクセスすることが可
能であり、自動化の促進、工程変更等の自由度の増大を
図ることができる。As described above, since the article transport system of the present invention is provided with the storage device which can be written and read by the communication by the light from the outside, it does not contact the storage device of the article transport storage device. It is possible to access with, and it is possible to promote automation and increase the degree of freedom such as process change.
【図１】本発明の一実施例の物品搬送用収納装置の構成
を示す斜視図。FIG. 1 is a perspective view showing the configuration of an article transport storage device according to an embodiment of the present invention.
【図２】図１の要部を示すブロック図。FIG. 2 is a block diagram showing a main part of FIG.
【図３】図１に示す物品搬送用収納装置を用いた物品搬
送システムを示す説明図。FIG. 3 is an explanatory view showing an article carrying system using the article carrying storage device shown in FIG.
【図４】他の実施例の物品搬送用収納装置を示す斜視
図。FIG. 4 is a perspective view showing an article transport storage device according to another embodiment.
１ 物品搬送用収納装置 ２ 物品収納部 ４ マイクロコンピュ―タ収容部 ８ 発光素子 ９ 受光素子 １２ 太陽電池 DESCRIPTION OF SYMBOLS 1 Storage device for conveying goods 2 Storage part 4 Microcomputer storage part 8 Light emitting element 9 Light receiving element 12 Solar cell
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.5 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｌ 21/68 Ａ 8418−4Ｍ // Ｂ６５Ｇ 43/00 Ａ ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 5 Identification code Office reference number FI technical display location H01L 21/68 A 8418-4M // B65G 43/00 A
Claims (15)
ステムであって、 収納する物品の形状および数に応じて形成された物品搬
送用収納装置と、 外部から書き込み読み出し自在とされ、前記物品搬送用
収納装置内に収納された物品についての情報を記憶し、
前記物品搬送用収納装置に設けられた記憶装置と、 前記製造工程間で前記物品搬送用収納装置を搬送する搬
送ロボットと、 この搬送ロボットにより搬送される前記物品搬送用収納
装置がロードされる前記製造工程の処理装置と、 この処理装置と前記物品搬送用収納装置との間で光によ
る通信を行い前記記憶装置に記憶された情報を読み出す
通信手段とを具備し、 この通信手段の読み出した情報に従って、前記物品搬送
用収納装置に収納された物品の処理を前記処理装置によ
り行うことを特徴とする物品搬送システム。1. An article transport system for transporting articles between manufacturing steps, comprising: an article transport storage device formed according to the shape and number of articles to be stored; Stores information about items stored in the transport storage device,
A storage device provided in the article transport storage device, a transport robot that transports the article transport storage device between the manufacturing steps, and the article transport storage device that is transported by the transport robot is loaded. The processing device in the manufacturing process, and the communication device for performing optical communication between the processing device and the article transport accommodating device to read the information stored in the storage device, the information read by the communication device. According to the above, the article transport system is characterized in that the article stored in the article transport storage apparatus is processed by the processing apparatus.
特徴とする請求項１記載の物品搬送システム。2. The article transport system according to claim 1, wherein the article is a semiconductor wafer.
り構成されることを特徴とする請求項１記載の物品搬送
システム。3. The article transport system according to claim 1, wherein the storage device is composed of a ROM or a RAM.
Ｍ及び光通信用ＬＳＩにより構成されることを特徴とす
る請求項１記載の物品搬送システム。4. The storage device is a CPU, ROM, RA
The article transport system according to claim 1, wherein the article transport system is configured by M and an LSI for optical communication.
用いて光通信を行うことを特徴とする請求項１記載の物
品搬送システム。5. The article conveying system according to claim 1, wherein the communication unit performs optical communication using a light emitting element and a light receiving element.
手段をバックアップするバックアップ電源が設けられて
いることを特徴とする請求項１記載の物品搬送システ
ム。6. The article transport system according to claim 1, wherein the article transport storage device is provided with a backup power supply for backing up the storage means.
に変換する太陽電池が設けられていることを特徴とする
請求項１記載の物品搬送システム。7. The article transport system according to claim 1, wherein the article transport storage device is provided with a solar cell that converts light into electricity.
タとオンラインで接続されていることを特徴とする請求
項１記載の物品搬送システム。8. The article transport system according to claim 1, wherein the manufacturing process is connected to a process management computer online.
納装置に設けられた凹部を握持するよう構成されたこと
を特徴とする請求項１記載の物品搬送システム。9. The article transport system according to claim 1, wherein the transport robot is configured to grip a recess provided in the article transport storage device.
送ロボットに握持位置を認識させるための発光素子が配
置されていることを特徴とする請求項１記載の物品搬送
システム。10. The article transport system according to claim 1, wherein a light emitting element for causing the transport robot to recognize a gripping position is arranged in the article transport storage device.
品に応じたロット番号、品名、物品数、処理プログラ
ム、プロセスフロー、現在プロセス名、現在処理装置
名、測定データの少なくとも１つであることを特徴とす
る請求項１記載の物品搬送システム。11. The information stored in the storage device is at least one of a lot number, a product name, the number of products, a processing program, a process flow, a current process name, a current processing device name, and measurement data according to the product. The article transport system according to claim 1, wherein:
物品搬送システムであって、 収納する半導体ウエハの形状および数に応じて形成され
た物品搬送用収納装置と、 この物品搬送用収納装置に設けられ外部から書き込み読
み出し自在とされ前記物品搬送用収納装置内に収納され
た半導体ウエハについての情報を記憶する記憶装置と、 前記製造工程間で前記物品搬送用収納装置を搬送する搬
送ロボットと、 この搬送ロボットにより搬送される前記物品搬送用収納
装置がロードされる前記製造工程の処理装置と前記物品
搬送用収納装置との間で光による通信を行い前記記憶装
置に記憶された情報を読み出す通信手段とを具備し、 この通信手段の読み出した情報に従って、前記物品搬送
用収納装置に収納された半導体ウエハの処理を前記処理
装置により行うことを特徴とする物品搬送システム。12. An article transfer system for transferring a semiconductor wafer between manufacturing steps, comprising: an article transfer storage device formed according to the shape and number of semiconductor wafers to be stored; and an article transfer storage device provided in the article transfer storage device. A storage device that stores information about the semiconductor wafers stored in the article transport storage device and is externally writable and readable; and a transport robot that transports the article transport storage device between the manufacturing steps, Communication means for performing optical communication between the processing device in the manufacturing process, in which the storage device for transporting articles transported by the transport robot is loaded, and the storage device for transporting articles, and reading out information stored in the storage device According to the information read by the communication means, processing of the semiconductor wafer stored in the storage device for article transportation is performed by the processing device. Article transport system, which comprises carrying out the.
システムであって、 収納する物品の形状および数に応じて形成された物品搬
送用収納装置と、 この物品搬送用収納装置に設けられ外部から書き込み読
み出し自在とされ前記物品搬送用収納装置内に収納され
た物品についての情報および各製造工程の状況に応じた
処理プログラムを記憶する記憶装置と、 前記製造工程間で前記物品搬送用収納装置を搬送する搬
送ロボットと、 この搬送ロボットにより搬送される前記物品搬送用収納
装置がロードされる前記製造工程の処理装置と前記物品
搬送用収納装置との間で光による通信を行い前記記憶装
置に記憶された情報を読み出す通信手段とを具備し、 この通信手段の読み出した情報に従って、前記物品搬送
用収納装置に収納された物品の処理を前記処理装置によ
り行うことを特徴とする物品搬送システム。13. An article transport system for transporting articles between manufacturing steps, comprising: an article transport storage device formed according to the shape and number of articles to be stored; and an external device provided in the article transport storage device. A storage device for storing information about articles stored in the article transport storage device and a processing program according to the status of each manufacturing process, and the article transport storage device between the manufacturing steps. And a transfer robot that transfers the optical transfer between the article transfer storage device loaded by the transfer robot and the processing device in the manufacturing process in which the article transfer storage device is loaded and the article transfer storage device. Communication means for reading the stored information, and processing of the articles stored in the article transport storage device according to the information read by the communication means. Article transport system, which comprises carrying out by the processor.
程間で物品を搬送する物品搬送システムであって、 収納する物品の形状および数に応じて形成された物品搬
送用収納装置と、 この物品搬送用収納装置に設けられ外部から書き込み読
み出し自在とされ前記物品搬送用収納装置内に収納され
た物品についての情報を記憶する記憶装置と、 前記製造工程間で前記物品搬送用収納装置を搬送する搬
送ロボットと、 この搬送ロボットにより搬送される前記物品搬送用収納
装置がロードされる前記製造工程の処理装置と前記物品
搬送用収納装置との間で光による通信を行い前記記憶装
置に記憶された情報を読み出す通信手段とを具備し、 この通信手段の読み出した情報に従って、前記物品搬送
用収納装置に収納された物品の処理を前記処理装置によ
り行うことを特徴とする物品搬送システム。14. An article conveying system which is arranged in a clean room and conveys articles between manufacturing steps, wherein the article conveying storage device is formed in accordance with the shape and number of articles to be contained, and the article conveying system. A storage device that is provided in the storage device and is readable and writable from the outside and that stores information about the articles stored in the storage device for transporting articles; and a transport robot that transports the storage device for transporting articles between the manufacturing processes. And the information stored in the storage device is communicated by light between the processing device in the manufacturing process in which the storage device for transporting articles transported by the transport robot is loaded and the storage device for transporting articles. Communication means for reading, and processing the articles stored in the storage device for article transport to the processing device according to the information read by the communication means. Article transport system which is characterized in that Ri.
システムであって、 収納する物品の形状および数に応じて形成された物品搬
送用収納装置と、 この物品搬送用収納装置に設けられ外部から書き込み読
み出し自在とされ前記物品搬送用収納装置内に収納され
た物品についての情報を記憶する記憶装置と、 前記製造工程間で前記物品搬送用収納装置を搬送する搬
送ロボットと、 この搬送ロボットにより搬送される前記物品搬送用収納
装置がロードされる前記製造工程の処理装置と前記物品
搬送用収納装置との間で光による通信を行い前記記憶装
置に記憶された情報を読み出す通信手段と、 複数の前記物品搬送用収納装置を収納可能に構成された
ストッカとを具備し、 前記搬送ロボットにより、前記ストッカから前記物品搬
送用収納装置を取り出して前記処理装置へ搬送し、前記
通信手段の読み出した情報に従って、前記物品搬送用収
納装置に収納された物品の処理を前記処理装置により行
うことを特徴とする物品搬送システム。15. An article transport system for transporting articles between manufacturing steps, comprising an article transport storage device formed according to the shape and number of articles to be stored, and an external device provided in the article transport storage device. A storage device that stores information about the articles stored in the article transport storage apparatus and is writable and readable from a storage robot; a transport robot that transports the article transport storage apparatus between the manufacturing steps; and A communication unit that performs optical communication between the processing apparatus in the manufacturing process, in which the article transport storage apparatus to be transported is loaded, and the article transport storage apparatus, and reads out information stored in the storage device; And a stocker configured to store the article transport storage device, wherein the transport robot moves the article transport storage device from the stocker. An article transport system, wherein the article is transported to the processing apparatus, and the article stored in the article transport storage apparatus is processed by the processing apparatus according to the information read by the communication unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5311909A JPH06278816A (en) | 1993-12-13 | 1993-12-13 | Object transport system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5311909A JPH06278816A (en) | 1993-12-13 | 1993-12-13 | Object transport system |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61106486A Division JPS62263510A (en) | 1986-05-09 | 1986-05-09 | Storing device for conveying goods |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH06278816A true JPH06278816A (en) | 1994-10-04 |
Family
ID=18022882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5311909A Pending JPH06278816A (en) | 1993-12-13 | 1993-12-13 | Object transport system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06278816A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5894020U (en) * | 1981-12-17 | 1983-06-25 | 三菱電機株式会社 | Storage device |
| JPS59130130U (en) * | 1983-02-21 | 1984-09-01 | カシオ計算機株式会社 | Memory protection device using solar cells |
| JPS6057538A (en) * | 1983-07-27 | 1985-04-03 | ポリグラム・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Conveyance system for massproduction of disc-shaped information carrier |
| JPS6048241U (en) * | 1983-09-09 | 1985-04-04 | 日本電気株式会社 | Wafer carrier |
| JPS60193022A (en) * | 1984-03-14 | 1985-10-01 | Idec Izumi Corp | Automatic carrying controller |
| JPS612603A (en) * | 1984-06-14 | 1986-01-08 | ソシエテ アノニム レドウ−テ カタログ | Self-propelling robot type stand-shaped cart |
| JPS6118605A (en) * | 1984-07-06 | 1986-01-27 | Nec Corp | Conveying apparatus |
| JPS61236136A (en) * | 1985-04-12 | 1986-10-21 | Hitachi Ltd | Wafer cassette jig |
| JPS62263510A (en) * | 1986-05-09 | 1987-11-16 | Tokyo Electron Ltd | Storing device for conveying goods |
-
1993
- 1993-12-13 JP JP5311909A patent/JPH06278816A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5894020U (en) * | 1981-12-17 | 1983-06-25 | 三菱電機株式会社 | Storage device |
| JPS59130130U (en) * | 1983-02-21 | 1984-09-01 | カシオ計算機株式会社 | Memory protection device using solar cells |
| JPS6057538A (en) * | 1983-07-27 | 1985-04-03 | ポリグラム・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Conveyance system for massproduction of disc-shaped information carrier |
| JPS6048241U (en) * | 1983-09-09 | 1985-04-04 | 日本電気株式会社 | Wafer carrier |
| JPS60193022A (en) * | 1984-03-14 | 1985-10-01 | Idec Izumi Corp | Automatic carrying controller |
| JPS612603A (en) * | 1984-06-14 | 1986-01-08 | ソシエテ アノニム レドウ−テ カタログ | Self-propelling robot type stand-shaped cart |
| JPS6118605A (en) * | 1984-07-06 | 1986-01-27 | Nec Corp | Conveying apparatus |
| JPS61236136A (en) * | 1985-04-12 | 1986-10-21 | Hitachi Ltd | Wafer cassette jig |
| JPS62263510A (en) * | 1986-05-09 | 1987-11-16 | Tokyo Electron Ltd | Storing device for conveying goods |
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