JPS6042901B2 - 自動楕円計 - Google Patents

自動楕円計

Info

Publication number
JPS6042901B2
JPS6042901B2 JP51038338A JP3833876A JPS6042901B2 JP S6042901 B2 JPS6042901 B2 JP S6042901B2 JP 51038338 A JP51038338 A JP 51038338A JP 3833876 A JP3833876 A JP 3833876A JP S6042901 B2 JPS6042901 B2 JP S6042901B2
Authority
JP
Japan
Prior art keywords
analyzer
light beam
angle
sample
compensator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51038338A
Other languages
English (en)
Japanese (ja)
Other versions
JPS51131655A (en
Inventor
フレデリツク・エイチ・デイル
ペーター・エス・ハウジー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/572,476 external-priority patent/US4053232A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS51131655A publication Critical patent/JPS51131655A/ja
Publication of JPS6042901B2 publication Critical patent/JPS6042901B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP51038338A 1975-04-28 1976-04-07 自動楕円計 Expired JPS6042901B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/572,476 US4053232A (en) 1973-06-25 1975-04-28 Rotating-compensator ellipsometer
US572476 1975-04-28

Publications (2)

Publication Number Publication Date
JPS51131655A JPS51131655A (en) 1976-11-16
JPS6042901B2 true JPS6042901B2 (ja) 1985-09-25

Family

ID=24287979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51038338A Expired JPS6042901B2 (ja) 1975-04-28 1976-04-07 自動楕円計

Country Status (8)

Country Link
JP (1) JPS6042901B2 (it)
BE (1) BE839043A (it)
CA (1) CA1048806A (it)
DE (1) DE2616141A1 (it)
FR (1) FR2309860A1 (it)
GB (1) GB1493087A (it)
IT (1) IT1064176B (it)
NL (1) NL7603931A (it)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180112120A (ko) * 2011-07-07 2018-10-11 케이엘에이-텐코 코포레이션 다중-분광기 각도 스펙트로스코픽 엘립소메트리

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526471A (en) * 1982-06-17 1985-07-02 Bykov Anatoly P Method for sensing spatial coordinate of article point and apparatus therefor
JPS5930004A (ja) * 1982-08-09 1984-02-17 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン 膜厚測定装置
JPS59182324A (ja) * 1983-03-31 1984-10-17 Horiba Ltd 旋光計
NO850157L (no) * 1984-01-16 1985-10-23 Barringer Research Ltd Fremgangsmaate og apparat til paavisning av hydrokarboner paa en vannflate.
JPH0820358B2 (ja) * 1986-03-03 1996-03-04 オリンパス光学工業株式会社 光学的記録媒体用基盤の屈折率の測定装置
DE3708148A1 (de) * 1987-03-11 1987-10-15 Michael Linder Verfahren und vorrichtung zur ellipsometrischen messung
JPS6428509A (en) * 1987-07-23 1989-01-31 Nippon Kokan Kk Apparatus for measuring thickness of film
DE29802464U1 (de) * 1997-03-25 1998-06-04 Schmekel, Björn, 95463 Bindlach Vorrichtung zur Messung des Brechungsindex

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1422426A (en) * 1973-06-22 1976-01-28 Penny Turbines Ltd Noel Compressor rotor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180112120A (ko) * 2011-07-07 2018-10-11 케이엘에이-텐코 코포레이션 다중-분광기 각도 스펙트로스코픽 엘립소메트리

Also Published As

Publication number Publication date
JPS51131655A (en) 1976-11-16
IT1064176B (it) 1985-02-18
NL7603931A (nl) 1976-11-01
FR2309860A1 (fr) 1976-11-26
FR2309860B1 (it) 1979-04-20
BE839043A (fr) 1976-06-16
DE2616141A1 (de) 1976-11-11
GB1493087A (en) 1977-11-23
CA1048806A (en) 1979-02-20

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