GB1493087A - Ellipsometer - Google Patents
EllipsometerInfo
- Publication number
- GB1493087A GB1493087A GB225176A GB225176A GB1493087A GB 1493087 A GB1493087 A GB 1493087A GB 225176 A GB225176 A GB 225176A GB 225176 A GB225176 A GB 225176A GB 1493087 A GB1493087 A GB 1493087A
- Authority
- GB
- United Kingdom
- Prior art keywords
- rotating
- parallel
- retardation plate
- reflected
- analyzer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
- G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
- G01N21/211—Ellipsometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Abstract
1493087 Ellipsometer INTERNATIONAL BUSINESS MACHINES CORP 21 Jan 1976 [28 April 1975] 02251/76 Addition to 1419738 Heading G1A The apparatus of Specification 1419738 is modified by the replacement of a rotating analyzer by a fixed analyzer and a rotating quarter-wave retardation plate, which may be in the reflected or incident beam. The angular encoder is associated with the rotating quarter-wave plate. The arrangement permits unambiguous computation of #, the phase difference between the parallel and perpendicular components of the electric vector of the reflected beam. The angle # where tan # = R p /R s , Rp being the parallel and R s the perpendicular component magnitudes, is also obtainable. A procedure is described, whereby for an imperfect retardation plate, corrected values of # and # are obtained.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/572,476 US4053232A (en) | 1973-06-25 | 1975-04-28 | Rotating-compensator ellipsometer |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1493087A true GB1493087A (en) | 1977-11-23 |
Family
ID=24287979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB225176A Expired GB1493087A (en) | 1975-04-28 | 1976-01-21 | Ellipsometer |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS6042901B2 (en) |
BE (1) | BE839043A (en) |
CA (1) | CA1048806A (en) |
DE (1) | DE2616141A1 (en) |
FR (1) | FR2309860A1 (en) |
GB (1) | GB1493087A (en) |
IT (1) | IT1064176B (en) |
NL (1) | NL7603931A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2153071A (en) * | 1984-01-16 | 1985-08-14 | Barringer Research Ltd | Method and apparatus for detecting hydrocarbons on the surface of water |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4526471A (en) * | 1982-06-17 | 1985-07-02 | Bykov Anatoly P | Method for sensing spatial coordinate of article point and apparatus therefor |
JPS5930004A (en) * | 1982-08-09 | 1984-02-17 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | Measuring device for film thickness |
JPS59182324A (en) * | 1983-03-31 | 1984-10-17 | Horiba Ltd | Polarimeter |
JPH0820358B2 (en) * | 1986-03-03 | 1996-03-04 | オリンパス光学工業株式会社 | Device for measuring the refractive index of a substrate for an optical recording medium |
DE3708148A1 (en) * | 1987-03-11 | 1987-10-15 | Michael Linder | Method and device for ellipsometric measurement |
JPS6428509A (en) * | 1987-07-23 | 1989-01-31 | Nippon Kokan Kk | Apparatus for measuring thickness of film |
DE29802464U1 (en) * | 1997-03-25 | 1998-06-04 | Schmekel, Björn, 95463 Bindlach | Refractive index measuring device |
KR20180028556A (en) * | 2011-07-07 | 2018-03-16 | 케이엘에이-텐코 코포레이션 | Multi-analyzer angle spectroscopic ellipsometry |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1422426A (en) * | 1973-06-22 | 1976-01-28 | Penny Turbines Ltd Noel | Compressor rotor |
-
1976
- 1976-01-21 GB GB225176A patent/GB1493087A/en not_active Expired
- 1976-02-17 FR FR7605148A patent/FR2309860A1/en active Granted
- 1976-02-27 BE BE164736A patent/BE839043A/en not_active IP Right Cessation
- 1976-03-23 IT IT2145776A patent/IT1064176B/en active
- 1976-04-07 JP JP51038338A patent/JPS6042901B2/en not_active Expired
- 1976-04-13 CA CA76250134A patent/CA1048806A/en not_active Expired
- 1976-04-13 DE DE19762616141 patent/DE2616141A1/en not_active Withdrawn
- 1976-04-14 NL NL7603931A patent/NL7603931A/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2153071A (en) * | 1984-01-16 | 1985-08-14 | Barringer Research Ltd | Method and apparatus for detecting hydrocarbons on the surface of water |
Also Published As
Publication number | Publication date |
---|---|
DE2616141A1 (en) | 1976-11-11 |
JPS6042901B2 (en) | 1985-09-25 |
JPS51131655A (en) | 1976-11-16 |
NL7603931A (en) | 1976-11-01 |
FR2309860B1 (en) | 1979-04-20 |
CA1048806A (en) | 1979-02-20 |
IT1064176B (en) | 1985-02-18 |
BE839043A (en) | 1976-06-16 |
FR2309860A1 (en) | 1976-11-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed |