GB1493087A - Ellipsometer - Google Patents

Ellipsometer

Info

Publication number
GB1493087A
GB1493087A GB225176A GB225176A GB1493087A GB 1493087 A GB1493087 A GB 1493087A GB 225176 A GB225176 A GB 225176A GB 225176 A GB225176 A GB 225176A GB 1493087 A GB1493087 A GB 1493087A
Authority
GB
United Kingdom
Prior art keywords
rotating
parallel
retardation plate
reflected
analyzer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB225176A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/572,476 external-priority patent/US4053232A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1493087A publication Critical patent/GB1493087A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Abstract

1493087 Ellipsometer INTERNATIONAL BUSINESS MACHINES CORP 21 Jan 1976 [28 April 1975] 02251/76 Addition to 1419738 Heading G1A The apparatus of Specification 1419738 is modified by the replacement of a rotating analyzer by a fixed analyzer and a rotating quarter-wave retardation plate, which may be in the reflected or incident beam. The angular encoder is associated with the rotating quarter-wave plate. The arrangement permits unambiguous computation of #, the phase difference between the parallel and perpendicular components of the electric vector of the reflected beam. The angle # where tan # = R p /R s , Rp being the parallel and R s the perpendicular component magnitudes, is also obtainable. A procedure is described, whereby for an imperfect retardation plate, corrected values of # and # are obtained.
GB225176A 1975-04-28 1976-01-21 Ellipsometer Expired GB1493087A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/572,476 US4053232A (en) 1973-06-25 1975-04-28 Rotating-compensator ellipsometer

Publications (1)

Publication Number Publication Date
GB1493087A true GB1493087A (en) 1977-11-23

Family

ID=24287979

Family Applications (1)

Application Number Title Priority Date Filing Date
GB225176A Expired GB1493087A (en) 1975-04-28 1976-01-21 Ellipsometer

Country Status (8)

Country Link
JP (1) JPS6042901B2 (en)
BE (1) BE839043A (en)
CA (1) CA1048806A (en)
DE (1) DE2616141A1 (en)
FR (1) FR2309860A1 (en)
GB (1) GB1493087A (en)
IT (1) IT1064176B (en)
NL (1) NL7603931A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2153071A (en) * 1984-01-16 1985-08-14 Barringer Research Ltd Method and apparatus for detecting hydrocarbons on the surface of water

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526471A (en) * 1982-06-17 1985-07-02 Bykov Anatoly P Method for sensing spatial coordinate of article point and apparatus therefor
JPS5930004A (en) * 1982-08-09 1984-02-17 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン Measuring device for film thickness
JPS59182324A (en) * 1983-03-31 1984-10-17 Horiba Ltd Polarimeter
JPH0820358B2 (en) * 1986-03-03 1996-03-04 オリンパス光学工業株式会社 Device for measuring the refractive index of a substrate for an optical recording medium
DE3708148A1 (en) * 1987-03-11 1987-10-15 Michael Linder Method and device for ellipsometric measurement
JPS6428509A (en) * 1987-07-23 1989-01-31 Nippon Kokan Kk Apparatus for measuring thickness of film
DE29802464U1 (en) * 1997-03-25 1998-06-04 Schmekel Bjoern Refractive index measuring device
KR20140056261A (en) * 2011-07-07 2014-05-09 케이엘에이-텐코 코포레이션 Multi-analyzer angle spectroscopic ellipsometry

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1422426A (en) * 1973-06-22 1976-01-28 Penny Turbines Ltd Noel Compressor rotor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2153071A (en) * 1984-01-16 1985-08-14 Barringer Research Ltd Method and apparatus for detecting hydrocarbons on the surface of water

Also Published As

Publication number Publication date
IT1064176B (en) 1985-02-18
NL7603931A (en) 1976-11-01
FR2309860B1 (en) 1979-04-20
DE2616141A1 (en) 1976-11-11
CA1048806A (en) 1979-02-20
JPS51131655A (en) 1976-11-16
FR2309860A1 (en) 1976-11-26
BE839043A (en) 1976-06-16
JPS6042901B2 (en) 1985-09-25

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Legal Events

Date Code Title Description
PS Patent sealed